Abstract: A method for fabricating a semiconductor device, the method including forming a mold structure on a substrate such that the mold structure includes alternately and repeatedly stacked interlayer insulating films and sacrificial films; forming a channel hole passing through the mold structure; forming a vertical channel structure within the channel hole; exposing a surface of the interlayer insulating films by removing the sacrificial films; forming an aluminum oxide film along a surface of the interlayer insulating films; forming a continuous film on the aluminum oxide film; and nitriding the continuous film to form a TiN film.

Abstract: A method for fabricating a semiconductor device, the method including forming a mold structure on a substrate such that the mold structure includes alternately and repeatedly stacked interlayer insulating films and sacrificial films; forming a channel hole passing through the mold structure; forming a vertical channel structure within the channel hole; exposing a surface of the interlayer insulating films by removing the sacrificial films; forming an aluminum oxide film along a surface of the interlayer insulating films; forming a continuous film on the aluminum oxide film; and nitriding the continuous film to form a TiN film.

Abstract: The present invention provides a method of automatically calculating a power curve limit for the power curve monitoring of a wind turbine that may set an optimal power curve limit by automatically calculating a power curve limit for power curve monitoring even if wind speed-power data measured at a wind turbine includes a large amount of abnormal data in addition to normal data. To this end, the present invention includes: classifying, by an input data classifying unit, the input data on wind power generation through a variable speed bin; calculating, by a power calculating unit, a power average value and standard deviation for each bin for the classified input data; estimating, by a power curve estimating unit, a power curve for the calculated power average value for each bin; searching for, by a limit searching unit, an accurate power curve limit while moving the estimated power curve; and setting, by a data extracting unit, the data included in the accurate power curve limit as new input data.

Abstract: The present invention provides a method of automatically calculating a power curve limit for the power curve monitoring of a wind turbine that may set an optimal power curve limit by automatically calculating a power curve limit for power curve monitoring even if wind speed-power data measured at a wind turbine includes a large amount of abnormal data in addition to normal data. To this end, the present invention includes: classifying, by an input data classifying unit, the input data on wind power generation through a variable speed bin; calculating, by a power calculating unit, a power average value and standard deviation for each bin for the classified input data; estimating, by a power curve estimating unit, a power curve for the calculated power average value for each bin; searching for, by a limit searching unit, an accurate power curve limit while moving the estimated power curve; and setting, by a data extracting unit, the data included in the accurate power curve limit as new input data.

Abstract: Provided are an apparatus and method of monitoring a wind turbine blade. The method includes converting strain of a blade into moment, generating a reference value based on design information of the blade and statistical information of the moment, and comparing the moment with the reference value and determining a state of the blade. Accordingly, since the reference value serving as a reference of blade state determination is generated according to blade design information and moment statistical information and learning of the moment statistical information is performed, reliability of blade state determination can be improved, and thus, effective management and maintenance of the blade becomes possible.

Abstract: The present disclosure relates to a robot mechanism for nondestructive aging evaluation of a cable. The robot mechanism includes at least two inspection modules, and a coupler disposed between the at least two inspection modules and connected to each of the inspection modules to adjust a separation between the inspection modules. Each of the inspection modules approaches a cable and automatically inspects an aged state of the cable. The robot mechanism automatically measures an aged state of a cable in a nondestructive manner and establishes a database of cable aging, so that normal operation of the cable can be ensured through stable management of the cable by evaluating a replacement time and the aged state of the cable based on the database.

Abstract: A nondestructive inspection method of testing insulators using frequency resonance function that can inspect an anomaly of an insulator by vibrating the insulator with a force having the characteristic of white noise, measuring the change in motion of the insulator according to the vibration and calculating the frequency resonance function of the insulator is disclosed.

Abstract: Disclosed herein is a robot mechanism for inspection of a live-line suspension insulator string. A robot body of the robot mechanism reciprocates along the live-line suspension insulator string and includes upper and lower robot frames configured to encircle the insulator string, a battery module provided to either end of the robot body, an actuation module for moving the robot body along the insulator string, an inspection module for electrically inspecting an insulator, a connection module for coupling the robot body to an installation/dismantlement mechanism, a wing opening/closing module for manually separating the robot body from the insulator string, a measurement module for measuring electrical properties of the insulator, a controller for controlling operation of the robot body, and a crack detection unit for detecting cracks formed in the insulator.

Abstract: A nondestructive inspection method of testing insulators using frequency resonance function that can inspect an anomaly of an insulator by vibrating the insulator with a force having the characteristic of white noise, measuring the change in motion of the insulator according to the vibration and calculating the frequency resonance function of the insulator is disclosed.

Abstract: The present disclosure relates to a robot mechanism for nondestructive aging evaluation of a cable. The robot mechanism includes at least two inspection modules, and a coupler disposed between the at least two inspection modules and connected to each of the inspection modules to adjust a separation between the inspection modules. Each of the inspection modules approaches a cable and automatically inspects an aged state of the cable. The robot mechanism automatically measures an aged state of a cable in a nondestructive manner and establishes a database of cable aging, so that normal operation of the cable can be ensured through stable management of the cable by evaluating a replacement time and the aged state of the cable based on the database.

Abstract: Disclosed herein is a robot mechanism for inspection of a live-line suspension insulator string. A robot body of the robot mechanism reciprocates along the live-line suspension insulator string and includes upper and lower robot frames configured to encircle the insulator string, a battery module provided to either end of the robot body, an actuation module for moving the robot body along the insulator string, an inspection module for electrically inspecting an insulator, a connection module for coupling the robot body to an installation/dismantlement mechanism, a wing opening/closing module for manually separating the robot body from the insulator string, a measurement module for measuring electrical properties of the insulator, a controller for controlling operation of the robot body, and a crack detection unit for detecting cracks formed in the insulator.