Abstract: There is a method for measuring a deviation amount of a measuring device, comprising: transferring, by using a transfer device, the measuring device to a position in an area specified by transfer position data; acquiring measurement values using four or more sensor electrodes of the measuring device; identifying two or more sensor electrodes among the four or more sensor electrodes, the two or more sensor electrodes outputting, as the measurement values, capacitances that satisfy a reliability standard; and calculating the deviation amount based on the measurement values of the identified two or more sensor electrodes.

Abstract: A measuring system according to an exemplary embodiment acquires a measurement value indicating electrostatic capacitance between a measuring device and a transport fork for transporting the measuring device. The transport fork includes a target electrode. The measuring device includes a first sensor provided on a base board. The first sensor includes a central electrode and peripheral electrodes. The central electrode acquires electrostatic capacitance for reflecting a distance with the target electrode. The peripheral electrodes are disposed around the central electrode to acquire electrostatic capacitance for reflecting an amount of deviation in a horizontal direction with respect to the target electrode of the transport fork.

Abstract: A measuring instrument according to an exemplary embodiment includes a base board, at least one sensor chip provided on the base board, and a circuit board provided on the base board. The at least one sensor chip includes a sensor unit including a signal electrode having a front surface intersecting the base board in a radial direction, a guard electrode disposed on a rear side of the signal electrode, and a first ground electrode disposed on a rear side of the guard electrode. The at least one sensor chip includes a second ground electrode extending along a lower surface of the sensor unit. A space between the second ground electrode and the sensor unit is filled with an insulating material.

Abstract: A detector is a detector that detects fastening axial force applied by a fastening unit in an axial direction. The detector includes a strain element that has a through hole through which a bolt portion that the fastening unit has is inserted, and a strain sensing sensor that senses strain of the strain element. The strain element has a block-like form and has a planar portion following the axial direction on a side face thereof. The strain sensing sensor is provided on the planar portion.

Abstract: A torque sensor includes: a strain generation unit with an outer ring-shaped unit, an inner ring-shaped unit that shares a center with the outer ring-shaped unit; and a plurality of spoke units connecting the outer ring-shaped unit with the inner ring-shaped unit; an insulation layer provided on the strain generation body; a first resistor unit and a second resistor unit that are connected in series and that are provided on the insulation layer; and a first output terminal that is connected between the first resistor unit and the second resistor unit, wherein the first resistor unit includes a plurality of first gauge elements connected in series and are arranged in each of the plurality of the spoke units, and the second resistor unit includes a plurality of second gauge elements connected in series and are arranged in each of the plurality of the spoke units.