Patents by Inventor Kevin Argabright

Kevin Argabright has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Heated electrostatic chuck and semiconductor wafer heater and methods for manufacturing same
    Patent number: 9543183
    Abstract: A heated electrostatic chuck is provided, including a base having an upper surface and peripheral side surfaces, a thermal barrier coating formed by plasma deposition directly on at least the upper surface of the base, at least one heating element formed on portions of the thermal barrier coating, an electrically insulating layer formed on the heating element and exposed portions of the thermal barrier coating, at least one chucking electrode formed on at least a portion of the electrically insulating layer, and a protective layer formed on the chucking electrode.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: January 10, 2017
    Assignee: FM Industries, Inc.
    Inventors: Jae Yong Cho, Kevin Argabright, James E. LaRoche, III, Mahmood Naim, David R. Hammerich, John R. Miller
  • HEATED ELECTROSTATIC CHUCK AND SEMICONDUCTOR WAFER HEATER AND METHODS FOR MANUFACTURING SAME
    Publication number: 20140291311
    Abstract: A heated electrostatic chuck is provided, including a base having an upper surface and peripheral side surfaces, a thermal barrier coating formed by plasma deposition directly on at least the upper surface of the base, at least one heating element formed on portions of the thermal barrier coating, an electrically insulating layer formed on the heating element and exposed portions of the thermal barrier coating, at least one chucking electrode formed on at least a portion of the electrically insulating layer, and a protective layer formed on the chucking electrode.
    Type: Application
    Filed: September 26, 2013
    Publication date: October 2, 2014
    Applicant: FM INDUSTRIES, INC.
    Inventors: Jae Yong Cho, Kevin Argabright, James E. LaRoche, III, Mahmood Naim, David R. Hammerich, John R. Miller