Abstract: A process for producing a tetraalkoxysilane by subjecting silicon and a lower alkyl alcohol to catalytic reaction in the presence of an alkali metal alkoxide catalyst is provided, which process comprises carrying out the catalytic reaction at 50.degree.-400.degree. C., adding a specified ether compound, and which process affords such advantages that the alkali metal alkoxide catalyst well dissolves in the reaction mixture to make it possible to easily carry out the reaction; whether Si-containing particles as raw material for Si are fine or coarse, the reaction can be carried at an increased reaction rate; and the yield of the tetraalkoxysilane per hour per unit weights of raw materials is high.