Patents by Inventor Kerstin Kaemmer

Kerstin Kaemmer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11774308
    Abstract: A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
    Type: Grant
    Filed: September 17, 2020
    Date of Patent: October 3, 2023
    Assignee: Infineon Technologies AG
    Inventors: Rainer Leuschner, Kerstin Kaemmer, Roland Meier, Marten Oldsen, Karolina Zogal
  • Publication number: 20230251154
    Abstract: A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
    Type: Application
    Filed: April 21, 2023
    Publication date: August 10, 2023
    Inventors: Rainer Leuschner, Kerstin Kaemmer, Roland Meier, Marten Oldsen, Karolina Zogal
  • Publication number: 20230127662
    Abstract: An IR (infrared) radiation source includes a sealed cavity structure enclosing a vacuum chamber having a low atmospheric pressure, wherein the sealed cavity structure includes a thermally and electrically insulating material for enclosing the vacuum chamber, heating filaments extending in the vacuum chamber between opposing electrode regions at opposing wall regions of the vacuum chamber, wherein the heating filaments are electrically connected in parallel, and wherein the heating filaments and the electrode regions have a highly electrically conductive material, and an optical isolation structure adjacent to the vacuum chamber for optically confining the IR radiation and providing a predominant propagation direction of the IR radiation.
    Type: Application
    Filed: October 19, 2022
    Publication date: April 27, 2023
    Inventors: Stefan Hampl, Kerstin Kämmer, Olaf Storbeck, Ines Uhlig
  • Publication number: 20220238501
    Abstract: A method for wafer bonding includes: providing a semiconductor wafer having a first main face; fabricating at least one semiconductor device in the semiconductor wafer, wherein the semiconductor device is arranged at the first main face; generating trenches and a cavity in the semiconductor wafer such that the at least one semiconductor device is connected to the rest of the semiconductor wafer by no more than at least one connecting pillar; arranging the semiconductor wafer on a carrier wafer such that the first main face faces the carrier wafer; attaching the at least one semiconductor device to the carrier wafer; and removing the at least one semiconductor device from the semiconductor wafer by breaking the at least one connecting pillar.
    Type: Application
    Filed: January 25, 2022
    Publication date: July 28, 2022
    Inventors: Stefan Hampl, Marco Haubold, Kerstin Kaemmer, Norbert Thyssen
  • Publication number: 20220052091
    Abstract: A device for an image sensor is provided. The device includes a semiconductor device having a photo-sensitive region and a metallization stack for electrically contacting the photo-sensitive region. The photo-sensitive region is configured to generate an electric signal based on incident light. Further, the device includes an optical stack formed on a surface of the semiconductor device and configured to guide the incident light towards the photo-sensitive region. The optical stack includes a plurality of regions stacked on top of each other. The plurality of regions includes a filter region configured to selectively transmit the incident light only in a target wavelength range.
    Type: Application
    Filed: August 10, 2021
    Publication date: February 17, 2022
    Inventors: Ines Uhlig, Kerstin Kaemmer, Dirk Offenberg, Norbert Thyssen
  • Publication number: 20210003466
    Abstract: A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
    Type: Application
    Filed: September 17, 2020
    Publication date: January 7, 2021
    Inventors: Rainer Leuschner, Kerstin Kaemmer, Roland Meier, Marten Oldsen, Karolina Zogal
  • Patent number: 10859457
    Abstract: A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
    Type: Grant
    Filed: November 9, 2017
    Date of Patent: December 8, 2020
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Rainer Leuschner, Kerstin Kaemmer, Roland Meier, Marten Oldsen, Karolina Zogal
  • Patent number: 10784147
    Abstract: In accordance with an embodiment, a method for producing a buried cavity structure includes providing a mono-crystalline semiconductor substrate, producing a doped volume region in the mono-crystalline semiconductor substrate, wherein the doped volume region has an increased etching rate for a first etchant by comparison with an adjoining, undoped or more lightly doped material of the monocrystalline semiconductor substrate, forming an access opening to the doped volume region, and removing the doped semiconductor material in the doped volume region using the first etchant through the access opening to obtain the buried cavity structure.
    Type: Grant
    Filed: July 6, 2018
    Date of Patent: September 22, 2020
    Assignee: Infineon Technologies AG
    Inventors: Ines Uhlig, Kerstin Kaemmer, Norbert Thyssen
  • Patent number: 10329140
    Abstract: A semiconductor device includes at least one suspension region of a membrane structure, where the suspension region lies laterally in a first region of a surface of a semiconductor substrate; and a membrane region of the membrane structure, where a cavity is arranged vertically between the membrane region and at least one part of the semiconductor substrate, and the first region of the surface of the semiconductor substrate is formed by a surface of a shielding doping region of the semiconductor substrate.
    Type: Grant
    Filed: February 8, 2018
    Date of Patent: June 25, 2019
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Marco Haubold, Henning Feick, Kerstin Kaemmer
  • Patent number: 10276494
    Abstract: Memory cells and corresponding memory arrays are provided. The memory cell comprises a fusable element and a bipolar transistor arranged adjacent to the fusable element.
    Type: Grant
    Filed: July 19, 2017
    Date of Patent: April 30, 2019
    Assignee: Infineon Technologies AG
    Inventors: Kerstin Kaemmer, Martin Bartels, Henning Feick
  • Publication number: 20190027399
    Abstract: In accordance with an embodiment, a method for producing a buried cavity structure includes providing a mono-crystalline semiconductor substrate, producing a doped volume region in the mono-crystalline semiconductor substrate, wherein the doped volume region has an increased etching rate for a first etchant by comparison with an adjoining, undoped or more lightly doped material of the monocrystalline semiconductor substrate, forming an access opening to the doped volume region, and removing the doped semiconductor material in the doped volume region using the first etchant through the access opening to obtain the buried cavity structure.
    Type: Application
    Filed: July 6, 2018
    Publication date: January 24, 2019
    Inventors: Ines Uhlig, Kerstin Kaemmer, Norbert Thyssen
  • Publication number: 20180222744
    Abstract: A semiconductor device includes at least one suspension region of a membrane structure, where the suspension region lies laterally in a first region of a surface of a semiconductor substrate; and a membrane region of the membrane structure, where a cavity is arranged vertically between the membrane region and at least one part of the semiconductor substrate, and the first region of the surface of the semiconductor substrate is formed by a surface of a shielding doping region of the semiconductor substrate.
    Type: Application
    Filed: February 8, 2018
    Publication date: August 9, 2018
    Inventors: Marco Haubold, Henning Feick, Kerstin Kaemmer
  • Publication number: 20180136064
    Abstract: A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.
    Type: Application
    Filed: November 9, 2017
    Publication date: May 17, 2018
    Inventors: Rainer Leuschner, Kerstin Kaemmer, Roland Meier, Marten Oldsen, Karolina Zogal
  • Publication number: 20180061756
    Abstract: One time programmable memory cell and memory array Memory cells and corresponding memory arrays are provided. The memory cell comprises a fusable element and a bipolar transistor arranged adjacent to the fusable element.
    Type: Application
    Filed: July 19, 2017
    Publication date: March 1, 2018
    Inventors: Kerstin Kaemmer, Martin Bartels, Henning Feick
  • Publication number: 20170018557
    Abstract: According to various embodiments, a method for processing a carrier may include: doping a carrier with fluorine such that a first surface region of the carrier is fluorine doped and a second surface region of the carrier is at least one of free from the fluorine doping or less fluorine doped than the first surface region; and oxidizing the carrier to grow a first gate oxide layer from the first surface region of the carrier with a first thickness and simultaneously from the second surface region of the carrier with a second thickness different from the first thickness.
    Type: Application
    Filed: September 28, 2016
    Publication date: January 19, 2017
    Inventors: Kerstin KAEMMER, Thomas BERTRAMS, Henning FEICK, Olaf STORBECK, Matthias SCHMEIDE
  • Patent number: 9478555
    Abstract: According to various embodiments, a method for processing a carrier may include: doping a carrier with fluorine such that a first surface region of the carrier is fluorine doped and a second surface region of the carrier is at least one of free from the fluorine doping or less fluorine doped than the first surface region; and oxidizing the carrier to grow a first gate oxide layer from the first surface region of the carrier with a first thickness and simultaneously from the second surface region of the carrier with a second thickness different from the first thickness.
    Type: Grant
    Filed: October 30, 2015
    Date of Patent: October 25, 2016
    Assignee: Infineon Technologies AG
    Inventors: Kerstin Kaemmer, Thomas Bertrams, Henning Feick, Olaf Storbeck, Matthias Schmeide
  • Publication number: 20160049411
    Abstract: According to various embodiments, a method for processing a carrier may include: doping a carrier with fluorine such that a first surface region of the carrier is fluorine doped and a second surface region of the carrier is at least one of free from the fluorine doping or less fluorine doped than the first surface region; and oxidizing the carrier to grow a first gate oxide layer from the first surface region of the carrier with a first thickness and simultaneously from the second surface region of the carrier with a second thickness different from the first thickness.
    Type: Application
    Filed: October 30, 2015
    Publication date: February 18, 2016
    Inventors: Kerstin KAEMMER, Thomas BERTRAMS, Henning FEICK, Olaf STORBECK, Matthias SCHMEIDE
  • Publication number: 20150371995
    Abstract: According to various embodiments, a method for processing a carrier may include: doping a carrier with fluorine such that a first surface region of the carrier is fluorine doped and a second surface region of the carrier is at least one of free from the fluorine doping or less fluorine doped than the first surface region; and oxidizing the carrier to grow a first gate oxide layer from the first surface region of the carrier with a first thickness and simultaneously from the second surface region of the carrier with a second thickness different from the first thickness.
    Type: Application
    Filed: June 20, 2014
    Publication date: December 24, 2015
    Inventors: Kerstin Kaemmer, Thomas Bertrams, Henning Feick, Olaf Storbeck, Matthias Schmeide
  • Patent number: 9202815
    Abstract: According to various embodiments, a method for processing a carrier may include: doping a carrier with fluorine such that a first surface region of the carrier is fluorine doped and a second surface region of the carrier is at least one of free from the fluorine doping or less fluorine doped than the first surface region; and oxidizing the carrier to grow a first gate oxide layer from the first surface region of the carrier with a first thickness and simultaneously from the second surface region of the carrier with a second thickness different from the first thickness.
    Type: Grant
    Filed: June 20, 2014
    Date of Patent: December 1, 2015
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Kerstin Kaemmer, Thomas Bertrams, Henning Feick, Olaf Storbeck, Matthias Schmeide
  • Patent number: 9000597
    Abstract: A semiconductor device and a method of making a semiconductor device are disclosed. The method of manufacturing a semiconductor device comprises forming a material layer on a substrate, patterning a first semi-global region with a first main pattern and patterning a second semi-global region with a second main pattern, wherein the first main pattern is different than the second main pattern. The method further comprises introducing a first dummy pattern in the first semi-global region so that a first sidewall area surface density of the first main pattern and the first dummy pattern in the first semi-global region and a second sidewall area surface density of the second main pattern in the second semi-global region are substantially a same density.
    Type: Grant
    Filed: August 5, 2013
    Date of Patent: April 7, 2015
    Assignee: Infineon Technologies AG
    Inventors: Frank Huebinger, Steffen Rothenhaeusser, Kerstin Kaemmer