Abstract: Disclosed herein is a laser navigation module. The laser navigation system includes a light source, one or more illumination devices, and a re-reflecting layer. The light source emits laser light. The housing is configured such that a window for allowing the laser light emitted by the light source to pass therethrough, reflecting the laser light, and blocking entry of visible light is mounted and such that a transparent or translucent portion for diffusing internally diffused light to an outside is formed. The illumination devices are mounted inside the housing. The light diffusion member transfers light emitted by the illumination devices to the housing, and includes a re-reflecting layer partially formed on the side of the light diffusion member opposite the illumination devices.

Abstract: In a slurry composition preventing damage to an insulation layer, and uniformly polishing a metal layer, the slurry composition includes an acidic aqueous solution having a first pH and an anionic surfactant having a second pH lower than or equal to the first pH. Irregular polishing of the metal layer relative to a pattern density may be prevented and a contact having a uniform thickness may be formed using the slurry composition.

Abstract: A method of forming an epitaxial contact plug in a semiconductor device comprises forming an insulating interlayer on a semiconductor substrate, forming a mushroom-shaped epitaxial plug in an opening of the insulating interlayer, forming a buffer layer on the epitaxial plug and the insulating interlayer, and planarizing epitaxial plug and the insulating interlayer using a chemical mechanical polishing (CMP) process.