Abstract: A plasma processing method and a plasma processing system provide advantages of a high degree of selectivity, a large area processing capability and an enhanced precision level. A plasma processing method according to the invention is so designed that a pulse modulation power is supplied alternately to the plasma generating power supply and the substrate bias power supply by referring to the time taken by gas to diffuse from the center of electric discharge to the substrate. In a plasma processing system according to the invention, the plasma generating power supply and the substrate bias power supply are provided with modulation means for supplying a pulse modulation power alternately to the plasma generating section and the substrate electrode by referring to the time taken by gas to diffuse from the center of electric discharge to the substrate.

Abstract: A plasma processing method and a plasma processing system provide advantages of a high degree of selectivity, a large area processing capability and an enhanced precision level. A plasma processing method according to the invention is so designed that a pulse modulation power is supplied alternately to the plasma generating power supply and the substrate bias power supply by referring to the time taken by gas to diffuse from the center of electric discharge to the substrate. In a plasma processing system according to the invention, the plasma generating power supply and the substrate bias power supply are provided with modulation means for supplying a pulse modulation power alternately to the plasma generating section and the substrate electrode by referring to the time taken by gas to diffuse from the center of electric discharge to the substrate.

Abstract: A car cover has a bag for storing the cover. The bag can be stably mounted on the trunk, and in this state the cover can be put on the car smoothly. A pair of triangular sheets are connected to the bag. The bag is secured to the cover member through a gusset provided between the triangular sheets. A belt connected to the free ends of the triangular sheets is put around the hinges in the trunk room. A mounting sheet is stitched to the edge of the opening of the bag and is fastened to the interior surface of the trunk by hook-and-loop fasteners provided near its front edge. After supporting the bag on the rear wall of the trunk by fastening the triangular sheets and the mounting sheet, the trunk door is closed and the cover member is taken out of the bag and put on the car. The locking mechanism of the trunk door can pass through a gap between the triangular sheets or a hole formed in the mounting sheet, so that the trunk door can be closed and locked.

Abstract: A method of testing a plurality of repeaters arrayed along a transmission line of a pulse code modulation system, and of locating any faulty repeaters, both testing and fault location being performed automatically. Pulse train groups, each containing a frequency component corresponding to a supervisory signal frequency of one of the repeaters, are successively applied from one terminal of the transmission line. Each pulse train group comprises a plurality of subgroup pulse trains, each of which contains the supervisory frequency component of the pulse train group to which it belongs, with the density of a pulse train in successive subgroups being successively increased. Any faulty repeater is located by determining the pulse train density at which a supervisory signal produced by the repeater fails to increase by a predetermined amount for a known change in pulse train density.