Patents by Inventor Kohji Numata

Kohji Numata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8512510
    Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.
    Type: Grant
    Filed: May 16, 2011
    Date of Patent: August 20, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
  • Publication number: 20110214813
    Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.
    Type: Application
    Filed: May 16, 2011
    Publication date: September 8, 2011
    Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
  • Publication number: 20100043974
    Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.
    Type: Application
    Filed: October 28, 2009
    Publication date: February 25, 2010
    Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
  • Patent number: 7506610
    Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. An upper electrode is disposed to face a target substrate placed within the process container. An electric feeder includes a first cylindrical conductive member continuously connected to the upper electrode in an annular direction. The electric feeder is configured to supply a first RF output from a first RF power supply to the upper electrode.
    Type: Grant
    Filed: May 26, 2005
    Date of Patent: March 24, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
  • Patent number: 7494561
    Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. A first upper electrode is disposed to have a ring shape and to face a target substrate placed within the process container. A second upper electrode is disposed radially inside the first upper electrode and electrically insulated therefrom. A first electric feeder is configured to supply a first RF output from a first RF power supply to the first upper electrode at a first power value. A second electric feeder branches from the first electric feeder and is configured to supply the first RF output from the first RF power supply to the second upper electrode at a second power value smaller than the first power value.
    Type: Grant
    Filed: May 26, 2005
    Date of Patent: February 24, 2009
    Assignee: Tokyo Electron Limited
    Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
  • Publication number: 20060000803
    Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.
    Type: Application
    Filed: May 26, 2005
    Publication date: January 5, 2006
    Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
  • Patent number: 6980733
    Abstract: Image data is sequentially read out in units of frames from a storage apparatus storing NTSC images, divided into even and odd fields for each frame, and stored into a frame buffer. A judgment is made as to whether the even field of the currently read-out frame is the same image as the even field of the immediately previous frame, and if the images are the same image data is read out without a judgment being made for 4 frames starting from the next frame and 1 frame is removed so as to form a frame from the odd field of the currently read-out frame and the even field of the next read-out frame, a non-interlaced display being made at an interval of 1/24 for 4 the next 4 four frames that include this frame.
    Type: Grant
    Filed: April 2, 2001
    Date of Patent: December 27, 2005
    Assignee: NEC Corporation
    Inventor: Kohji Numata
  • Publication number: 20050269292
    Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. A first upper electrode is disposed to have a ring shape and to face a target substrate placed within the process container. A second upper electrode is disposed radially inside the first upper electrode and electrically insulated therefrom. A first electric feeder is configured to supply a first RF output from a first RF power supply to the first upper electrode at a first power value. A second electric feeder branches from the first electric feeder and is configured to supply the first RF output from the first RF power supply to the second upper electrode at a second power value smaller than the first power value.
    Type: Application
    Filed: May 26, 2005
    Publication date: December 8, 2005
    Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
  • Publication number: 20050257743
    Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. An upper electrode is disposed to face a target substrate placed within the process container. An electric feeder includes a first cylindrical conductive member continuously connected to the upper electrode in an annular direction. The electric feeder is configured to supply a first RF output from a first RF power supply to the upper electrode.
    Type: Application
    Filed: May 26, 2005
    Publication date: November 24, 2005
    Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
  • Patent number: 6803968
    Abstract: An image synthesizing system is provided that can prevent image deterioration resulting from synthesis applied to a predictive image to be used for the next frame. The image synthesizing system decodes and synthesizes a main frame and a sub-image compressed in different modes. The image synthesizing system includes a main image frame buffer 122, an alpha blending section 133, and an image synthesis and display 140. The main image frame buffer 122 stores a main image to be referred to in the next frame decoding process. The alpha blending section 133 alpha-blends a main image from the main image frame buffer with a decoded sub-image to produce a translucent composite image. The image synthesis and display 140 superimposes the translucent composite image on the main image.
    Type: Grant
    Filed: April 11, 2000
    Date of Patent: October 12, 2004
    Assignee: NEC Corporation
    Inventor: Kohji Numata
  • Publication number: 20040133926
    Abstract: An additional information inserting apparatus automatically generates additional information to be added to an audio video signal, to be recorded or-transmitted, on the basis of original additional information inserted in an original audio video signal. Then, the apparatus automatically generates additional information in the audio video signal, for recording.
    Type: Application
    Filed: December 19, 2003
    Publication date: July 8, 2004
    Applicant: NEC CORPORATION
    Inventor: Kohji Numata
  • Patent number: 6697528
    Abstract: An image synthesis system which makes it possible to refer to a decompressed image that has been stored in an image-data buffer as an image for predicting a succeeding frame at the time of MPEG decoding combines main image data that has been compressed by the MPEG method and subordinate image data that has been compressed by a method different from the MPEG method.
    Type: Grant
    Filed: September 20, 2000
    Date of Patent: February 24, 2004
    Assignee: NEC Corporation
    Inventor: Kohji Numata
  • Patent number: 6417889
    Abstract: A picture size conversion method (and device) is provided to avoid deterioration of picture display quality such as a blur and distortion, especially with respect to motion pictures which are displayed in accordance with an interlaced display method. Herein, a size conversion table storing display flags is created in accordance with a reduction ratio, wherein each of the display flags represents a decision whether to allow display with respect to each of horizontal lines. At first, the method discriminates whether the reduction ratio (R) belongs to a first range (0<R<½) or a second range (½≦R<1), while the method also discriminates whether each of horizontal lines belongs to an even-numbered field or an odd-numbered field within one frame.
    Type: Grant
    Filed: December 2, 1998
    Date of Patent: July 9, 2002
    Assignee: NEC Corporation
    Inventor: Kohji Numata
  • Patent number: 6388676
    Abstract: An apparatus which converts R, G, B color signals into Y, Cr, Cb signals and reconverts them into R, G, B signals, compensates converted Y signals in order to confine each component of R, G, B color signals to be reconverted in a dynamic range allowable for them. It is not necessary to provide time consuming processes for checking and compensating reconverted R, G, B color signals and total time required for reconversion is reduced.
    Type: Grant
    Filed: April 25, 2000
    Date of Patent: May 14, 2002
    Assignee: NEC Corporation
    Inventor: Kohji Numata
  • Patent number: 6384865
    Abstract: In an image converting apparatus for converting image data of a field format in which a frame consists of a first field and a second field into image data of a resultant frame with a predetermined size. The apparatus includes an even-numbered field decoder for decoding each line of scanning line data of the even-numbered field, an odd-numbered field decoder for decoding scanning line data of the even-numbered field by thinning out every second line, and an original image frame buffer for combining the decoded image data with each other into one frame of image data and for storing the resultant data therein.
    Type: Grant
    Filed: May 28, 1999
    Date of Patent: May 7, 2002
    Assignee: NEC Corporation
    Inventor: Kohji Numata
  • Patent number: 6363176
    Abstract: The invention provides a picture data decompression apparatus which reduces the time required for decompression of picture data and operates at a high speed. The picture data decompression apparatus includes a module switching section for extracting code patterns in units of n bits the compressed picture data, m decoding and dequantization modules, and an inverse orthogonal transform section for inverse orthogonal transforming decoded and dequantized data from the m decoding and dequantization means. Each of the decoding and dequantization modules decodes and dequantizes, from a code pattern in units of n bits extracted by the module switching section, only a predetermined variable length code of a single unique code pattern of n bits from among m different predetermined patterns.
    Type: Grant
    Filed: December 7, 1998
    Date of Patent: March 26, 2002
    Assignee: NEC Corporation
    Inventor: Kohji Numata
  • Publication number: 20020034377
    Abstract: A moving image reproduction system and method is provided that monitors the display period of a display and smoothly reproduces moving images. A video decoder reads out compressed image data from a memory, encodes the compressed image data every one frame, and stores decoded image data into the frame buffer. An image storage buffer switch changes its mode every time image data for one frame is decoded and controls so as to always store a previously decoded image and a currently decoded image into a frame buffer memory. A display controller switches plural buffers to be displayed during the next vertical blanking period after reception of the display changeover specification, thus displaying image data on the display. A timing adjuster acquires a current scanning line from the display controller and adjusts the timing with which the display changeover specification is issued in accordance with the scanning line value.
    Type: Application
    Filed: September 19, 2001
    Publication date: March 21, 2002
    Applicant: NEC CORPORATION
    Inventor: Kohji Numata
  • Patent number: 6346971
    Abstract: A picture synthesizing system includes a main picture decoding section, sub-picture decoding section, color table conversion section, sub-picture data conversion section, and picture synthesizing section. The main picture decoding section decodes main picture data by a first picture compression scheme. The sub-picture decoding section outputs a color table and frame data by decoding sub-picture data by a second picture compression scheme. The color table conversion section converts the color table from the sub-picture decoding section on the basis of a display format in which a synthesized picture is displayed. The sub-picture data conversion section converts the frame data from the sub-picture decoding section.
    Type: Grant
    Filed: November 15, 1999
    Date of Patent: February 12, 2002
    Assignee: NEC Corporation
    Inventor: Kohji Numata
  • Publication number: 20010028790
    Abstract: Image data is sequentially read out in units of frames from a storage apparatus storing NTSC images, divided into even and odd fields for each frame, and stored into a frame buffer. A judgment is made as to whether the even field of the currently read-out frame is the same image as the even field of the immediately previous frame, and if the images are the same image data is read out without a judgment being made for 4 frames starting from the next frame and 1 frame is removed so as to form a frame from the odd field of the currently read-out frame and the even field of the next read-out frame, a non-interlaced display being made at an interval of {fraction (1/24)} for 4 the next 4 four frames that include this frame.
    Type: Application
    Filed: April 2, 2001
    Publication date: October 11, 2001
    Inventor: Kohji Numata
  • Patent number: 6097398
    Abstract: An apparatus which converts R, G, B color signals into Y, Cr, Cb signals and reconverts them into R, G, B signals, compensates converted Y signals in order to confine each component of R, G, B color signals to be reconverted in a dynamic range allowable for them.It is not necessary to provide time consuming processes for checking and compensating reconverted R, G, B color signals and total time required for reconversion is reduced.
    Type: Grant
    Filed: September 22, 1994
    Date of Patent: August 1, 2000
    Assignee: NEC Corporation
    Inventor: Kohji Numata