Abstract: A propagation delay time measuring method of measuring a propagation delay time of a test signal propagating along one of a first signal path serially connecting to the first signal path through which a semiconductor testing apparatus includes a driver and a comparator electrically connected to a device under test.

Abstract: A propagation delay time measuring method of measuring a propagation delay time of a test signal propagating along one of a first signal path and a second signal path serially connecting to the first signal path through which a semiconductor testing apparatus includes a driver and a comparator electrically connected to a device under test, the method includes: a first connecting step of connecting an end of the first path to the driver and the comparator; a first output step of outputting a test signal from the driver to the first path; a first reflect signal receiving step of receiving a test signal at the comparator, defined as a first reflect signal, reflected at another end of the first path; a first timing detecting step of detecting a timing, defined as a first timing; a second connecting step of connecting an end of the second path to another end of the first path; a second output step of outputting the test signal from the driver to the second path; a second reflect signal receiving step of receiving

Abstract: Signal propagation times TA1, TA2, TA3 . . . of respective pin selection paths of a pin selection device that selectively connects output pins of a semiconductor device testing apparatus to a timing measurement device are measured in advance, and the measured values are memorized. At the time of timing calibration, calibration pulses are transmitted to a timing calibrators via respective test pattern signal transmission paths and respective pin selection paths to measure delay time values T1, T2, T3, - - - of respective channels. The known values TA1, TA2, TA3, - - - are subtracted from the measured values T1, T2, T3, - - - , respectively. A timing calibration is performed by adjusting delay time values of the timing calibrators of the respective test pattern signal transmission paths such that each of the respective differences between the TA1, TA2, TA3, - - - and the measured values T1, T2, T3 - - - become a constant value TC.

Abstract: Signal propagation times TA1, TA2, TA3 . . . of respective pin selection paths of a pin selection device that selectively connects output pins of a semiconductor device testing apparatus to a timing measurement device are measured in advance, and the measured values are memorized. At the time of timing calibration, calibration pulses are transmitted to a timing calibrators via respective test pattern signal transmission paths and respective pin selection paths to measure delay time values T1, T2, T3, - - - of respective channels. The known values TA1, TA2, TA3, - - - are subtracted from the measured values T1, T2, T3, - - - , respectively. A timing calibration is performed by adjusting delay time values of the timing calibrators of the respective test pattern signal transmission paths such that each of the respective differences between the TA1, TA2, TA3, - - - and the measured values T1, T2, T3, - - - become a constant value TC.

Abstract: Signal propagation times TA1, TA2, TA3 . . . of respective pin selection paths of a pin selection device that selectively connects output pins of a semiconductor device testing apparatus to a timing measurement device are measured in advance, and the measured values are memorized. At the time of timing calibration, calibration pulses are transmitted to a timing calibrators via respective test pattern signal transmission paths and respective pin selection paths to measure delay time values T1, T2, T3, - - - of respective channels. The known values TA1, TA2, TA3, - - - are subtracted from the measured values T1, T2, T3, - - - , respectively. A timing calibration is performed by adjusting delay time values of the timing calibrators of the respective test pattern signal transmission paths such that each of the respective differences between the TA1, TA2, - - - and the measured values T1, T2, T3, - - - become a constant value TC.