Patents by Inventor Ki-Hoon Choi

Ki-Hoon Choi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230205100
    Abstract: The present invention provides a substrate treating apparatus including: a support unit supporting and rotating the substrate in a treatment space; a liquid supply unit supplying a liquid to the substrate supported by the support unit; and an irradiating module irradiating light to the substrate supported by the support unit, in which the irradiating module includes: a housing having an accommodation space; a laser unit located in the accommodation space, and including a laser irradiation unit irradiating laser light, and an irradiation end having one end protruding from the housing and irradiating the laser light irradiated from the laser irradiation unit to the substrate supported by the support unit; and a cooling unit located in the accommodation space and cooling the laser irradiation unit.
    Type: Application
    Filed: July 14, 2022
    Publication date: June 29, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Won Sik SON, Hyun YOON, Ki Hoon CHOI, Hyo Won YANG, Tae Hee KIM, In Ki JUNG
  • Publication number: 20230205091
    Abstract: Disclosed is a substrate treating apparatus including a support unit that supports and rotates a substrate, a heating unit including a laser irradiator that irradiates laser light in a pattern formed in the substrate, a movement module that changes a location of the laser irradiator by moving the heating unit, and a controller that controls the support unit and the heating unit, the movement module moves the heating unit between a heating location, at which the laser light is irradiated to the substrate, and a standby location that deviates from the substrate, and the movement module rotates and linearly moves the heating unit.
    Type: Application
    Filed: December 15, 2022
    Publication date: June 29, 2023
    Inventors: Hyun YOON, Ki Hoon CHOI, Hyo Won YANG, Tae Hee KIM, In Ki JUNG
  • Publication number: 20230205077
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing; a support unit positioned within the housing and configured to support a substrate; a liquid supply unit configured to supply a treating liquid to the substrate supported on the support unit; and a laser module configured to irradiate a laser to the substrate to which the treating liquid is supplied; and a vision module for monitoring a point at which the laser is irradiated among the substrate.
    Type: Application
    Filed: December 27, 2022
    Publication date: June 29, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Tae Hee KIM, In Ki JUNG, Ki Hoon CHOI, Hyo Won YANG, Won Sik SON, Hyun YOON
  • Publication number: 20230185206
    Abstract: The inventive concept provides a mask treating apparatus.
    Type: Application
    Filed: September 1, 2022
    Publication date: June 15, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Tae Hee KIM, Ki Hoon CHOI, Hyun YOON, Won Sik SON, Hyo Won YANG, In Ki JUNG
  • Publication number: 20230168586
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having a treating space; a support unit configured to support and rotate a substrate at the treating space; a liquid supply unit configured to supply a liquid to a substrate supported on the support unit; a post-treating unit configured to perform a post-treatment on the substrate supported on the support unit; and a monitoring unit configured to inspect a state of a liquid film formed of the liquid supplied onto the substrate.
    Type: Application
    Filed: November 29, 2022
    Publication date: June 1, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Ki Hoon CHOI, In Ki JUNG, Hyo Won YANG, Sang Hyeon RYU, Young Ho PARK, Tae Hee KIM
  • Publication number: 20230152706
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit configured to support and rotate a substrate at a treating space; a liquid supply unit configured to supply a liquid to the substrate supported at the support unit; a housing having an installation space; a laser unit configured to include a laser irradiation unit positioned in the installation space which irradiates a laser light, and an irradiation end having an end positioned to protrude from the housing and which irradiates the laser light irradiated from the laser irradiation unit to a substrate supported on the support unit; and a cover having an inner space and positioned so an end of the irradiation end protruding from the housing is positioned in the inner space, and wherein an opening is formed at a bottom end of the cover to overlap the laser light irradiated from the irradiation end when seen from above.
    Type: Application
    Filed: November 17, 2022
    Publication date: May 18, 2023
    Applicant: SEMES CO., LTD.
    Inventors: KI HOON CHOI, HYO WON YANG, HYUN YOON, TAE HEE KIM, WON SIK SON, IN KI JUNG
  • Publication number: 20230111149
    Abstract: Provided is a concentration measuring apparatus, which measures a concentration of a fluid under a high-pressure environment, such as an environment in which a supercritical fluid is provided. The concentration measuring apparatus includes: a concentration meter for measuring a concentration of a first fluid contained in a fluid in the measurement line; a sampling line for transferring a process fluid of a processing space in which a substrate is treated in a high-pressure environment to the measurement line; a control valve for opening and closing the sampling line; a fluid pressure regulator installed downstream the control valve in the sampling line and configured to adjust the passing fluid to a set pressure; and a decompression tank installed between the sampling line and the measurement line.
    Type: Application
    Filed: September 30, 2022
    Publication date: April 13, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Sang Min LEE, Jin Se PARK, Ki Hoon CHOI
  • Publication number: 20230115826
    Abstract: A printing apparatus and a method of providing printing apparatus are provided. A printing apparatus according to at least one embodiment of the present disclosure includes a base panel or head base, at least one or more head packs installed on the head base, a head pack holder installed on each of the head packs and configured to handle and fix the head pack, and a fastening structure configured to mount the head pack holder to the head packs.
    Type: Application
    Filed: October 6, 2022
    Publication date: April 13, 2023
    Inventors: Jang Mi WOO, Ki Hoon CHOI, Young Hoon JEONG, Myung Jin KIM
  • Publication number: 20230084076
    Abstract: The inventive concept provides a mask treating apparatus.
    Type: Application
    Filed: September 13, 2022
    Publication date: March 16, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Hyun YOON, Ki Hoon CHOI, Tae Hee KIM, Hyo Won YANG, Young Dae CHUNG, Ji Hoon JEONG
  • Publication number: 20230067973
    Abstract: The inventive concept provides a mask treating apparatus. The mask treating apparatus includes a support unit configured to support and rotate a mask, the mask having a first pattern within a plurality of cells thereof and a second pattern outside regions of the plurality of cells; and a heating unit having a laser irradiator for irradiating a laser light to a specific region of the mask supported on the support unit, and a controller configured to control the support unit and the heating unit, and wherein the support unit includes: a support part for supporting the mask; and a moving stage part configured to move a position of the support part, and wherein the controller controls the moving stage part so a position of the mask supported on the support part is changed so the second pattern is positioned at the specific region.
    Type: Application
    Filed: September 2, 2022
    Publication date: March 2, 2023
    Applicant: SEMES CO., LTD.
    Inventors: Tae Hee KIM, Ki Hoon CHOI, Hyun YOON, Won Sik SON, Hyo Won YANG, In Ki JUNG
  • Publication number: 20220390848
    Abstract: The present invention provides a substrate treating apparatus including: a support unit for supporting and rotating a substrate on which a first pattern and a second pattern different from the first pattern are formed; a liquid supply unit for supplying a treatment liquid to the substrate supported on the support unit; and a heating unit for heating any one of the first pattern and the second pattern.
    Type: Application
    Filed: June 7, 2022
    Publication date: December 8, 2022
    Applicant: SEMES CO., LTD.
    Inventors: Ki Hoon CHOI, Se Hoon OH, Young Dae CHUNG, Tae Hee KIM, Young Eun JEON
  • Publication number: 20220290921
    Abstract: The inventive concept provides a method for treating a substrate. The method for treating a substrate comprises: a pressurization step for increasing a pressure of an inner space of a chamber by supplying a treating fluid to the inner space, after taking the substrate into the inner space; a flow step for generating a flow of the treating fluid by combination of supplying and discharging the treating fluid to and from the inner space; and a depressurization step of decreasing the pressure of the inner space by discharging the treating fluid from the inner space, and wherein the pressurization step comprises: a bottom side supply process for increasing the pressure of the inner space by supplying the treating fluid to a backside of the substrate taken into the inner space; and a top side supply process of increasing the pressure of the inner space by supplying the treating fluid to a top side of the substrate taken into the inner space.
    Type: Application
    Filed: March 11, 2022
    Publication date: September 15, 2022
    Applicant: SEMES CO., LTD.
    Inventors: Hae-Won CHOI, Anton KORIAKIN, Joon Ho WON, Min Woo KIM, Ki Hoon CHOI, Eung Su KIM, Tae Hee KIM, Pil Kyun HEO, Jang Jin LEE, Jin Yeong SUNG
  • Patent number: 10955711
    Abstract: Disclosed is a liquid crystal display device, including: a first substrate including a display area displaying an image, and a non-display area disposed in a form surrounding the display area; a second substrate spaced apart from the first substrate; and a liquid crystal layer disposed between the first substrate and the second substrate; and a first static electricity absorbing pattern disposed on the non-display area of the first substrate.
    Type: Grant
    Filed: July 20, 2017
    Date of Patent: March 23, 2021
    Inventors: Dong In Kim, Jin Kyu Park, Yo Han Lee, Ki Hoon Choi, Hyun Seok Hong
  • Publication number: 20200126821
    Abstract: A supercritical processing apparatus includes an upper vessel including a first fluid hole formed in a center thereof, and a lower vessel including a second fluid hole formed in a center thereof. A space is defined between the upper and lower vessels and configured to allow a substrate to be placed therein. The upper vessel further includes a first guide portion provided at a lower portion thereof to be gradually inclined downward toward a periphery thereof from the first fluid hole.
    Type: Application
    Filed: October 18, 2019
    Publication date: April 23, 2020
    Inventors: Jae Seong LEE, Hae Won CHOI, Ki Hoon CHOI, ANTON KORIAKIN, Chan Young HEO, Do Heon KIM, Ji Soo JEON
  • Patent number: 10607563
    Abstract: A display device includes a timing controller, a driver, and a display panel. The timing controller outputs a first clock signal having first rising time during an active section and a second clock signal having second rising time during a blank section adjacent to the active section. The driver generates a data signal based on the first clock signal and the second clock signal and to output the data signal. The display panel displays an image based on the data signal. The first rising time is shorter than the second rising time.
    Type: Grant
    Filed: February 14, 2017
    Date of Patent: March 31, 2020
    Assignee: Samsung Display Co., Ltd.
    Inventors: Dong In Kim, Jin Kyu Park, Yo Han Lee, Ki Hoon Choi, Hyun Seok Hong
  • Patent number: 9975151
    Abstract: Embodiments of the inventive concepts provide an apparatus and a method for treating a substrate. The apparatus includes a substrate support unit supporting the substrate, and a liquid supply unit supplying a treatment solution to the substrate supported by the substrate support unit. The liquid supply unit includes a nozzle discharging the treatment solution to the substrate, a liquid supply line supplying the treatment solution to the nozzle, a mixing member installed on the liquid supply line, a mixing space formed within the mixing member, and a gas supply line connected to the mixing member to supply a gas into the mixing space. The mixing member includes a body within which the mixing space is formed, and an inflow port combined with the body such that the gas supplied through the inflow port is mixed with the treatment solution in the mixing space to form nano-sized bubbles.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: May 22, 2018
    Assignee: SEMES Co., Ltd.
    Inventors: Tae Keun Kim, Oh Jin Kwon, Ki Hoon Choi
  • Publication number: 20180061362
    Abstract: A display device includes a timing controller, a driver, and a display panel. The timing controller outputs a first clock signal having first rising time during an active section and a second clock signal having second rising time during a blank section adjacent to the active section. The driver generates a data signal based on the first clock signal and the second clock signal and to output the data signal. The display panel displays an image based on the data signal. The first rising time is shorter than the second rising time.
    Type: Application
    Filed: February 14, 2017
    Publication date: March 1, 2018
    Inventors: Dong In KIM, Jin Kyu PARK, Yo Han LEE, Ki Hoon CHOI, Hyun Seok HONG
  • Publication number: 20180039123
    Abstract: Disclosed is a liquid crystal display device, including: a first substrate including a display area displaying an image, and a non-display area disposed in a form surrounding the display area; a second substrate spaced apart from the first substrate; and a liquid crystal layer disposed between the first substrate and the second substrate; and a first static electricity absorbing pattern disposed on the non-display area of the first substrate.
    Type: Application
    Filed: July 20, 2017
    Publication date: February 8, 2018
    Inventors: Dong In KIM, Jin Kyu PARK, Yo Han LEE, Ki Hoon CHOI, Hyun Seok HONG
  • Publication number: 20160013080
    Abstract: Embodiments of the inventive concepts provide an apparatus and a method for treating a substrate. The apparatus includes a substrate support unit supporting the substrate, and a liquid supply unit supplying a treatment solution to the substrate supported by the substrate support unit. The liquid supply unit includes a nozzle discharging the treatment solution to the substrate, a liquid supply line supplying the treatment solution to the nozzle, a mixing member installed on the liquid supply line, a mixing space formed within the mixing member, and a gas supply line connected to the mixing member to supply a gas into the mixing space. The mixing member includes a body within which the mixing space is formed, and an inflow port combined with the body such that the gas supplied through the inflow port is mixed with the treatment solution in the mixing space to form nano-sized bubbles.
    Type: Application
    Filed: June 24, 2015
    Publication date: January 14, 2016
    Inventors: Tae Keun KIM, Oh Jin KWON, Ki Hoon CHOI
  • Patent number: 8287333
    Abstract: Provided are a single type substrate treating apparatus and method. A polishing unit is disposed in a process chamber for polishing a substrate chemically and mechanically, and a cleaning unit is disposed in the same process chamber for cleaning the substrate. Therefore, according to the single substrate treating apparatus and method, a polishing process and a cleaning process can be performed on a substrate in the same process chamber by a single substrate treating method in which substrates are treated one by one.
    Type: Grant
    Filed: November 18, 2008
    Date of Patent: October 16, 2012
    Assignee: Semes Co., Ltd
    Inventors: Ki Hoon Choi, Gyo-Woog Koo, Jung Bong Choi