Patents by Inventor Kohki Itoyama

Kohki Itoyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing pad, manufacturing method thereof and polishing method
    Patent number: 8545291
    Abstract: A polishing pad capable of improving an affinity to polishing liquid and stabilizing polishing performance is provided. A polishing pad 10 is equipped with a urethane sheet 2. The urethane sheet 2 has a polishing surface P for polishing an object to be polished. The urethane sheet 2 is formed by a dry molding method and is formed by slicing a polyurethane foamed body which is obtained by reacting and curing mixed liquid in which an isocyanate-group containing compound, water, a foam control agent and a polyamine compound are mixed. Foams 3 are dispersed approximately uniformly inside the urethane sheet 2. Opened pores 4 which are opened parts of the foams 3 are formed at the polishing surface P. Inside the urethane sheet 2, the foams 3 formed adjacently to each other are communicated by communication holes 9, and the communication holes 9 are formed at a ratio of 800 holes/cm2 or more when observed from a side of the polishing surface P. Polishing liquid moves via the communication holes 9 and the foams 3.
    Type: Grant
    Filed: June 22, 2010
    Date of Patent: October 1, 2013
    Assignees: Fujibo Holdings Inc., Shin-Etsu Handotai Co., Ltd.
    Inventors: Kohki Itoyama, Daisuke Takahashi, Junichi Ueno, Syuichi Kobayashi
  • POLISHING PAD, MANUFACTURING METHOD THEREOF AND POLISHING METHOD
    Publication number: 20120100783
    Abstract: A polishing pad capable of improving an affinity to polishing liquid and stabilizing polishing performance is provided. A polishing pad 10 is equipped with a urethane sheet 2. The urethane sheet 2 has a polishing surface P for polishing an object to be polished. The urethane sheet 2 is formed by a dry molding method and is formed by slicing a polyurethane foamed body which is obtained by reacting and curing mixed liquid in which an isocyanate-group containing compound, water, a foam control agent and a polyamine compound are mixed. Foams 3 are dispersed approximately uniformly inside the urethane sheet 2. Opened pores 4 which are opened parts of the foams 3 are formed at the polishing surface P. Inside the urethane sheet 2, the foams 3 formed adjacently to each other are communicated by communication holes 9, and the communication holes 9 are formed at a ratio of 800 holes/cm2 or more when observed from a side of the polishing surface P. Polishing liquid moves via the communication holes 9 and the foams 3.
    Type: Application
    Filed: June 22, 2010
    Publication date: April 26, 2012
    Applicants: Shin-Etsu Handotai Co., Ltd., Fujibo Holdings Inc.
    Inventors: Kohki Itoyama, Daisuke Takahashi, Junichi Ueno, Syuichi Kobayashi