Abstract: An micro electro mechanical sensor comprising: a substrate; and a sensor element movably mounted to a first side of said substrate; wherein a second side of said substrate has a pattern formed in relief thereon. The pattern formed in relief on the second side of the substrate provides a reduced surface area for contact with the die bond layer. The reduced surface area reduces the amount of stress that is transmitted from the die bond layer to the substrate (and hence reduces the amount of transmitted stress reaching the MEMS sensor element). Because the substrate relief pattern provides a certain amount of stress decoupling, the die bond layer does not need to decouple the stress to the same extent as in previous designs. Therefore a thinner die bond layer can be used, which in turn allows the whole package to be slightly thinner.

Abstract: There is provided a method of sensing a rotation rate using a vibrating structure gyroscope, said gyroscope comprising an electronic control system comprising one or more control loops, wherein at least one of said control loops comprises a filter having a variable time constant, said method comprising the steps of: determining or estimating a characteristic of the vibrating structure of said gyroscope; and adapting or varying said time constant of said filter with the determined or estimated characteristic of said vibrating structure.

Abstract: A successive approximation Analogue to Digital Converter (ADC), comprising: a sample and hold device arranged to sample and hold an input signal at the beginning of a conversion cycle; a successive approximation register that sequentially builds up a digital output from its most significant bit to its least significant bit; a digital to analogue converter that outputs a signal based on the output of the successive approximation register; a comparator that compares the output of the digital to analogue converter with an output of the sample and hold device and supplies its output to the successive approximation register; and a residual signal storage device arranged to store the residual signal at the end of a conversion cycle; and wherein the successive approximation ADC is arranged to add the stored residual signal from the residual signal storage device to the input signal stored on the sample and hold device at the start of each conversion cycle.

Abstract: A digitally controlled voltage controlled oscillator comprising an Nbit digital to analogue convertor arranged to receive a frequency change demand signal as a digital Nbit word, and having an output provided via an integrator to a voltage controlled oscillator configured to provide a frequency output.

Abstract: A method for closed loop operation of a capacitive accelerometer uses a single current source (62) and a single current sink (64) to apply an in-phase drive signal V1? to a first set of fixed capacitive electrode fingers and a corresponding anti-phase drive signal V2? to a second set of fixed capacitive electrode fingers. This provides a net electrostatic restoring force on the proof mass for balancing the inertial force of the applied acceleration and maintains the proof mass at a null position.

Abstract: In a method for open loop operation of a capacitive accelerometer, a first mode of operation comprises electrically measuring a deflection of a proof mass (204) from the null position under an applied acceleration using a pickoff amplifier (206) set to a reference voltage Vcm. A second mode of operation comprises applying electrostatic forces in order to cause the proof mass (204) to deflect from the null position, and electrically measuring the forced deflection so caused. In the second mode of operation the pickoff amplifier (206) has its input (211) switched from Vcm to Vss, using a reference control circuit (209), so that drive amplifiers (210) can apply different voltages Vdd to the proof mass (204) and associated fixed electrodes (202).

Abstract: A method for closed loop operation of a capacitive accelerometer comprising: a proof mass; first and second sets of both fixed and moveable capacitive electrode fingers, interdigitated with each other; the method comprising: applying PWM drive signals to the fixed fingers; sensing displacement of the proof mass and changing the mark:space ratio of the PWM drive signals, to provide a restoring force on the proof mass that balances the inertial force of the applied acceleration and maintains the proof mass at a null position; detecting when the mark:space ratio for the null position is beyond a predetermined upper or lower threshold; and further modulating the PWM drive signals by extending or reducing x pulses in every y cycles, where x>1 and y>1, to provide an average mark:space ratio beyond the upper or lower threshold without further increasing or decreasing the mark length of the other pulses.

Abstract: A method of processing an amplitude-modulated analog signal at a carrier frequency Fc comprises: digitizing the analog signal to produce an input bit stream that represents the amplitude of the analog signal; generating an in-phase reference bit stream that is synchronous to the carrier frequency Fc and represents an in-phase digital reference signal substantially in the form of a sine and/or cosine wave; and multiplying the input bit stream with the in-phase reference bit stream to produce an output bit stream representing the amplitude modulation of the analog signal.

Abstract: An inertial sensor is described that has means for improving quadrature rejection The sensor is of a ring type, driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The secondary channel comprises a series of circuits that when operable in series significantly improve the quadrature rejection ability of the sensor. The circuits include a synchronous detector, passive and active filters and a decimator.

Abstract: A method of processing an amplitude-modulated analogue signal at a carrier frequency Fc comprises: digitising the analogue signal to produce an input bit stream that represents the amplitude of the analogue signal; generating an in-phase reference bit stream that is synchronous to the carrier frequency Fc and represents an in-phase digital reference signal substantially in the form of a sine and/or cosine wave; and multiplying the input bit stream with the in-phase reference bit stream to produce an output bit stream representing the amplitude modulation of the analogue signal.

Abstract: An angular velocity sensor is described with improved ageing and hysteresis properties. The sensor may be of a ring type driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The gain of the primary pickoff signal and the capacitance of the primary portions of the sensor are controlled relative to the gain of the secondary pickoff and the capacitance of the secondary portions of the sensor. Control electronics is provided that enables matching of the relative signals from the respective channels. In this way, temperature hysteresis and ageing effects of materials used in forming the sensor are overcome.

Abstract: An inertial sensor is described that has a commanded test function. The sensor is of a ring type driven by a driver circuit, the sensor further includes primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The commanded test function includes a signal derived from the primary portion of the circuit and input into the two inputs of a differential amplifier in the secondary pickoff detector circuit.

Abstract: An inertial sensor is described in which a resonant element is driven by control electronics into resonance. The control electronics includes an oscillator. A circuit is provided for matching the frequency of the oscillator with the frequency of the output of the resonant element such that the time to operation from start up of the sensor is minimized and the requirement of frequency matching a given sensor to the control electronics is removed.

Abstract: An angular velocity sensor is described with improved ageing and hysteresis properties. The sensor may be of a ring type driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The gain of the primary pickoff signal and the capacitance of the primary portions of the sensor are controlled relative to the gain of the secondary pickoff and the capacitance of the secondary portions of the sensor. Control electronics is provided that enables matching of the relative signals from the respective channels. In this way, temperature hysteresis and ageing effects of materials used in forming the sensor are overcome.

Abstract: An inertial sensor is described that has means for improving quadrature rejection The sensor is of a ring type, driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The secondary channel comprises a series of circuits that when operable in series significantly improve the quadrature rejection ability of the sensor. The circuits include a synchronous detector, passive and active filters and a decimator.

Abstract: An inertial sensor is described in which a resonant element is driven by control electronics into resonance. The control electronics includes an oscillator. A circuit is provided for matching the frequency of the oscillator with the frequency of the output of the resonant element such that the time to operation from start up of the sensor is minimized and the requirement of frequency matching a given sensor to the control electronics is removed.

Abstract: An inertial sensor is described that has a commanded test function. The sensor is of a ring type driven by a driver circuit, the sensor further comprising primary and secondary portions having corresponding signal pickoffs. The primary pickoff signal amplitude is controlled via an automatic gain control, the primary phase lock loop and VCO locks to the resonant frequency to provide the clocks for the synchronous detectors, the primary pickoff signals via the primary phase shift circuit is provided to the primary driver, the secondary pickoff signal being input into a detector circuit capable of detecting motion in the sensor. The commanded test function comprises signal derived from the primary portion of the circuit and input into the two inputs of a differential amplifier in the secondary pickoff detector circuit.

Abstract: An angular velocity sensor or gyroscope has a ring and a primary drive transducer arranged to cause the ring to oscillate in a primary mode substantially at the resonant frequency of the primary mode of the ring. A primary control loop receives primary pick-off signals from the primary pick-off transducer and provides primary drive signals to the primary drive transducer so as to maintain resonant oscillation of the ring. The primary control loop includes a demodulator arranged to determine the amplitude of the fundamental frequency of the primary pick-off signals and a demodulator arranged to determine the amplitude of the second harmonic frequency of the primary pick-off signals and a drive signal generator arranged to produce the primary drive signals with an amplitude that is dependent on a ratio of the amplitude of the second harmonic frequency of the primary pick-off signal over the amplitude of the fundamental frequency of the primary pick-off signal as derived by a divider.

Abstract: An angular velocity sensor or gyroscope has a ring and a primary drive transducer arranged to cause the ring to oscillate in a primary mode substantially at the resonant frequency of the primary mode of the ring. A primary control loop receives primary pick-off signals from the primary pick-off transducer and provides primary drive signals to the primary drive transducer so as to maintain resonant oscillation of the ring. The primary control loop includes a demodulator arranged to determine the amplitude of the fundamental frequency of the primary pick-off signals and a demodulator arranged to determine the amplitude of the second harmonic frequency of the primary pick-off signals and a drive signal generator arranged to produce the primary drive signals 116 with amplitude that is dependent on a ratio of the amplitude of the second harmonic frequency of the primary pick-off signal over the amplitude of the fundamental frequency of the primary pick-off signal as derived by a divider.

Abstract: A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.