Patents by Inventor Kian Ming Tan

Kian Ming Tan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240162365
    Abstract: Structures for an avalanche photodetector and methods of forming a structure for an avalanche photodetector. The structure comprises a substrate having a first conductivity type, a first semiconductor layer that defines an absorption region of the avalanche photodetector, a dielectric layer between the first semiconductor layer and the substrate, a charge control region comprising a semiconductor material having a second conductivity type opposite to the first conductivity type and a different bandgap from the first semiconductor layer, and a second semiconductor layer that extends through the dielectric layer from the charge control region to the substrate. The second semiconductor layer defines a multiplication region of the avalanche photodetector.
    Type: Application
    Filed: November 10, 2022
    Publication date: May 16, 2024
    Inventors: Khee Yong Lim, Kian Ming Tan, Kiok Boone Elgin Quek
  • Publication number: 20230058110
    Abstract: A non-volatile memory device is provided. The non-volatile memory device includes a substrate, a floating gate, and a gate. The substrate includes a source region and a drain region, and a channel region between the source region and the drain region. The floating gate is over the channel region. The floating gate includes a first conductive layer and a second conductive layer underlying the first conductive layer. The gate is adjacent to the floating gate.
    Type: Application
    Filed: August 18, 2021
    Publication date: February 23, 2023
    Inventors: KHEE YONG LIM, KIAN MING TAN
  • Patent number: 11462622
    Abstract: According to various embodiments, a memory cell may include a substrate of a first conductivity type, the substrate having first and second regions of a second conductivity type spaced apart and defining a channel region therebetween. The memory cell may further include a word line arranged over a portion of the channel region nearer to the first region, an erase gate arranged over the second region, a floating gate arranged over another portion of the channel region nearer to the second region and between the word line and the erase gate, and a coupling gate arranged over a top end of the floating gate. The floating gate includes the top end, a bottom end, a first side extending from the top end to the bottom end and facing the erase gate, and a second side extending from the top end to the bottom end and facing the word line.
    Type: Grant
    Filed: June 23, 2021
    Date of Patent: October 4, 2022
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Kian Ming Tan, Khee Yong Lim, Kiok Boone Elgin Quek
  • Patent number: 10424568
    Abstract: A method of forming a device including a SPAD detector and a BSI visible light sensor positioned on different planes, the device exhibiting improved resolution and pixel density are provided. Embodiments include a photodiode for detecting visible light; and a SPAD detector for detecting IR radiation, wherein the photodiode and the SPAD detector are on different planes.
    Type: Grant
    Filed: June 19, 2018
    Date of Patent: September 24, 2019
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Kian Ming Tan, Khee Yong Lim, Elgin Kiok Boone Quek
  • Patent number: 10020372
    Abstract: A method of forming a thick EG polysilicon over the FG and resulting device are provided. Embodiments include forming a CG on a substrate; forming an STI between a logic region and the CG; forming a polysilicon EG through the CG and CG HM; forming a polysilicon structure over the logic and STI; forming and overfilling with polysilicon a WL trench through the CG and CG HM, between the EG and STI; forming a buffer oxide in the polysilicon structure over the logic region and part of the STI; recessing the buffer oxide and etching back the polysilicon overfill down the CG HM; forming a second buffer oxide over the EG and logic region; recessing the WL polysilicon; removing the first and second buffer oxides; forming a mask with an opening over a center of the WL, the STI, and a majority of the logic region; and removing exposed polysilicon.
    Type: Grant
    Filed: April 25, 2017
    Date of Patent: July 10, 2018
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Khee Yong Lim, Kian Ming Tan, Fangxin Deng, Zhiqiang Teo, Xinshu Cai, Elgin Kiok Boone Quek, Fan Zhang
  • Patent number: 9444041
    Abstract: A memory device and a method of making the same are presented. The memory device includes a substrate and a memory cell formed on the substrate. The memory cell includes a single transistor. The single transistor includes a first gate on the substrate which functions as a control gate and a second gate embedded in the substrate which functions as a select gate.
    Type: Grant
    Filed: December 31, 2013
    Date of Patent: September 13, 2016
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Khee Yong Lim, Kian Ming Tan, Elgin Kiok Boone Quek
  • Patent number: 9281308
    Abstract: A method (and semiconductor device) of fabricating a semiconductor device adjusts gate threshold (Vt) of a field effect transistor (FET) with raised source/drain (S/D) regions. A halo region is formed in a two-step process that includes implanting dopants using conventional implantation techniques and implanting dopants at a specific twist angle. The dopant concentration in the halo region near the active edge of the raised S/D regions is higher and extends deeper than the dopant concentration within the interior region of the raised S/D regions. As a result, Vt near the active edge region is adjusted and different from the Vt at the active center regions, thereby achieving same or similar Vt for a FET with different width.
    Type: Grant
    Filed: July 22, 2014
    Date of Patent: March 8, 2016
    Assignee: Globalfoundries Singapore Pte., Ltd.
    Inventors: Chunshan Yin, Guangyu Huang, Elgin Quek, Jae Gon Lee, Kian Ming Tan
  • Publication number: 20140332902
    Abstract: A method (and semiconductor device) of fabricating a semiconductor device adjusts gate threshold (Vt) of a field effect transistor (FET) with raised source/drain (S/D) regions. A halo region is formed in a two-step process that includes implanting dopants using conventional implantation techniques and implanting dopants at a specific twist angle. The dopant concentration in the halo region near the active edge of the raised S/D regions is higher and extends deeper than the dopant concentration within the interior region of the raised S/D regions. As a result, Vt near the active edge region is adjusted and different from the Vt at the active center regions, thereby achieving same or similar Vt for a FET with different width.
    Type: Application
    Filed: July 22, 2014
    Publication date: November 13, 2014
    Inventors: Chunshan Yin, Guangyu Huang, Elgin Quek, Jae Gon Lee, Kian Ming Tan
  • Publication number: 20140264554
    Abstract: A memory device and a method of making the same are presented. The memory device includes a substrate and a memory cell formed on the substrate. The memory cell includes a single transistor. The single transistor includes a first gate on the substrate which functions as a control gate and a second gate embedded in the substrate which functions as a select gate.
    Type: Application
    Filed: December 31, 2013
    Publication date: September 18, 2014
    Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Khee Yong LIM, Kian Ming TAN, Elgin Kiok Boone QUEK
  • Patent number: 8785287
    Abstract: A method (and semiconductor device) of fabricating a semiconductor device adjusts gate threshold (Vt) of a field effect transistor (FET) with raised source/drain (S/D) regions. A halo region is formed in a two-step process that includes implanting dopants using conventional implantation techniques and implanting dopants at a specific twist angle. The dopant concentration in the halo region near the active edge of the raised S/D regions is higher and extends deeper than the dopant concentration within the interior region of the raised S/D regions. As a result, Vt near the active edge region is adjusted and different from the Vt at the active center regions, thereby achieving same or similar Vt for a FET with different width.
    Type: Grant
    Filed: July 6, 2010
    Date of Patent: July 22, 2014
    Assignee: Globalfoundries Singapore Pte, Ltd.
    Inventors: Chunshan Yin, Guangyu Huang, Elgin Quek, Jae Gon Lee, Kian Ming Tan
  • Patent number: 8735984
    Abstract: FinFET devices are formed with body contact structures enabling the fabrication of such devices having different gate threshold voltages (Vt). A body contact layer is formed to contact the gate electrode (contact) enabling a forward body bias and a reduction in Vt. Two example methods of fabrication (and resulting structures) are provided. In one method, the gate electrode (silicon-based) and body contact layer (silicon) are connected by growing epitaxy which merges the two structures forming electrical contact. In another method, a via is formed that intersects with the gate electrode (suitable conductive material) and body contact layer and is filled with conductive material to electrically connect the two structures. As a result, various FinFETs with different Vt can be fabricated for different applications.
    Type: Grant
    Filed: July 6, 2010
    Date of Patent: May 27, 2014
    Assignee: Globalfoundries Singapore PTE, Ltd.
    Inventors: Chunshan Yin, Kian Ming Tan, Jae Gon Lee
  • Publication number: 20120007185
    Abstract: A method (and semiconductor device) of fabricating a semiconductor device adjusts gate threshold (Vt) of a field effect transistor (FET) with raised source/drain (S/D) regions. A halo region is formed in a two-step process that includes implanting dopants using conventional implantation techniques and implanting dopants at a specific twist angle. The dopant concentration in the halo region near the active edge of the raised S/D regions is higher and extends deeper than the dopant concentration within the interior region of the raised S/D regions. As a result, Vt near the active edge region is adjusted and different from the Vt at the active center regions, thereby achieving same or similar Vt for a FET with different width.
    Type: Application
    Filed: July 6, 2010
    Publication date: January 12, 2012
    Applicant: Globalfoundries Singapore PTE, LTD.
    Inventors: Chunshan Yin, Guangyu Huang, Elgin Quek, Jae Gon Lee, Kian Ming Tan
  • Publication number: 20120007180
    Abstract: FinFET devices are formed with body contact structures enabling the fabrication of such devices having different gate threshold voltages (Vt). A body contact layer is formed to contact the gate electrode (contact) enabling a forward body bias and a reduction in Vt. Two example methods of fabrication (and resulting structures) are provided. In one method, the gate electrode (silicon-based) and body contact layer (silicon) are connected by growing epitaxy which merges the two structures forming electrical contact. In another method, a via is formed that intersects with the gate electrode (suitable conductive material) and body contact layer and is filled with conductive material to electrically connect the two structures. As a result, various FinFETs with different Vt can be fabricated for different applications.
    Type: Application
    Filed: July 6, 2010
    Publication date: January 12, 2012
    Applicant: Globalfoundries Singapore PTE, LTD.
    Inventors: Chunshan Yin, Kian Ming Tan, Jae Gon Lee