Patents by Inventor Kohiro Ito

Kohiro Ito has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of peeling photo-resist layer without damage to metal wiring
    Patent number: 5759751
    Abstract: A semiconductor manufacturer peels a photo-resist mask off by using organic alkaline solvent, and the residual alkaline solvent is neutralized with acid before a rinse in pure water so as to prevent a metal wiring from erosion due to strong alkaline solution produced from the residual organic alkaline solvent.
    Type: Grant
    Filed: February 6, 1997
    Date of Patent: June 2, 1998
    Assignee: NEC Corporation
    Inventors: Yuji Shimizu, Kohiro Ito, Masashige Moritoki