Patents by Inventor Koen De Wel

Koen De Wel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method, computer system and apparatus for recipe generation for automated inspection of semiconductor devices
    Patent number: 9739720
    Abstract: A method, a computer system and an apparatus are disclosed for inspection recipe generation for the automated inspection of semiconductor devices. In order to generate the inspection recipe a reference data set is used. Automatic inspection is carried out with an initial recipe on images of dies of the reference data set (reference wafermap). The detected inspection results from the automatic inspection are classified and the classified inspection results are compared with an expert classification of defects in dies. Overkill and underkill numbers are automatically generated. According to the overkill and underkill numbers the inspection recipe parameters are modified. Automatic inspection is repeated if the detection and/or the classification are below a predefined threshold.
    Type: Grant
    Filed: March 13, 2013
    Date of Patent: August 22, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Koen De Wel, Cedric Carette
  • METHOD, COMPUTER SYSTEM AND APPARATUS FOR RECIPE GENERATION FOR AUTOMATED INSPECTION SEMICONDUCTOR DEVICES
    Publication number: 20150006103
    Abstract: A method, a computer system and an apparatus are disclosed for inspection recipe generation for the automated inspection of semiconductor devices. In order to generate the inspection recipe a reference data set is used. Automatic inspection is carried out with an initial recipe on images of dies of the reference data set (reference wafermap). The detected inspection results from the automatic inspection are classified and the classified inspection results are compared with an expert classification of defects in dies. Overkill and underkill numbers are automatically generated. According to the overkill and underkill numbers the inspection recipe parameters are modified. Automatic inspection is repeated if the detection and/or the classification are below a predefined threshold.
    Type: Application
    Filed: March 13, 2013
    Publication date: January 1, 2015
    Inventors: Koen De Wel, Cedric Carette