Patents by Inventor Kimberly E. Klinck

Kimberly E. Klinck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Purged lower liner
    Patent number: 5914050
    Abstract: Chemical vapor deposition apparatus 10 which includes a chemical vapor deposition processing chamber 12 having a base ring 18 and upper and lower quartz windows 20 and 22, and a quartz liner 26 lining the base ring 18, wherein a purge channel 46 is formed, in an outer surface of the liner 26, to remove contaminant material from an interface between the base ring 18 and the liner 26.
    Type: Grant
    Filed: September 22, 1997
    Date of Patent: June 22, 1999
    Assignee: Applied Materials, Inc.
    Inventors: Paul B. Comita, David K. Carlson, Kimberly E. Klinck, Harold J. Mellen, III
  • Adaptive temperture controller and method of operation
    Patent number: 5793022
    Abstract: An adaptive controller for controlling the temperature of a body. The adaptive controller of the present invention comprises a temperature measuring device which measures the temperature of the body. A controller which has a controller integral time constant and a controller gain constant is provided for controlling a heating device. An adjustment mechanism is provided which determines the controller integral time constant and the controller gain constant where the controller integral time constant and the controller gain constant are dependent upon the difference between the present temperature of the body and the desired temperature of the body.
    Type: Grant
    Filed: September 12, 1996
    Date of Patent: August 11, 1998
    Assignee: Applied Materials, Inc.
    Inventors: Kimberly E. Klinck, Brian M. Cooper, Harold J. Mellen, III