Abstract: A substrate processing apparatus includes: a conveyor belt configured to have an outer surface on which a bottom surface of a substrate is seated; and a polishing head unit configured to face an upper surface of the substrate, wherein the polishing head unit includes: a polishing head connected to a driver; a polishing pad configured to face the polishing head; a polishing pad fixing ring disposed between the polishing head and the polishing pad; and a temperature sensor configured to overlap the polishing pad fixing ring and to be spaced apart from the polishing pad fixing ring.

Abstract: The present disclosure may disclose a multi stage safety injection device and a passive safety injection system having the same, including a safety injection tank formed to contain coolant to be injected into a reactor vessel by a gravitational head of water when an accident occurs in which the pressure or water level of the reactor vessel is decreased, a pressure balance line connected to the reactor vessel and safety injection tank to form a pressure balance state between the reactor vessel and the safety injection tank, a safety injection line connected to a lower end portion of the safety injection tank and the reactor vessel to inject coolant to the reactor vessel in a pressure balance state between the reactor vessel and the safety injection tank, and a flow control line extended from the safety injection line to an inner portion of the safety injection tank, and provided with safety injection ports into which coolant is injected at predetermined heights, respectively, to reduce the flow rate of coolant

Abstract: A passive safety system includes a containment, a reactor in the containment, a plurality of safety injection tanks connected with the reactor and having water and nitrogen gas to supply water thereof into the reactor through a safety injection line communicating to the first safety injection line upon a loss of coolant accident, a plurality of core makeup tanks connected with the reactor to supply water thereof into the reactor through a second safety injection line communicating to a safety injection line upon the loss of coolant accident, and a plurality of passive residual heat removal systems to remove residual heat from the reactor upon the loss of coolant accident or a non-loss of coolant accident. The water in each of the safety injection tank is stably supplied to the reactor for many hours by a differential head resulting from gravity or gas pressure.

Abstract: The present disclosure may disclose a multi stage safety injection device and a passive safety injection system having the same, including a safety injection tank formed to contain coolant to be injected into a reactor vessel by a gravitational head of water when an accident occurs in which the pressure or water level of the reactor vessel is decreased, a pressure balance line connected to the reactor vessel and safety injection tank to form a pressure balance state between the reactor vessel and the safety injection tank, a safety injection line connected to a lower end portion of the safety injection tank and the reactor vessel to inject coolant to the reactor vessel in a pressure balance state between the reactor vessel and the safety injection tank, and a flow control line extended from the safety injection line to an inner portion of the safety injection tank, and provided with safety injection ports into which coolant is injected at predetermined heights, respectively, to reduce the flow rate of coolant

Abstract: A passive safety system includes a containment, a reactor in the containment, a plurality of safety injection tanks connected with the reactor and having water and nitrogen gas to supply water thereof into the reactor through a safety injection line communicating to the first safety injection line upon a loss of coolant accident, a plurality of core makeup tanks connected with the reactor to supply water thereof into the reactor through a second safety injection line communicating to a safety injection line upon the loss of coolant accident, and a plurality of passive residual heat removal systems to remove residual heat from the reactor upon the loss of coolant accident or a non-loss of coolant accident. The water in each of the safety injection tank is stably supplied to the reactor for many hours by a differential head resulting from gravity or gas pressure.