Patents by Inventor Kohei Shimatani

Kohei Shimatani has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma generating apparatus and plasma treatment apparatus
    Patent number: 8133348
    Abstract: A plasma generating apparatus includes a coaxial convertor for coaxial-converting a microwave, a generally annular ring slot that passes the coaxial-converted microwave, and a dielectric window that propagates the microwave passed through the ring slot. A plasma is produced by the microwave propagated through the dielectric window. This enables stable formation of a plasma having a uniform distribution over a large area.
    Type: Grant
    Filed: April 26, 2006
    Date of Patent: March 13, 2012
    Assignees: Shibaura Mechatronics Corporation, Kabushiki Kaisha Toshiba
    Inventors: Ivan Petrov Ganachev, Yoshikazu Tsugami, Kohei Shimatani, Masashi Yamage
  • PLASMA GENERATING APPARATUS AND PLASMA TREATMENT APPARATUS
    Publication number: 20090045749
    Abstract: A plasma generating apparatus according to the invention includes coaxial conversion means for coaxial-converting a microwave, a generally annular ring slot for passing the coaxial-converted microwave, and a dielectric window for propagating the microwave passed through the ring slot, wherein a plasma can be produced by the microwave propagated through the dielectric window. This enables stable formation of a plasma having a uniform distribution over a large area.
    Type: Application
    Filed: April 26, 2006
    Publication date: February 19, 2009
    Applicants: Shibaura Mechatronics Corporation, Kabushiki Kaisha Toshiba
    Inventors: Ivan Petrov Ganachev, Yoshikazu Tsugami, Kohei Shimatani, Masashi Yamage