Patents by Inventor Kevin K. Chan

Kevin K. Chan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9502504
    Abstract: Lateral SOI bipolar transistor structures are provided including an intrinsic base semiconductor material portion in which all surfaces of the intrinsic base not forming an interface with either a collector semiconductor material portion or an emitter semiconductor material portion, contain an extrinsic base semiconductor material portion. Each extrinsic base semiconductor material portion is of the same conductivity type as that of the intrinsic base semiconductor material portion, yet each extrinsic base semiconductor material portion has a higher dopant concentration than the intrinsic base semiconductor material portion. The intrinsic base semiconductor material portion of the lateral SOI bipolar transistors of the present application does not have any interface with surrounding insulator material layers. As such, any potential charge build-up in the surrounding insulator material layers is shielded by the extrinsic base semiconductor material portions.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: November 22, 2016
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Kevin K. Chan, Tak H. Ning, Jeng-Bang Yau
  • Publication number: 20160329211
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Furthermore, the approach includes alloying a metal layer with a dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Application
    Filed: July 15, 2016
    Publication date: November 10, 2016
    Inventors: Kevin K. Chan, Marinus J.P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Patent number: 9490332
    Abstract: A structure includes a fin having a gate structure disposed on a portion of a surface and an initial spacer layer disposed on the fin and gate structure. There are vertical steps in the fin adjacent to outer surfaces of the initial dielectric layer on first and second sides of the gate structure. The structure further has a dopant source layer on exposed surfaces of the fin and vertical steps; a secondary spacer disposed over the initial spacer and over a portion of the dopant source layer disposed on the vertical steps, and first and second RSDs abutted against outer sidewalls of the secondary spacer structure. In the structure there are diffused dopant atoms disposed in the fin beneath the secondary spacer and the initial spacer and towards a channel region that underlies the gate structure. A method to fabricate the structure is also disclosed, where the method includes ALDo.
    Type: Grant
    Filed: October 21, 2015
    Date of Patent: November 8, 2016
    Assignee: International Business Machines Corporation
    Inventors: Karthik Balakrishnan, Kevin K. Chan, Pouya Hashemi
  • Patent number: 9490352
    Abstract: A method for forming a bipolar junction transistor includes forming a collector intrinsic region, an emitter intrinsic region and an intrinsic base region between the collector intrinsic region and the emitter intrinsic region. A collector extrinsic contact region is formed in direct contact with the collector intrinsic region; an emitter extrinsic contact region is formed on the emitter intrinsic region and a base extrinsic contact region is formed in direct contact with the intrinsic base region. Carbon is introduced into at least one of the collector extrinsic contact region, the emitter extrinsic contact region and the base extrinsic contact region to suppress diffusion of dopants into the junction region.
    Type: Grant
    Filed: March 18, 2016
    Date of Patent: November 8, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Bahman Hekmatshoartabari, Tak H. Ning
  • Publication number: 20160322500
    Abstract: A semiconductor fin including a single crystalline semiconductor material is formed on a dielectric layer. A semiconductor shell including an epitaxial semiconductor material is formed on all physically exposed surfaces of the semiconductor fin by selective epitaxy, which deposits the semiconductor material only on semiconductor surfaces and not on dielectric surfaces. The epitaxial semiconductor material can be different from the single crystalline semiconductor material, and the semiconductor shell can be bilaterally strained due to lattice mismatch. A fin field effect transistor including a strained channel can be formed. Further, the semiconductor shell can advantageously alter properties of the source and drain regions, for example, by allowing incorporation of more dopants or by facilitating a metallization process.
    Type: Application
    Filed: July 11, 2016
    Publication date: November 3, 2016
    Applicant: International Business Machines Corporation
    Inventors: Kevin K. Chan, Young-Hee Kim, Masaharu Kobayashi, Jinghong Li, Dae-Gyu Park
  • Publication number: 20160322481
    Abstract: A lateral bipolar junction transistor including a base region on a dielectric substrate layer. The base region includes a layered stack of alternating material layers of a first lattice dimension semiconductor material and a second lattice dimension semiconductor material. The first lattice dimension semiconductor material is different from the second lattice dimension semiconductor material to provide a strained base region. A collector region is present on the dielectric substrate layer in contact with a first side of the base region. An emitter region is present on the dielectric substrate in contact with a second side of the base region that is opposite the first side of the base region.
    Type: Application
    Filed: July 11, 2016
    Publication date: November 3, 2016
    Inventors: KEVIN K. CHAN, BAHMAN HEKMATSHOARTABARI, TAK H. NING
  • Publication number: 20160322264
    Abstract: A semiconductor fin including a single crystalline semiconductor material is formed on a dielectric layer. A semiconductor shell including an epitaxial semiconductor material is formed on all physically exposed surfaces of the semiconductor fin by selective epitaxy, which deposits the semiconductor material only on semiconductor surfaces and not on dielectric surfaces. The epitaxial semiconductor material can be different from the single crystalline semiconductor material, and the semiconductor shell can be bilaterally strained due to lattice mismatch. A fin field effect transistor including a strained channel can be formed. Further, the semiconductor shell can advantageously alter properties of the source and drain regions, for example, by allowing incorporation of more dopants or by facilitating a metallization process.
    Type: Application
    Filed: July 11, 2016
    Publication date: November 3, 2016
    Applicant: International Business Machines Corporation
    Inventors: Kevin K. Chan, Young-Hee Kim, Masaharu Kobayashi, Jinghong Li, Dae-Gyu Park
  • Publication number: 20160300935
    Abstract: A method of forming a semiconductor structure includes providing an emitter and a collector on a surface of an insulator layer. The emitter and the collector are spaced apart and have a doping of a first conductivity type. An intrinsic base is formed between the emitter and the collector and on the insulator layer by epitaxially growing the intrinsic base from at least a vertical surface of the emitter and a vertical surface of the collector. The intrinsic base has a doping of a second conductivity type opposite to the first conductivity type, and a first heterojunction exists between the emitter and the intrinsic base and a second heterojunction exists between the collector and the intrinsic base.
    Type: Application
    Filed: December 30, 2015
    Publication date: October 13, 2016
    Inventors: Jin Cai, Kevin K. Chan, Christopher P. D'Emic, Tak H. Ning, Jeng-Bang Yau
  • Publication number: 20160300934
    Abstract: A method of forming a semiconductor structure includes providing an emitter and a collector on a surface of an insulator layer. The emitter and the collector are spaced apart and have a doping of a first conductivity type. An intrinsic base is formed between the emitter and the collector and on the insulator layer by epitaxially growing the intrinsic base from at least a vertical surface of the emitter and a vertical surface of the collector. The intrinsic base has a doping of a second conductivity type opposite to the first conductivity type, and a first heterojunction exists between the emitter and the intrinsic base and a second heterojunction exists between the collector and the intrinsic base.
    Type: Application
    Filed: April 13, 2015
    Publication date: October 13, 2016
    Inventors: Jin Cai, Kevin K. Chan, Christopher P. D'Emic, Tak H. Ning, Jeng-Bang Yau
  • Publication number: 20160276483
    Abstract: A finFET structure, and method of forming such structure, in which a germanium enriched nanowire is located in the channel region of the FET, while simultaneously having silicon-germanium fin in the source/drain region of the finFET.
    Type: Application
    Filed: May 27, 2016
    Publication date: September 22, 2016
    Inventors: Kevin K. Chan, Pouya Hashemi, Ali Khakifirooz, John A. Ott, Alexander Reznicek
  • Patent number: 9443953
    Abstract: A technique relates to forming a transistor. A dummy gate is formed on a substrate with spacers on both sides. A source and a drain are formed in the substrate, where the source and the drain are positioned under the spacers. An interlayer dielectric is formed on top of the substrate, the spacers, and the dummy gate. The interlayer dielectric is planarized along with part of the spacers and the dummy gate. The dummy gate is removed, thereby leaving an opening. A sacrificial layer is deposited on top of the substrate in a bottom of the opening. The sacrificial layer includes at least one of silicon germanium and/or germanium. The sacrificial layer is removed from the substrate in the bottom of the opening, thereby growing an interfacial oxide layer on the substrate in the opening. A high-? dielectric layer is deposited on top of the interfacial oxide layer.
    Type: Grant
    Filed: August 24, 2015
    Date of Patent: September 13, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Takashi Ando, Eduard A. Cartier, Kevin K. Chan, Vijay Narayanan
  • Patent number: 9437718
    Abstract: A method of forming a semiconductor structure includes forming a first seed layer, a second seed layer and an intrinsic base spaced apart from each other and with the intrinsic base located between the first seed layer and the second seed layer on an insulator layer. The method further includes forming an emitter on the first seed layer and on a first vertical surface of the intrinsic base by epitaxially growing the emitter from the first seed layer and the first vertical surface of the intrinsic base, and forming a collector on the second seed layer and on a second vertical surface of the intrinsic base by epitaxially growing the collector from the second seed layer and the second vertical surface of the intrinsic base.
    Type: Grant
    Filed: May 12, 2015
    Date of Patent: September 6, 2016
    Assignee: International Business Machines Corporation
    Inventors: Jin Cai, Kevin K. Chan, Tak H. Ning, Jeng-Bang Yau, Joonah Yoon
  • Patent number: 9437717
    Abstract: Methods of fabricating bipolar junction transistors, bipolar junction transistors, and design structures for a bipolar junction transistor. A first portion of the intrinsic base layer is masked while a second portion of an intrinsic base layer is etched. As a consequence of the masking, the second portion of the intrinsic base layer is thinner than the first portion of the intrinsic base layer. An emitter and an extrinsic base layer are formed in respective contacting relationships with the first and second portions of the intrinsic base layer.
    Type: Grant
    Filed: August 21, 2013
    Date of Patent: September 6, 2016
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Kevin K. Chan, Peng Cheng, Qizhi Liu, Ljubo Radic
  • Publication number: 20160254150
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Additionally, the approach includes performing a low temperature anneal in an oxygen free environment followed by depositing a metal layer on the dopant layer. Furthermore, the approach includes alloying the metal layer with the dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Application
    Filed: February 27, 2015
    Publication date: September 1, 2016
    Inventors: Kevin K. Chan, Marinus J.P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Patent number: 9425260
    Abstract: A lateral bipolar junction transistor including a base region on a dielectric substrate layer. The base region includes a layered stack of alternating material layers of a first lattice dimension semiconductor material and a second lattice dimension semiconductor material. The first lattice dimension semiconductor material is different from the second lattice dimension semiconductor material to provide a strained base region. A collector region is present on the dielectric substrate layer in contact with a first side of the base region. An emitter region is present on the dielectric substrate in contact with a second side of the base region that is opposite the first side of the base region.
    Type: Grant
    Filed: March 13, 2014
    Date of Patent: August 23, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Bahman Hekmatshoartabari, Tak H. Ning
  • Patent number: 9418846
    Abstract: An approach to providing a method of forming a dopant junction in a semiconductor device. The approach includes performing a surface modification treatment on an exposed surface of a semiconductor layer and depositing a dopant material on the exposed surface of the semiconductor layer. Additionally, the approach includes performing a low temperature anneal in an oxygen free environment followed by depositing a metal layer on the dopant layer. Furthermore, the approach includes alloying the metal layer with the dopant layer to form a semiconductor device junction where the semiconductor layer is composed of a Group III-V semiconductor material, the surface modification treatment occurs in a vacuum chamber to remove surface oxides from the exposed surface of the semiconductor layer, and each of the above processes occur at a low temperature.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: August 16, 2016
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Marinus J. P. Hopstaken, Young-Hee Kim, Masaharu Kobayashi, Effendi Leobandung, Deborah A. Neumayer, Dae-Gyu Park, Uzma Rana, Tsong-Lin Tai
  • Patent number: 9406529
    Abstract: A finFET structure, and method of forming such structure, in which a germanium enriched nanowire is located in the channel region of the FET, while simultaneously having silicon-germanium fin in the source/drain region of the finFET.
    Type: Grant
    Filed: March 5, 2015
    Date of Patent: August 2, 2016
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Pouya Hashemi, Ali Khakifirooz, John A. Ott, Alexander Reznicek
  • Publication number: 20160204234
    Abstract: A method for forming a bipolar junction transistor includes forming a collector intrinsic region, an emitter intrinsic region and an intrinsic base region between the collector intrinsic region and the emitter intrinsic region. A collector extrinsic contact region is formed in direct contact with the collector intrinsic region; an emitter extrinsic contact region is formed on the emitter intrinsic region and a base extrinsic contact region is formed in direct contact with the intrinsic base region. Carbon is introduced into at least one of the collector extrinsic contact region, the emitter extrinsic contact region and the base extrinsic contact region to suppress diffusion of dopants into the junction region.
    Type: Application
    Filed: March 18, 2016
    Publication date: July 14, 2016
    Inventors: KEVIN K. CHAN, BAHMAN HEKMATSHOARTABARI, TAK H. NING
  • Patent number: 9391171
    Abstract: A semiconductor fin including a single crystalline semiconductor material is formed on a dielectric layer. A semiconductor shell including an epitaxial semiconductor material is formed on all physically exposed surfaces of the semiconductor fin by selective epitaxy, which deposits the semiconductor material only on semiconductor surfaces and not on dielectric surfaces. The epitaxial semiconductor material can be different from the single crystalline semiconductor material, and the semiconductor shell can be bilaterally strained due to lattice mismatch. A fin field effect transistor including a strained channel can be formed. Further, the semiconductor shell can advantageously alter properties of the source and drain regions, for example, by allowing incorporation of more dopants or by facilitating a metallization process.
    Type: Grant
    Filed: January 24, 2014
    Date of Patent: July 12, 2016
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Young-Hee Kim, Masaharu Kobayashi, Jinghong Li, Dae-Gyu Park
  • Publication number: 20160172381
    Abstract: A method for fabricating a semiconductor device includes receiving a finned substrate comprising an isolation layer with a plurality of semiconductor fins formed thereon, forming a gate structure over a fin that comprises a gate and a seed layer disposed below the gate and immediately adjacent to the fin, and epitaxially growing a gate extender from the seed layer that laterally extends over a source or drain region of the fin. In one embodiment, a semiconductor device includes a finned substrate comprising an isolation layer with a plurality of semiconductor fins formed thereon, a gate structure formed over a fin of the plurality of fins, the gate structure comprising a gate and a seed layer disposed below the gate and immediately adjacent to the fin, and a gate extender epitaxially grown from the seed layer that laterally extends over a source or drain region of the fin.
    Type: Application
    Filed: January 14, 2016
    Publication date: June 16, 2016
    Inventors: Kevin K. Chan, Pouya Hashemi, Effendi Leobandung, Dae-Gyu Park, Min Yang