Abstract: There is provided an absolute encoder advantageous in accuracy of an output thereof against a defect in a scale thereof. In the absolute encoder, a detector detects a part of an array of marks of the scale, and outputs a data sequence corresponding to the part. A processor stores information indicating a correspondence between each of a plurality of code sequences and an absolute coordinate of motion of the scale, and outputs information of the absolute coordinate based on the data sequence and the information. The processor detects an error of the data sequence, and performs rewriting of the information based on the detected error.

Abstract: A two-dimensional absolute encoder includes a scale having marks arranged thereon along first and second directions different from each other, a detector configured to perform first detection that detects rows of a first number of marks arranged in the first direction and second detection that detects rows of a second number of marks arranged in the second direction, and a processor configured to determine absolute positions of the scale in the first and second directions based on outputs from the detector. Each of the marks has one of different characteristic values each corresponding to a combination of a quantized first code for indicating a position in the first direction and a quantized second code for indicating a position in the second direction, the number of the different characteristic values being smaller than the number of the combinations.

Abstract: There is provided an absolute encoder advantageous in accuracy of an output thereof against a defect in a scale thereof. In the absolute encoder, a detector detects a part of an array of marks of the scale, and outputs a data sequence corresponding to the part. A processor stores information indicating a correspondence between each of a plurality of code sequences and an absolute coordinate of motion of the scale, and outputs information of the absolute coordinate based on the data sequence and the information. The processor detects an error of the data sequence, and performs rewriting of the information based on the detected error.

Abstract: A two-dimensional absolute encoder includes; a scale on which marks are arranged at predetermined pitches along first and second directions; a detector configured to detect a number of marks arranged in each direction; and a processor configured to obtain an absolute position of the scale in the each direction based on outputs from the detector. Each mark has one of characteristic corresponding to information of a quantized code used for indicating a position in the each direction. The processor is configured to generate a code sequence including the number of codes based on detection of the number of marks and information corresponding to the characteristic, and to obtain an absolute position of the scale in the each direction based on the code sequence.

Abstract: An interferometer measures a displacement of an object to be measured by observing a fluctuation in intensity of interfering light generated by dividing light emitted from a light source into two light beams and overlaying the two light beams. The interferometer includes: a light-receiving unit including a light-receiving area including a plurality of partial areas and configured to detect the interfering light in each of the plurality of partial areas; and a processing unit configured to calculate a value of an index indicating uniformity of a phase distribution of the interfering light in the light-receiving area by using a detection result in each of the partial areas.

Abstract: An absolute rotary encoder comprises a scale having marks arranged at a first pitch; a first detector and a second detector including plural photoelectric conversion elements arranged at a second pitch smaller than the first pitch, and configured to detect a predetermined number of marks, the second detector disposed opposite to the first detector; and a computing device. The computing device is configured to generate a data string by quantizing a periodic signal output from the first detector, and obtains first angle data from the data string, to normalize amplitudes of the periodic signals output from the first and second detectors, to average the normalized periodic signal to obtain second angle data from a phase of the averaged periodic signal, and to combine the first and second angle data to generate data representing an absolute rotation angle.

Abstract: An absolute rotary encoder comprises: a rotary member which includes a cylindrical surface on which a plurality of marks are arranged at a predetermined pitch in a circumferential direction; a light source configured to emit a light toward the cylindrical surface; a detector configured to detect a predetermined number of marks of the plurality of marks; and a computing device configured to obtain an absolute rotation angle of the rotary member based on an output from the detector. The detector is configured to output a signal corresponding to the predetermined number of marks and having an uneven period resulting from a geometrical layout of the light source, the cylindrical surface, and the detector. The computing device is configured to correct the signal using correction data so as to reduce unevenness of the period, and to obtain the absolute rotation angle of the rotary member using the corrected signal.

Abstract: The laminated diffractive optical element includes plural diffraction gratings (21, 22 and 23) laminated with each other, the respective diffraction gratings being formed of a same light-transmissive material. In the element, reflective films are formed on grating surfaces (11 and 12) of the respective diffraction gratings, each of the reflective films being disposed between the diffraction gratings. Each of the reflective films reflects light in a specific wavelength range and transmits light in a wavelength range different from the specific wavelength range, the specific wavelength ranges of the respective reflective films being different from each other. The grating surfaces of the respective diffraction gratings are formed in shapes different from each other according to the specific wavelength ranges corresponding to the respective reflective films.

Abstract: A two-dimensional absolute encoder includes a scale having marks arranged thereon along first and second directions different from each other, a detector configured to perform first detection that detects rows of a first number of marks arranged in the first direction and second detection that detects rows of a second number of marks arranged in the second direction, and a processor configured to determine absolute positions of the scale in the first and second directions based on outputs from the detector. Each of the marks has one of different characteristic values each corresponding to a combination of a quantized first code for indicating a position in the first direction and a quantized second code for indicating a position in the second direction, the number of the different characteristic values being smaller than the number of the combinations.

Abstract: A wavelength shift measuring apparatus of the present invention is a wavelength shift detection sensor (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member (SP) provided so that an optical path length difference of the two light beams split by the beam splitter (PBS2) is constant, and a plurality of photoelectric sensors (PD) detecting the interference light generated by the beam splitter (BS2). The plurality of photoelectric sensors (PD) output a plurality of interference signals having phases shifted from one another based on the interference light to calculate a wavelength shift using the plurality of interference signals.

Abstract: A scale of an absolute encoder, on which a plurality of marks are arranged at predetermined pitches along at least one direction, includes: a base including a plurality of light-reflective or light-transmissive marks arranged at the predetermined pitches along the at least one direction. A film, which attenuates light, is formed on each of marks as a part of the plurality of marks.

Abstract: A two-dimensional absolute encoder includes; a scale on which marks are arranged at predetermined pitches along first and second directions; a detector configured to detect a number of marks arranged in each direction; and a processor configured to obtain an absolute position of the scale in the each direction based on outputs from the detector. Each mark has one of characteristic corresponding to information of a quantized code used for indicating a position in the each direction. The processor is configured to generate a code sequence including the number of codes based on detection of the number of marks and information corresponding to the characteristic, and to obtain an absolute position of the scale in the each direction based on the code sequence.

Abstract: A displacement measurement apparatus includes a first diffraction grating transmitting light from a light source and producing diffracted beams including first to third diffracted beams output in different directions; a second diffraction grating movable together with an object to be measured, provided in a plane parallel to the first diffraction grating, and reflecting the first to third diffracted beams transmitted through the first diffraction grating; a first photodetector receiving the first and second diffracted beams diffracted by the second diffraction grating; a second photodetector receiving at least the third diffracted beam transmitted through the first diffraction grating; and a calculation unit calculating displacement of the object in a first direction in accordance with the beams received by the first photodetector, and displacement of the object in a second direction, different from the first direction, in accordance with the beam received by the second photodetector.

Abstract: An apparatus includes a light source, a scale which is configured to have first and second diffraction grating portions which differ from each other in a grating pitch, a light receiving portion configured to receive first and second interference light fluxes generated from interference of a plurality of diffraction light fluxes, at the first and second diffraction grating portions, respectively, a light flux emitted from the light source and have different orders of diffraction, and to output first and second periodic signals based on an intensity of the first and second interference light fluxes, respectively, and a computing unit configured to output, based on the first and second periodic signals a signal representing an origin of displacement of the scale.

Abstract: An absolute rotary encoder comprises a scale having marks arranged at a first pitch; a first detector and a second detector including plural photoelectric conversion elements arranged at a second pitch smaller than the first pitch, and configured to detect a predetermined number of marks, the second detector disposed opposite to the first detector; and a computing device. The computing device is configured to generate a data string by quantizing a periodic signal output from the first detector, and obtains first angle data from the data string, to normalize amplitudes of the periodic signals output from the first and second detectors, to average the normalized periodic signal to obtain second angle data from a phase of the averaged periodic signal, and to combine the first and second angle data to generate data representing an absolute rotation angle.

Abstract: An absolute rotary encoder comprises: a rotary member which includes a cylindrical surface on which a plurality of marks are arranged at a predetermined pitch in a circumferential direction; a light source configured to emit a light toward the cylindrical surface; a detector configured to detect a predetermined number of marks of the plurality of marks; and a computing device configured to obtain an absolute rotation angle of the rotary member based on an output from the detector. The detector is configured to output a signal corresponding to the predetermined number of marks and having an uneven period resulting from a geometrical layout of the light source, the cylindrical surface, and the detector. The computing device is configured to correct the signal using correction data so as to reduce unevenness of the period, and to obtain the absolute rotation angle of the rotary member using the corrected signal.

Abstract: An absolute encoder includes a scale in which plural marks are arranged at a first pitch; a detector configured to detect a predetermined number of marks corresponding to one of the absolute codes; and a calculator configured to calculate an absolute position of the scale based on an output of the detector. The calculator is configured to generate a data sequence constituted by the predetermined number of data by respectively quantizing the predetermined number of periodic signals output from the detector, and to obtain first position data corresponding to the one of the absolute codes based on the generated data sequence, to obtain second position data based on a phase of at least one of the predetermined number of periodic signals, and to generate data which represents the absolute position by combining the first position data and the second position data.

Abstract: An interferometer measures a displacement of an object to be measured by observing a fluctuation in intensity of interfering light generated by dividing light emitted from a light source into two light beams and overlaying the two light beams. The interferometer includes: a light-receiving unit including a light-receiving area including a plurality of partial areas and configured to detect the interfering light in each of the plurality of partial areas; and a processing unit configured to calculate a value of an index indicating uniformity of a phase distribution of the interfering light in the light-receiving area by using a detection result in each of the partial areas.

Abstract: A heterodyne interferometry displacement measurement apparatus includes a first optical system including a light source (LASER) and a diffraction grating (GT0) that generates two diffracted lights to combine the two diffracted lights to generate a combined light and that causes the two diffracted lights to interfere with each other to generate a first frequency difference signal, a second optical system that converts the combined light into two lights of which frequencies are different from each other by a second frequency difference in accordance with a displacement of an object and that causes the two lights to interfere with each other to generate a second frequency difference signal, and an output device that outputs information of a displacement amount of the object based on the first frequency difference signal and the second frequency difference signal.

Abstract: An optical encoder 10,20,30,40,50 includes a grating scale (SCL) configured to be movable, a light-receiving device (PDA) configured to receive a light via the grating scale irradiated with a light, to generate N-phase signals (N is an integer not smaller than 6) that have respective phases different from each other, and an amplifier (AMP) configured to multiply the generated N-phase signals by M coefficient sets that are different from each other (M is an integer not smaller than 2), respectively, and to obtain a sum of the multiplied values with respect to each of the M coefficient sets to generate M-phase signals.