Patents by Inventor Kohji Numata
Kohji Numata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8512510Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.Type: GrantFiled: May 16, 2011Date of Patent: August 20, 2013Assignee: Tokyo Electron LimitedInventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
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Publication number: 20110214813Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.Type: ApplicationFiled: May 16, 2011Publication date: September 8, 2011Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
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Publication number: 20100043974Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.Type: ApplicationFiled: October 28, 2009Publication date: February 25, 2010Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
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Patent number: 7506610Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. An upper electrode is disposed to face a target substrate placed within the process container. An electric feeder includes a first cylindrical conductive member continuously connected to the upper electrode in an annular direction. The electric feeder is configured to supply a first RF output from a first RF power supply to the upper electrode.Type: GrantFiled: May 26, 2005Date of Patent: March 24, 2009Assignee: Tokyo Electron LimitedInventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
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Patent number: 7494561Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. A first upper electrode is disposed to have a ring shape and to face a target substrate placed within the process container. A second upper electrode is disposed radially inside the first upper electrode and electrically insulated therefrom. A first electric feeder is configured to supply a first RF output from a first RF power supply to the first upper electrode at a first power value. A second electric feeder branches from the first electric feeder and is configured to supply the first RF output from the first RF power supply to the second upper electrode at a second power value smaller than the first power value.Type: GrantFiled: May 26, 2005Date of Patent: February 24, 2009Assignee: Tokyo Electron LimitedInventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
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Publication number: 20060000803Abstract: A plasma processing method is arranged to supply a predetermined process gas into a plasma generation space in which a target substrate is placed, and turn the process gas into plasma. The substrate is subjected to a predetermined plasma process by this plasma. The spatial distribution of density of the plasma and the spatial distribution of density of radicals in the plasma are controlled independently of each other relative to the substrate by a facing portion opposite the substrate to form a predetermined process state over the entire target surface of the substrate.Type: ApplicationFiled: May 26, 2005Publication date: January 5, 2006Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
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Patent number: 6980733Abstract: Image data is sequentially read out in units of frames from a storage apparatus storing NTSC images, divided into even and odd fields for each frame, and stored into a frame buffer. A judgment is made as to whether the even field of the currently read-out frame is the same image as the even field of the immediately previous frame, and if the images are the same image data is read out without a judgment being made for 4 frames starting from the next frame and 1 frame is removed so as to form a frame from the odd field of the currently read-out frame and the even field of the next read-out frame, a non-interlaced display being made at an interval of 1/24 for 4 the next 4 four frames that include this frame.Type: GrantFiled: April 2, 2001Date of Patent: December 27, 2005Assignee: NEC CorporationInventor: Kohji Numata
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Publication number: 20050269292Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. A first upper electrode is disposed to have a ring shape and to face a target substrate placed within the process container. A second upper electrode is disposed radially inside the first upper electrode and electrically insulated therefrom. A first electric feeder is configured to supply a first RF output from a first RF power supply to the first upper electrode at a first power value. A second electric feeder branches from the first electric feeder and is configured to supply the first RF output from the first RF power supply to the second upper electrode at a second power value smaller than the first power value.Type: ApplicationFiled: May 26, 2005Publication date: December 8, 2005Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
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Publication number: 20050257743Abstract: A plasma processing apparatus includes a process container configured to have a vacuum atmosphere therein. An upper electrode is disposed to face a target substrate placed within the process container. An electric feeder includes a first cylindrical conductive member continuously connected to the upper electrode in an annular direction. The electric feeder is configured to supply a first RF output from a first RF power supply to the upper electrode.Type: ApplicationFiled: May 26, 2005Publication date: November 24, 2005Inventors: Akira Koshiishi, Jun Hirose, Masahiro Ogasawara, Taichi Hirano, Hiromitsu Sasaki, Tetsuo Yoshida, Michishige Saito, Hiroyuki Ishihara, Jun Ooyabu, Kohji Numata
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Patent number: 6803968Abstract: An image synthesizing system is provided that can prevent image deterioration resulting from synthesis applied to a predictive image to be used for the next frame. The image synthesizing system decodes and synthesizes a main frame and a sub-image compressed in different modes. The image synthesizing system includes a main image frame buffer 122, an alpha blending section 133, and an image synthesis and display 140. The main image frame buffer 122 stores a main image to be referred to in the next frame decoding process. The alpha blending section 133 alpha-blends a main image from the main image frame buffer with a decoded sub-image to produce a translucent composite image. The image synthesis and display 140 superimposes the translucent composite image on the main image.Type: GrantFiled: April 11, 2000Date of Patent: October 12, 2004Assignee: NEC CorporationInventor: Kohji Numata
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Publication number: 20040133926Abstract: An additional information inserting apparatus automatically generates additional information to be added to an audio video signal, to be recorded or-transmitted, on the basis of original additional information inserted in an original audio video signal. Then, the apparatus automatically generates additional information in the audio video signal, for recording.Type: ApplicationFiled: December 19, 2003Publication date: July 8, 2004Applicant: NEC CORPORATIONInventor: Kohji Numata
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Patent number: 6697528Abstract: An image synthesis system which makes it possible to refer to a decompressed image that has been stored in an image-data buffer as an image for predicting a succeeding frame at the time of MPEG decoding combines main image data that has been compressed by the MPEG method and subordinate image data that has been compressed by a method different from the MPEG method.Type: GrantFiled: September 20, 2000Date of Patent: February 24, 2004Assignee: NEC CorporationInventor: Kohji Numata
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Patent number: 6417889Abstract: A picture size conversion method (and device) is provided to avoid deterioration of picture display quality such as a blur and distortion, especially with respect to motion pictures which are displayed in accordance with an interlaced display method. Herein, a size conversion table storing display flags is created in accordance with a reduction ratio, wherein each of the display flags represents a decision whether to allow display with respect to each of horizontal lines. At first, the method discriminates whether the reduction ratio (R) belongs to a first range (0<R<½) or a second range (½≦R<1), while the method also discriminates whether each of horizontal lines belongs to an even-numbered field or an odd-numbered field within one frame.Type: GrantFiled: December 2, 1998Date of Patent: July 9, 2002Assignee: NEC CorporationInventor: Kohji Numata
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Patent number: 6388676Abstract: An apparatus which converts R, G, B color signals into Y, Cr, Cb signals and reconverts them into R, G, B signals, compensates converted Y signals in order to confine each component of R, G, B color signals to be reconverted in a dynamic range allowable for them. It is not necessary to provide time consuming processes for checking and compensating reconverted R, G, B color signals and total time required for reconversion is reduced.Type: GrantFiled: April 25, 2000Date of Patent: May 14, 2002Assignee: NEC CorporationInventor: Kohji Numata
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Patent number: 6384865Abstract: In an image converting apparatus for converting image data of a field format in which a frame consists of a first field and a second field into image data of a resultant frame with a predetermined size. The apparatus includes an even-numbered field decoder for decoding each line of scanning line data of the even-numbered field, an odd-numbered field decoder for decoding scanning line data of the even-numbered field by thinning out every second line, and an original image frame buffer for combining the decoded image data with each other into one frame of image data and for storing the resultant data therein.Type: GrantFiled: May 28, 1999Date of Patent: May 7, 2002Assignee: NEC CorporationInventor: Kohji Numata
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Patent number: 6363176Abstract: The invention provides a picture data decompression apparatus which reduces the time required for decompression of picture data and operates at a high speed. The picture data decompression apparatus includes a module switching section for extracting code patterns in units of n bits the compressed picture data, m decoding and dequantization modules, and an inverse orthogonal transform section for inverse orthogonal transforming decoded and dequantized data from the m decoding and dequantization means. Each of the decoding and dequantization modules decodes and dequantizes, from a code pattern in units of n bits extracted by the module switching section, only a predetermined variable length code of a single unique code pattern of n bits from among m different predetermined patterns.Type: GrantFiled: December 7, 1998Date of Patent: March 26, 2002Assignee: NEC CorporationInventor: Kohji Numata
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Publication number: 20020034377Abstract: A moving image reproduction system and method is provided that monitors the display period of a display and smoothly reproduces moving images. A video decoder reads out compressed image data from a memory, encodes the compressed image data every one frame, and stores decoded image data into the frame buffer. An image storage buffer switch changes its mode every time image data for one frame is decoded and controls so as to always store a previously decoded image and a currently decoded image into a frame buffer memory. A display controller switches plural buffers to be displayed during the next vertical blanking period after reception of the display changeover specification, thus displaying image data on the display. A timing adjuster acquires a current scanning line from the display controller and adjusts the timing with which the display changeover specification is issued in accordance with the scanning line value.Type: ApplicationFiled: September 19, 2001Publication date: March 21, 2002Applicant: NEC CORPORATIONInventor: Kohji Numata
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Patent number: 6346971Abstract: A picture synthesizing system includes a main picture decoding section, sub-picture decoding section, color table conversion section, sub-picture data conversion section, and picture synthesizing section. The main picture decoding section decodes main picture data by a first picture compression scheme. The sub-picture decoding section outputs a color table and frame data by decoding sub-picture data by a second picture compression scheme. The color table conversion section converts the color table from the sub-picture decoding section on the basis of a display format in which a synthesized picture is displayed. The sub-picture data conversion section converts the frame data from the sub-picture decoding section.Type: GrantFiled: November 15, 1999Date of Patent: February 12, 2002Assignee: NEC CorporationInventor: Kohji Numata
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Publication number: 20010028790Abstract: Image data is sequentially read out in units of frames from a storage apparatus storing NTSC images, divided into even and odd fields for each frame, and stored into a frame buffer. A judgment is made as to whether the even field of the currently read-out frame is the same image as the even field of the immediately previous frame, and if the images are the same image data is read out without a judgment being made for 4 frames starting from the next frame and 1 frame is removed so as to form a frame from the odd field of the currently read-out frame and the even field of the next read-out frame, a non-interlaced display being made at an interval of {fraction (1/24)} for 4 the next 4 four frames that include this frame.Type: ApplicationFiled: April 2, 2001Publication date: October 11, 2001Inventor: Kohji Numata
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Patent number: 6097398Abstract: An apparatus which converts R, G, B color signals into Y, Cr, Cb signals and reconverts them into R, G, B signals, compensates converted Y signals in order to confine each component of R, G, B color signals to be reconverted in a dynamic range allowable for them.It is not necessary to provide time consuming processes for checking and compensating reconverted R, G, B color signals and total time required for reconversion is reduced.Type: GrantFiled: September 22, 1994Date of Patent: August 1, 2000Assignee: NEC CorporationInventor: Kohji Numata