Patents by Inventor Kimberly Shafi

Kimberly Shafi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reducing UV and dielectric diffusion barrier interaction through the modulation of optical properties
    Patent number: 8124522
    Abstract: Provided are methods of stabilizing an underlying dielectric diffusion barrier during deposition and ultraviolet (UV) processing of an overlying dielectric layer. Methods include modulating the optical properties reduces the effects of UV radiation on the dielectric diffusion barrier layer. The dielectric diffusion barrier can be made to absorb less UV radiation. A dielectric layer with UV absorbing properties may also be added on top of the diffusion barrier layer so less UV is transmitted. Both methods result in reduced interaction between UV radiation and the dielectric diffusion barrier.
    Type: Grant
    Filed: April 11, 2008
    Date of Patent: February 28, 2012
    Assignee: Novellus Systems, Inc.
    Inventors: Hui-Jung Wu, Kimberly Shafi, Kaushik Chattopadhyay, Keith Fox, Tom Mountsier, Girish Dixit, Bart van Schravendijk, Elizabeth Apen