Patents by Inventor Klaus Ufert

Klaus Ufert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8038850
    Abstract: A sputter deposition apparatus and method, and a substrate holder for use with a sputter deposition apparatus is disclosed. According to one embodiment of the invention, a sputter deposition apparatus is provided, including at least one sputter target, a first plasma, a substrate holder, and a further plasma. In one embodiment, the further plasma is an ECWR plasma. According to an additional embodiment of the invention, an anode is provided between the further plasma, and the substrate holder. According to a further embodiment, the substrate holder includes a dielectric layer with varying thickness.
    Type: Grant
    Filed: June 23, 2006
    Date of Patent: October 18, 2011
    Assignee: Qimonda AG
    Inventor: Klaus Ufert
  • Patent number: 7881092
    Abstract: An integrated circuit including a resistive memory element and a method of manufacturing the integrated circuit are described. The method of manufacturing the integrated circuit includes depositing a switching layer material and intentionally forming inhomogeneously distributed defects within the switching layer material to increase a number of switching cycles of the resistive memory element. The resistive memory element includes a switching layer that selectively switches between a low resistance state and a high resistance state. The switching layer contains intentionally formed defects that increase the number of switching cycles of the switching layer.
    Type: Grant
    Filed: July 24, 2007
    Date of Patent: February 1, 2011
    Assignee: Rising Silicon, Inc.
    Inventor: Klaus Ufert
  • Publication number: 20090027944
    Abstract: An integrated circuit including a resistive memory element and a method of manufacturing the integrated circuit are described. The method of manufacturing the integrated circuit includes depositing a switching layer material and intentionally forming inhomogeneously distributed defects within the switching layer material to increase a number of switching cycles of the resistive memory element. The resistive memory element includes a switching layer that selectively switches between a low resistance state and a high resistance state. The switching layer contains intentionally formed defects that increase the number of switching cycles of the switching layer.
    Type: Application
    Filed: July 24, 2007
    Publication date: January 29, 2009
    Inventor: Klaus Ufert
  • Publication number: 20080278988
    Abstract: According to one aspect, an integrated circuit may comprise a first electrode, a second electrode, and a resistive switching rod extending from the first electrode to the second electrode and being at least partly embedded in a thermal barrier matrix.
    Type: Application
    Filed: May 9, 2007
    Publication date: November 13, 2008
    Inventor: Klaus Ufert
  • Publication number: 20080247214
    Abstract: In one aspect, a resistive memory device may be implemented in an embedded system. A resistive memory may comprise a resistive switchable medium that may be electrically connected to a first and a second electrode. In one aspect the first and the second electrode may comprise a via conductor and an interconnection line of an embedded structure.
    Type: Application
    Filed: April 3, 2007
    Publication date: October 9, 2008
    Inventor: Klaus Ufert
  • Publication number: 20080247215
    Abstract: According to one aspect, a switching element may comprise a first electrode, a second electrode, and a resistive switching region extending from the first electrode to the second electrode and comprising transition metal oxinitride.
    Type: Application
    Filed: April 3, 2007
    Publication date: October 9, 2008
    Inventor: Klaus Ufert
  • Publication number: 20070295597
    Abstract: A sputter deposition apparatus and method, and a substrate holder for use with a sputter deposition apparatus is disclosed. According to one embodiment of the invention, a sputter deposition apparatus is provided, including at least one sputter target, a first plasma, a substrate holder, and a further plasma. In one embodiment, the further plasma is an ECWR plasma. According to an additional embodiment of the invention, an anode is provided between the further plasma, and the substrate holder. According to a further embodiment, the substrate holder includes a dielectric layer with varying thickness.
    Type: Application
    Filed: June 23, 2006
    Publication date: December 27, 2007
    Inventor: Klaus Ufert
  • Publication number: 20070274120
    Abstract: According to the invention CBRAM cell is provided exhibiting a resistive switching effect offering the possibility to store multiple memory states in one cell by programming said memory cell to different resistance levels including at least a first memory state with a high resistance level representing a low-conductivity state of the memory cell and one memory state with a low resistance level representing a high-conductivity state of the memory cell, wherein the resistive switching effect is substantially based on a variation of the concentration of the metallic material incorporated or deposited in the matrix host material.
    Type: Application
    Filed: February 7, 2005
    Publication date: November 29, 2007
    Applicant: Infineon Technologies AG
    Inventors: Cay-Uwe Pinnow, Klaus Ufert, Michael Kund
  • Patent number: 7297975
    Abstract: Disclosed is a non-volatile memory cell including a first conductive electrode region, a second conductive electrode region and a memory region disposed therebetween. The memory region includes one or a plurality of metal oxide nanoparticles, which contact and electrically connect the first and the second electrode region via contact locations and which exhibit a bistable resistance properties when applying an external voltage.
    Type: Grant
    Filed: July 28, 2005
    Date of Patent: November 20, 2007
    Assignee: Infineon Technologies AG
    Inventor: Klaus Ufert
  • Patent number: 7265381
    Abstract: A memory cell for opto-electronic applications includes a substrate, a first electrode and a second electrode, and an active layer arranged between the first and the second electrodes, wherein the active layer includes a metalloporphyrin derivative, and wherein the second electrode is transparent and includes ZnO, which is doped with B, Al, Ga, or Mg.
    Type: Grant
    Filed: December 30, 2004
    Date of Patent: September 4, 2007
    Assignee: Infineon Technologies, AG
    Inventor: Klaus Ufert
  • Publication number: 20070045704
    Abstract: Disclosed is a non-volatile memory cell including a first conductive electrode region, a second conductive electrode region and a memory region disposed therebetween. The memory region includes one or a plurality of metal oxide nanoparticles, which contact and electrically connect the first and the second electrode region via contact locations and which exhibit a bistable resistance properties when applying an external voltage.
    Type: Application
    Filed: July 28, 2005
    Publication date: March 1, 2007
    Inventor: Klaus Ufert
  • Publication number: 20060170022
    Abstract: Semiconductor molecular hybrid element with a storage cell comprising, arranged between a first and a second electrode, a layer of a self-assembled monolayer made of an organic compound, whereby the organic compound is a compound corresponding to the general formula I or II whereby R1 represents hydrogen, an alkyl chain with 1-20 C atoms, an aromatic group that can be substituted by an alkyl chain with 1-4 C atoms or by one or several functional groups, whereby at least one R1 group in the general formula I or II is an anchoring group corresponding to the formula and whereby n is an integer in the range from 1-4.
    Type: Application
    Filed: January 31, 2005
    Publication date: August 3, 2006
    Inventor: Klaus Ufert
  • Publication number: 20060145181
    Abstract: A memory cell for opto-electronic applications includes a substrate, a first electrode and a second electrode, and an active layer arranged between the first and the second electrodes, wherein the active layer includes a metalloporphyrin derivative, and wherein the second electrode is transparent and includes ZnO, which is doped with B, Al, Ga, or Mg.
    Type: Application
    Filed: December 30, 2004
    Publication date: July 6, 2006
    Inventor: Klaus Ufert
  • Publication number: 20060049390
    Abstract: A nonvolatile, resistively switching memory cell includes a layer arranged between a first electrode and a second electrode. The layer includes one or more chalcogenide compound(s) selected from the group consisting of CuInS, CuInSe, CdInS, CdInSe, ZnInS, MnInS, MnZnInS, ZnInSe, InS, InSSe and InSe, with alkali metal or alkaline-earth metal ions contained in the layer of the chalcogenide compound(s).
    Type: Application
    Filed: August 23, 2005
    Publication date: March 9, 2006
    Inventors: Klaus Ufert, Cay-Uwe Pinnow, Thomas Happ
  • Publication number: 20050250281
    Abstract: The present invention relates to a reproducible conditioning during the manufacturing of a resistively switching CBRAM memory cell comprising a first electrode and a second electrode with an active material positioned therebetween. The active material is adapted to be placed in a more or less electroconductive state by means of electrochemical switching processes. A CBRAM memory cell manufactured pursuant to the method according to the invention has, due to the improved conditioning, more reliable and more distinctly evaluable electrical switching properties. Moreover, no more forming step is necessary with the method according to the present invention.
    Type: Application
    Filed: April 25, 2005
    Publication date: November 10, 2005
    Applicant: Infineon Technologies AG
    Inventors: Klaus Ufert, Cay-Uwe Pinnow