Abstract: The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Abstract: The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Abstract: The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Abstract: The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Abstract: The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Abstract: The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Abstract: The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Abstract: The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Abstract: A pad for a steering wheel includes a membrane switch forming member and a cover member. The switch forming member includes a switch body and a support plate. The switch body has a plurality of conductive thin metal sheets and an insulating space interposed between the metal sheets. The support plate is made of rigid synthetic resin for supporting the switch body on its upper face and is formed in its outer peripheral edge with a plurality of mounting holes extending vertically. The cover member covers the air bag of an air bag device and is formed with a rupture portion adapted to be ruptured when the air bag is inflated, and mounting ribs projecting from the back face thereof and engaged with the mounting holes of the support plate. At least one of the outer peripheral edge of the support plate and the back face of the cover member is formed with gap regulating projections for setting a predetermined gap between the upper face of the support plate back face of the cover member.

Abstract: The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

Abstract: A pad for a steering wheel includes a membrane switch forming member and a cover member. The switch forming member includes a switch body and a support plate. The switch body has a plurality of conductive thin metal sheets and an insulating space interposed between the metal sheets. The support plate is made of rigid synthetic resin for supporting the switch body on its upper face and is formed in its outer peripheral edge with a plurality of mounting holes extending vertically. The cover member covers the air bag of an air bag device and is formed with a rupture portion adapted to be ruptured when the air bag is inflated, and mounting ribs projecting from the back face thereof and engaged with the mounting holes of the support plate. At least one of the outer peripheral edge of the support plate and the back face of the cover member is formed with gap regulating projections for setting a predetermined gap between the upper face of the support plate back face of the cover member.

Abstract: A pad for a steering wheel includes a membrane switch forming member and a cover member. The switch forming member includes a switch body and a support plate. The switch body has a plurality of conductive thin metal sheets and an insulating space interposed between the metal sheets. The support plate is made of rigid synthetic resin for supporting the switch body on its upper face and is formed in its outer peripheral edge with a plurality of mounting holes extending vertically. The cover member covers the air bag of an air bag device and is formed with a rapture portion adapted to be ruptured when the air bag is inflated, and mounting ribs projecting from the back face thereof and engaged with the mounting holes of the support plate. At least one of the outer peripheral edge of the support plate and the back face of the cover member is formed with gap regulating projections for setting a predetermined gap between the upper face of the support plate back face of the cover member.

Abstract: A pad for an air bag device including an upper wall portion which has an openable portion which, upon expansion of the air bag, is separated from a side wall portion of the pad, leaving a hinge portion, and is angularly movable about that pivot axis so as to be openable. The openable portion is constituted by a net insert of a net-like configuration and a covering layer of a soft material covering the net insert. The net insert has a slit which is formed in one edge portion thereof remote from the hinge portion and extends toward the hinge portion. With this construction, even if part of the pad is curved, the net insert can be set in a corresponding injection mold without generating wrinkles in the net insert, and the molding can be performed in such a manner that the openable portion has a good appearance.

Abstract: This invention concerns a production method and a processing apparatus for semiconductor devices, as well as an evacuating apparatus used for the processing apparatus. According to this invention, since the evacuation system of pressure-reduction processing apparatus for conducting various wafer processings during production steps of semiconductor devices is constituted only with oil-free vacuum pump, deleterious oil contaminations or carbonation products of oils produced from oils upon heating are not present in the pressure-reducing processing chamber as compared with conventional pressure-reducing processing apparatus using a vacuum oil pump as an evacuation pump and the production method of semiconductor devices using such apparatus.

Abstract: A vacuum pump with a heating portion for preventing adhesion of reaction products on a discharge side thereof.

Abstract: A steering wheel having an operating portion, a hub portion, a spoke portion, an impact energy absorbing member located on the hub portion for absorbing impact energy, and a pad including a hard insert and a soft cover member integrally covering the insert for covering at least an impact energy absorbing member and a spoke portion. The insert has a plurality of divided parts or a portion or portions of thin wall section to improve an impact energy absorbing effect of the impact energy absorbing member independently of the rigidity of the pad, without the deterioration of the pad.

Abstract: This invention concerns a production method and a processing apparatus for semiconductor devices, as well as an evacuating apparatus used for the processing apparatus. According to this invention, since the evacuation system of pressure-reduction processing apparatus for conducting various wafer processings during production steps of semi-conductor devices is constituted only with oil-free vacuum pump, deleterious oil contaminations or carbonation products of oils produced from oils upon heating are not present in the pressure-reducing processing chamber as compared with conventional pressure-reducing processing apparatus using a vacuum oil pump as an evacuation pump and the production method of semiconductor devices using such apparatus.