Abstract: In order to handle platter flutter in a hard disk operated at high speed (e.g. 10,000 RPM) and maintain tracking of read/write head, peak filters are added to a head tracking servo feedback loop. In some embodiments, several lag-lead type peak filters centered at a plurality of flutter mode frequencies are provided to process a Position Error Signal (PES) read from the read/write head. The several filter are preferably arranged in series (i.e. to operate on the PES sequentially), alternatively the filters can be arranged in parallel. Phase lags and leads caused by the several filters partially cancel at frequencies intermediate center frequencies of the several filters. According to another embodiment two or more, preferably three narrow band filters are used to cover the spectrum of each flutter mode. In a configuration mode, a spectrum of the flutter modes can be obtained and used to set the center frequencies, and bandwidths of filters used to filter out the flutter modes.

Abstract: A substrate-supporting apparatus, wherein a substrate is not warped or distorted and a film with uniform thickness is formed, is a semiconductor substrate-supporting apparatus which supports and heats semiconductor substrates inside a vacuum-pumped reaction chamber. On the substrate-supporting surface of the semiconductor substrate-supporting apparatus, a concave portion which includes a depression slanting from the peripheral portion to the center is provided, the semiconductor substrate is supported in a position where the peripheral portion of the back surface of the substrate contacts the slanting surface of the concave portion, and the concave portion is formed so that an interval between the center of the concave portion and the semiconductor substrate becomes the designated distance. The slanting surface of the concave portion may include a portion of a spherical surface or a conical surface.

Abstract: A hard disk drive that can suppress an increase of fluttering and power consumption at high rotation speed by increasing the seek speed of a magnetic head is disclosed. An enclosure case has a 3.5 inch form factor, and a magnetic disk has an outer diameter of, for example, 84 mm. A center of the magnetic disk is shifted from a center of the enclosure case in the width direction. Owing to this, by designing a larger voice coil, it is possible to increase the driving speed of the actuator.

Abstract: A base plate of a stainless-steel body material formed by pressing is polished and cleared of burrs by means of an abrasive material that consists mainly of Fe2O3 in a polishing process. The polished base plate is heated to a heat treatment temperature for solid solution in a reducing atmosphere in a heat treatment process. In this heat treatment process, an oxide in the constituents of minute fragments of the abrasive material in the surface of the body material of the base plate is reduced to leave iron, which is dispersed into the body material.

Abstract: A semiconductor processing apparatus for processing a semiconductor substrate includes: (i) a vacuum-exhausted chamber; (ii) a susceptor which is provided within the chamber and which holds the substrate and has at least three through-holes; (iii) substrate-supporting members which are supported within the through-holes and which support the substrate; (iv) a pin, one end of which is inserted into the inner part of a the substrate-supporting member; and (v) a pin-fixing structure provided at the base of the chamber for fixing the other end of the pin. When the susceptor moves downward, the pin pushes up the substrate-supporting member, and the substrate is supported in midair by the substrate-supporting members apart from the susceptor.

Abstract: A stator magnet according to a first embodiment of the present invention forms a voice coil motor with a closed coil. The closed coil is supported by an actuator arm in a rotatable manner and at a predetermined rotation angle. The closed coil has first and second side edges that extend along different lines in radial directions whose center is a center of rotation of the actuator arm. It also has an outer edge that connects edges of outer sides of the first and second side edges with viewed from the radial direction, and extends along an arc whose center is the center of rotation. A first magnetic pole region is located within a moving area of the first side edge to act on the first side edge. A second magnetic pole region is located within a moving area of the second side edge to act on the second side edge. The polarity of the second magnetic pole region is opposite to the polarity of the first magnetic pole region.

Abstract: An arrangement structure of the printed circuit board and the interface cable connector of a magnetic disk drive for increasing the degree of freedom of the arrangement of a spindle motor, and for minimizing the size of a printed circuit board. An interface cable connector is disposed on the side opposite to the spindle motor, and the printed circuit board is sized so as not to contact with the spindle motor in the height direction. This allows the degree of freedom of the arrangement of the spindle motor to increase. Further, the distance between the interface cable connector and the preamplifier connector on the printed circuit board is short. Thus, the size of the printed circuit board can be made as small as possible.

Abstract: A method and system for reducing positioning noise in a data storage system are provided. An access device is positioned over a data storage medium using a stream of bursts stored on the medium. The bursts are sensed at a frequency determined by the rate at which the medium is moved relative to a sensing device. Output positioning values are provided to position the access device at a frequency higher than the frequency at which the positioning bursts are sensed, and/or at random times. The random times may be calculated as random advances or delays from time points occurring at a fixed frequency.

Abstract: A plasma CVD device includes a reaction chamber, a remote plasma discharge chamber that is provided remotely from the reaction chamber, and piping that links the reaction chamber and the remote plasma discharge chamber. The remote plasma discharge chamber activates cleaning gas by plasma discharge energy, and the activated cleaning gas is introduced into the inside of the reaction chamber through the piping and changes solid substances that adhere to the inside of the reaction chamber in consequence of film formation, to gaseous substances, thereby cleaning the inside of the reaction chamber. The device is characterized by at least one of the following: (a) the remote plasma discharge chamber generates active species using radio frequency oscillating output energy of a preselected frequency; (b) the piping is made of materials that are not corroded by the active species; or (c) the piping is provided with a through-flow type valve.

Abstract: A bearing mechanism of the present invention has a first bearing and a second bearing disposed at different positions in an axial direction. Each bearing has an inner race, an outer race, and balls. A shaft holds the inner races of both bearings in an axially separated manner, while a supporting member holds the outer races of both bearings in an axially separated manner. The balls of the bearings have a different coefficient of linear expansion than that of the inner and outer races. The inner and outer races of each of the bearings are fixed in an axially shifted manner, whereby pre-loaded pressures are applied between both the inner race and the balls, and between both the outer race and the balls. As the temperature changes, the supporting member has a compensation member that can change a distance between the outer races in a changing ratio different from a changing ratio of the distance between the inner races.

Abstract: A hard disk has a servo loop and a rotating storage medium. The rotating storage medium has one or more significant flutter modes at frequencies below a zero cross frequency of a rejection transfer function of the servo loop. The effect of the forgoing is to allow the servo loop to better track a rotating medium that is subject to significant flutter. Peak filters with frequency bands that substantially overlap frequency bands of the significant flutter modes can also be added to the servo loop to further improve tracking. Multiple narrow band filters with frequency bands overlap can be used to cover the spectrum of a single flutter mode. Two lag-lead filters, the frequency responses of which overlap can be used to cover two adjacent significant flutter modes. At frequencies intermediate to the two adjacent flutter, modes, the lead caused by one filter, will be cancelled by the lag caused by the second.

Abstract: An attachment structure and method for a disk drive apparatus for making the coupling resonance frequency of a hard disk drive the same whether one disk is loaded or a plurality of disks are loaded based upon parameters obtained from a simulation model. The modeling of a coupling vibration for one disk and for two disks is performed using a coupling vibration model of a linear two degree-of-freedom system. The component parts of a spindle motor providing a spring constant Kp are adjusted so that the resonance frequency determined by coupling that of a spindle motor with that of the disk(s) is made much the same whether one disk or two disks are loaded. This adjustment enables stable track following to be secured without the need for adding dummy disks and other parts.

Abstract: An apparatus for forming a thin film such as a silicon oxide film on a surface of a substrate such as a semiconductor substrate includes: a reaction chamber having an interior where the substrate is placed when in use; a liquid reaction material supplier for supplying a given amount of liquid reaction material such as TEOS for forming a thin film on the substrate; and a mist-forming device for forming mist of the liquid reaction material and spraying the liquid reaction material onto a surface of the substrate for forming a thin film thereon. The mist-forming device is disposed upstream of the reaction chamber and downstream of the liquid reaction material supplier. Neither of the mist-forming device nor the liquid reaction material supplier includes a heating device for heating the liquid reaction material.

Abstract: A method and system for reducing positioning noise in a data storage system are provided. An access device is positioned over a data storage medium using a stream of bursts stored on the medium. The bursts are sensed at a frequency determined by the rate at which the medium is moved relative to a sensing device. Output positioning values are provided to position the access device at a frequency higher than the frequency at which the positioning bursts are sensed, and/or at random times. The random times may be calculated as random advances or delays from time points occurring at a fixed frequency.

Abstract: A rigid magnetic recording disk drive includes a vacuum pump attached to the disk drive housing for removing air from within the housing so that the disk drive is operated at a reduced internal gas pressure. The pump motor is controlled by control circuitry that receives an input signal representative of the pressure within the housing to enable the pressure to be maintained within a predetermined reduced pressure range. Because spindle motor current has been directly correlated with internal pressure, a signal representative of the spindle motor current is used as the input to the pump control circuitry. The pump control circuitry also prevents the pump from turning on until the spindle motor has reached its stable operating speed, and from turning on when the disk drive is reading or writing data. Because of the reduced internal pressure the disk drive operates at a significantly higher disk RPM with only a minimal increase in power consumption and without any increase in track misregistration.

Abstract: A disk drive system, includes an arm for mounting a head, and at least one component, coupled to the arm, for being synchronized to maintain a zero net angular momentum of the arm and the at least one component. Another disk drive system including a read/write head, includes a torque counter-generating member for being synchronized to maintain a zero net angular momentum of the head.

Abstract: A supporting structure of a susceptor for semiconductor processing includes: (a) a plate having a carrying surface for placing a semiconductor substrate thereon, which plate has a back surface having a first coupling structure with a first pawl; and (b) a heating block for heating the semiconductor substrate, which heating block has an upper surface in contact with the back surface of the plate. The upper surface has a second coupling structure with a second pawl corresponding to the first coupling structure with the first pawl. A coupler may be used for placing the first pawl and the second pawl in pressure contact to couple the plate and the heating block.

Abstract: A disk drive and a control method for the disk drive to reduce the number of unnecessary write inhibition operations. A microprocessor unit (MPU) 6 sets an allowable value Cv for the velocity of a magnetic head 1 to V0 until the head passes over N1 sectors after completion of a seek operation, Cv to V1 until the head passes over N2 sectors after passage of N1 sectors, and Cv to V2 after passage of N2 sectors. (N1<N2 and V0<V1<V2) A hard-disk controller (HDC) 10 detects the velocity of the magnetic head 1, based on a position error signal PES from a servo sector regeneration section 8a, and prohibits the write operation of the magnetic head 1 if the velocity exceeds Cv.

Abstract: Provided are a susceptor for a plasma CVD equipment, characterized in that the surface of the susceptor has raised and depressed portions which are continuously formed, and a steep protrusion is completely removed in the raised portion, and a method of roughening a surface of a susceptor for a plasma CVD equipment, which comprises a step of mechanically flattening the surface of the susceptor, a step of shot-blasting the surface of the thus-flattened susceptor, and a step of polishing the shot-blasted surface of the susceptor chemically, electrochemically and/or mechanically, a steep protrusion being completely removed from the surface of the susceptor, and an Ra value of the susceptor surface being 1 .mu.m.ltoreq.Ra.ltoreq.8 .mu.m. Since the susceptor of the present invention reduces a rate of contact between a wafer substrate and the susceptor surface, adsorption due to charging can be prevented.

Abstract: The present invention provides a crash stop which is capable of adjusting shock absorptivity by employing the same elastic material and where the mounting and demounting operations are easy. A metal pin has a recess in its intermediate portion. An elastic body has three blade portions. In a crash stop, the metal pin is press fitted into the pin inserting hole of the elastic body, and the portion between the support portion and the knob portion of the metal pin is covered with the elastic body. In the boundary between the intermediate portion of the metal pin and the elastic body, a cavity is formed. The support portion is fitted into the crash stop support hole of the base so that it can be freely pulled out and inserted. At this time, the upper end of the blade portion contacts the inner side surface of the crash stop inserting hole of the upper yoke and is contracted, and by the frictional force generated between the crash stop inserting hole and the upper end of the blade portion, the crash stop is locked.