Patents by Inventor Knut Voigtlaender

Knut Voigtlaender has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of determining the depth profile of a surface structure and system for determining the depth profile of a surface structure
    Patent number: 7812966
    Abstract: According to one embodiment of the present invention, a method of determining the depth profile of a surface structure includes: irradiating the surface structure with irradiation light including light components of different wavelengths; and determining the depth profile of the surface structure in dependence on interferometric effects caused by the reflection of the irradiation light at the surface structure.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: October 12, 2010
    Assignee: Infineon Technologies AG
    Inventors: Frank Hoffmann, Knut Voigtlaender
  • Method of Determining the Depth Profile of a Surface Structure and System for Determining the Depth Profile of a Surface Structure
    Publication number: 20090059239
    Abstract: According to one embodiment of the present invention, a method of determining the depth profile of a surface structure includes: irradiating the surface structure with irradiation light including light components of different wavelengths; and determining the depth profile of the surface structure in dependence on interferometric effects caused by the reflection of the irradiation light at the surface structure.
    Type: Application
    Filed: August 30, 2007
    Publication date: March 5, 2009
    Inventors: Frank Hoffmann, Knut Voigtlaender
  • Method of monitoring a production process using a linear combination of measured variables with selected weights
    Patent number: 7479395
    Abstract: The invention relates to a method for monitoring a manufacturing process, which by using a linear combination of measured variables with judiciously chosen weighting, produces a suitable (optimal) signal for determining each parameter. The extraction of the parameters from the measured variables is thus greatly simplified and in many cases becomes actually possible for the first time. According to the invention, large amounts of data may now be prepared, such that the crucial information (parameters) can be obtained from the data, almost in real time, or in real time.
    Type: Grant
    Filed: July 25, 2002
    Date of Patent: January 20, 2009
    Assignee: Infineon Technologies AG
    Inventors: Ferdinand Bell, Dirk Knobloch, Knut Voigtländer, Jan Zimpel