Abstract: A machine tool is fitted with a position detector for detecting a position of a moving axis of the machine tool and an on-machine measuring device for measurement on the machine tool. An axial position detection signal output from the position detector and a measurement signal output from the on-machine measuring device are received through interfaces by a numerical controller that controls the machine tool. These interfaces are designed so that the numerical controller receives the axial position detection signal and the measurement signal with the same timing.

Abstract: In a simultaneous multi-axis measuring machine tool system including linear drive axes and rotation axes to measure a surface shape of an object to be measured by using an on-board measuring device having a probe mounted, at one end thereof, with a spherical contactor, a numerical controller controls driving of the linear drive axes and the rotation axes so that a central axis of the probe is always oriented in a direction perpendicular to the surface of the object to be measured and that the spherical contactor of the probe comes in contact with and follows a surface of the object to be measured.

Abstract: A reciprocating linear actuator in which a slide and a counter slide are arranged for linear movement within a hollow guide. The actuator has driving force generating means for generating a driving force between the slide and the counter slide and also has bearing structures formed individually between the guide and the slide and between the guide and the counter slide. If an external force acts on the slide, the external force is transmitted from the slide to the guide through the bearing structure between them.

Abstract: Since a tool holder is formed of a structure which is elastically deformed by a centrifugal force produced as the tool holder rotates around a rotation center axis, the rotation radius of a tool with a cutting edge directed to the rotation center axis varies from zero to an arbitrary value. The structure of the tool holder includes two beams elastically deformable to the same degree in opposite directions by the centrifugal force, and centrifugal force components acting on the two beams cancel each other so that a rotation balance is maintained even when the rotational speed of the tool holder is changed.

Abstract: A spindle device driven by driving fluid, having accurate rotation and superior quietness. The device includes a stator having at least one inlet for introducing the driving fluid, a rotor having at least one flange arranged outside of the stator and provided with nozzles for jetting the driving fluid, and a static-pressure fluid bearing for rotatably supporting the rotor with respect to the stator. The stator has a first inner path for conducting the driving fluid introduced from the inlet to the rotor and the rotor has a second inner path communicating with the first inner path of the stator for conducting the driving fluid to the nozzles. The driving fluid introduced from the inlet of the stator is jetted from the nozzles of the rotor through the first and second inner paths to rotate the rotor.

Abstract: A measurement program is created for measurement performed by moving X- and Z-axes so that a central axis of a probe is perpendicular to the surface of a reference sphere, and errors are obtained between original probe position data and probe position data obtained by measurement performed at two different angles ?1 and ?2 of a rotary axis according to the created measurement program. Position coordinates of a tip end of the probe at the two different angles ?1 and ?2 of the rotary axis are corrected so that the errors are zero. Then, the X- and Z-axis coordinates are corrected based on a positive or negative phased shift amount, and measurement errors are obtained by calculation. A real probe tip position is defined by the X- and Z-axis coordinates corrected by a correction amount with which the obtained measurement errors become minimum.

Abstract: A contact type measurement device performs measurement with displacement of a probe, while a contact member attached to the probe is in contact with an object to be measured. Data on the relationship of a contact force of the probe to the object to be measured with an angle between the central axis of the probe and the direction of gravity, the amount of displacement of the probe, and a fluid pressure for applying a pushing-out or pulling-in force to the probe is stored in advance and, on the basis of this data, the fluid pressure or the amount of displacement of the probe is controlled to automatically and precisely adjust a fine contact force of the probe to the object to be measured.

Abstract: An ultra-precision machine tool capable of accurately detecting a machining start position, in which movable axes are supported by fluid bearings. A workpiece is mounted on a rotary table of a B axis, and the rotary table is mounted on an X axis that is a linear motion axis. A tool is mounted on a Y axis. The Y axis is mounted on a Z axis. The X axis is moved reciprocally each time the Z axis is moved a predetermined amount, a machining surface of the workpiece is scanned, and it is determined whether or not position deviation of the X, Y and B axes reaches or exceeds a reference value. The Y axis is driven and the tool is moved toward the workpiece a predetermined amount, and the above-described scan is performed.

Abstract: An angle adjusting mechanism or a linear axis of a processing machine is provided with a reciprocation device. A tool and a tool cutting mechanism are mounted on a moving part of the reciprocation device. A workpiece is processed by the tool based on a combination of the drive of the processing machine and the drive of the reciprocation device.

Abstract: An interior of a machine tool and a machining area are divided for communication by a labyrinth. The machining area is covered by a cover. Air discharged from an air bearing flows from the machine tool interior into the machining area through the labyrinth. The cover for the machining area is provided with an exhaust unit for discharging the air from the air bearing or a mist produced in the machining area to the outside of the machine tool.

Abstract: When a slide member mounted with a tool reciprocates on a guide member reach one end and the other end positions of the guide member, permanent magnets provided on the guide member and the permanent magnets provided on the slide member repel each other to give the guide member forces for reversing its moving direction. The guide member is provided to be movable with respect to a base and repulsive forces between permanent magnets provided on the base and permanent magnets provided on the guide member are used to retain an axial position of the guide member.

Abstract: A temperature control system for a machine tool capable of quickly responding to an ambient temperature change. A mechanical section of the machine tool is surrounded by a machine cover. Gas of which temperature is controlled by a temperature controller is discharged from bearing portions of gas bearings in the mechanical section to a region surrounded by the machine cover through a pipe and a gas bearing channel. A branch pipe is provided for directly introducing a part of gas discharged from the temperature controller to a temperature sensor inside the machine cover. The temperature sensor measures the temperature of gas mixture obtained by mixing the gas introduced directly from the pipe with air inside the machine cover in a predetermined ratio. The result of measurement by the temperature sensor is fed back to the temperature controller to control the temperature of the gas supplied to the gas bearings.

Abstract: A method for setting a working origin for a rotary tool in contact with a work piece to be machined, having: applying to a main spindle which holds the rotary tool, with a tip of a cutting edge of the rotary tool in contact with an outer surface of the work piece fixed to a work table, a load torque to such an extent that the rotary tool is not caused to be rotated; applying the load torque to the main spindle, and moving either the work table or the main spindle in a jog feed in a direction of any one of feed shafts such that the tip of the cutting edge is moved away from the outer surface along an axial direction of the rotary tool or in the direction orthogonal to the axial direction; and setting a coordinate at the moment when the main spindle starts rotation as a working origin of the jog feed in the direction of the any one of the feed shafts.

Abstract: A machine tool capable of automatically correcting an orientation of a workpiece or machining attachment based on detection results from position detectors that the machine tool inherently has. The machine tool comprises: position detectors; position deviation determining means; contact detection means that detects a contact between a probe and a surface of the workpiece or the machining attachment based on a position deviation; movable axis stopping means; coordinate value detection means; inclination determining means; and correction means. The inclination determining means moves linear axes to perform detection of contacts between the probe and the surface of the workpiece or the machining attachment at least two different points, and determines an inclination of the workpiece or the machining attachment using the obtained coordinate values. The correction means corrects a mounting error of the workpiece or the machining attachment, or corrects the machining program based on the determined inclination.

Abstract: There is provided a contact type measuring instrument in which the contact force of a probe is adjusted by a force created by compressed air and an attraction force between a permanent magnet and a magnetic body. This measuring instrument gives a pulling-in force or a pushing-out force to the probe by controlling a fluid pressure in a probe body. Also, between the permanent magnet attached to the tip end of a movable part of a micrometer attached to the probe body and a plate-shaped member attached to the end part on the side opposite to a contact of the probe, an attraction force according to a distance between the permanent magnet and the plate-shaped member is created.

Abstract: In a machine tool having an on-board measuring machine and controlled by a numerical controller, a method of measuring a shape of a workpiece presets a reference point for temperature drift correction on the workpiece, moves a probe to the reference point, resets a coordinate system of the probe to correct a temperature drift of the probe, and carries out shape measurement of the workpiece along a first measuring path. Next, the method moves the probe to the reference point again, resets the coordinate system of the probe to correct a temperature drift of the probe again, and carries out shape measurement of the workpiece along a second measuring path. Thereafter, similar temperature drift correction is carried out for each measuring path until the shape measurement of the workpiece is carried out along the last measuring path.

Abstract: A fluid bearing structure with uniform depths of bearing concaves and a method of forming the bearing concaves in the fluid bearing structure. Pipe parts are inserted into through holes formed in the bearing base to form fluid spout holes for spouting fluid between confronting bearing surfaces. Bearing concaves are formed around the fluid spout holes. The bearing base and the pipe parts are made of different materials. A coating layer is formed on the bearing base and the pipe parts by an anodic oxidation process. Thickness of the coating layer on the bearing base is different from thickness of the coating layer on the pipe parts since the base member and the pipe members are made of different materials. The material on which a coating layer grows quickly is selected for the bearing base and the material on which a coating layer grows slowly is selected for the pipe parts.

Abstract: In a machine tool having an on-board measuring machine and controlled by a numerical controller, a method of measuring a shape of a workpiece presets a reference point for temperature drift correction on the workpiece, moves a probe to the reference point, resets a coordinate system of the probe to correct a temperature drift of the probe, and carries out shape measurement of the workpiece along a first measuring path. Next, the method moves the probe to the reference point again, resets the coordinate system of the probe to correct a temperature drift of the probe again, and carries out shape measurement of the workpiece along a second measuring path. Thereafter, similar temperature drift correction is carried out for each measuring path until the shape measurement of the workpiece is carried out along the last measuring path.

Abstract: A reciprocating linear actuator in which a slide and a counter slide are arranged for linear movement within a hollow guide. The actuator has driving force generating means for generating a driving force between the slide and the counter slide and also has bearing structures formed individually between the guide and the slide and between the guide and the counter slide. If an external force acts on the slide, the external force is transmitted from the slide to the guide through the bearing structure between them.

Abstract: In a simultaneous multi-axis measuring machine tool system including linear drive axes and rotation axes to measure a surface shape of an object to be measured by using an on-board measuring device having a probe mounted, at one end thereof, with a spherical contactor, a numerical controller controls driving of the linear drive axes and the rotation axes so that a central axis of the probe is always oriented in a direction perpendicular to the surface of the object to be measured and that the spherical contactor of the probe comes in contact with and follows a surface of the object to be measured.