Patents by Inventor Kevin Nasman

Kevin Nasman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RF metrology characterization for field installation and serviceability for the plasma processing industry
    Patent number: 6983215
    Abstract: A system for field substitution of components of a RF metrology system. The system includes a sensor/cable combination and an analysis unit. Parameters of the RF metrology system are determined prior to placing the RF metrology system in the field. From these parameters, either component, the cable/sensor combination or the analysis module, may be substituted in the field by recalibrating the system for the substituted unit. Such recalibration is carried out utilizing the parameters determined prior to placing the RF metrology system in the field.
    Type: Grant
    Filed: December 2, 2003
    Date of Patent: January 3, 2006
    Assignee: MKS Instruments, Inc.
    Inventors: David J. Coumou, Clifford C. Weatherell, Michael L. Kirk, Kevin Nasman
  • RF metrology characterization for field installation and serviceability for the plasma processing industry
    Publication number: 20050119864
    Abstract: A system for field substitution of components of a RF metrology system. The system includes a sensor/cable combination and an analysis unit. Parameters of the RF metrology system are determined prior to placing the RF metrology system in the field. From these parameters, either component, the cable/sensor combination or the analysis module, may be substituted in the field by recalibrating the system for the substituted unit. Such recalibration is carried out utilizing the parameters determined prior to placing the RF metrology system in the field.
    Type: Application
    Filed: December 2, 2003
    Publication date: June 2, 2005
    Inventors: David Coumou, Clifford Weatherell, Michael Kirk, Kevin Nasman