Patents by Inventor Kerry Chiu

Kerry Chiu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Microelectronic fabrication tool loading method providing enhanced microelectronic fabrication tool operating efficiency
    Patent number: 6629813
    Abstract: Within a method for operating a fabrication tool which requires transfer of a series substrates from a storage carrier to a process carrier when fabricating the series of substrates within the process carrier within the fabrication tool, a specific series of substrates is transferred from a storage carrier to a process carrier (and/or the reverse) simultaneously with fabricating a separate series of substrates within a process carrier within the fabrication tool. By employing the method, the fabrication tool may be operated more efficiently.
    Type: Grant
    Filed: April 18, 2001
    Date of Patent: October 7, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Yiau-Hweui Chen, Kerry Chiu, Raymond Chen, Larry Huang
  • Microelectronic fabrication tool loading method providing enhanced microelectronic fabrication tool operating efficiency
    Publication number: 20020154988
    Abstract: Within a method for operating a fabrication tool which requires transfer of a series substrates from a storage carrier to a process carrier when fabricating the series of substrates within the process carrier within the fabrication tool, a specific series of substrates is transferred from a storage carrier to a process carrier (and/or the reverse) simultaneously with fabricating a separate series of substrates within a process carrier within the fabrication tool. By employing the method, the fabrication tool may be operated more efficiently.
    Type: Application
    Filed: April 18, 2001
    Publication date: October 24, 2002
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yiau-Hweui Chen, Kerry Chiu, Raymond Chen, Larry Huang