Patents by Inventor Kimberly F. Hooper

Kimberly F. Hooper has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for copper corrosion prevention during wet clean
    Patent number: 7468124
    Abstract: A method and apparatus for cleaning a wafer with a metal exposed through an insulator, through the use of a wet cleaning tank in concert with a feedback system on the potential difference between two leads of the wet cleaning tank. The cleaning tank has a bath in which the wafer and the two leads are immersed. The potential difference between the two leads is regulated when the feedback system detects a change in the potential across the two leads.
    Type: Grant
    Filed: May 11, 2006
    Date of Patent: December 23, 2008
    Assignee: International Business Machines Corporation
    Inventors: Nancy A. Greco, Kimberly F. Hooper, Kevin S. Petrarca