Abstract: A communication system includes a first device and a plurality of second devices, and each of the second devices includes a pairing processing unit, a device information storage unit, and a data control unit. The pairing processing unit performs a pairing process including an authentication process with the first device by using device-specific information of the second device. The device information storage unit stores device information including pairing authentication information. The pairing processing unit performs, by using device-specific information of another second device the pairing process between the first device and the another second device, and stores the pairing authentication information in the device information storage unit. The data control unit transmits the pairing authentication information to the another second device. The data control unit of the another second device stores the received pairing authentication information in the device information storage unit.

Abstract: A display includes: a monitor that includes an input/output region and performs haptic feedback when detecting an input from an operator while an image is displayed, the input/output region being obtained by superimposing a first region for displaying an image, a second region including a plurality of input detection regions each for detecting an input from an operator, and a third region including a plurality of haptic feedback regions each for performing haptic feedback to the operator; and a data processor that determines a haptic output value in each of the plurality of haptic feedback regions on the basis of image data of an image being displayed on the first region and a detection result of an input from an operator in each of the plurality of input detection regions.

Abstract: A communication system includes a first device and a plurality of second devices, and each of the second devices includes a pairing processing unit, a device information storage unit, and a data control unit. The pairing processing unit performs a pairing process including an authentication process with the first device by using device-specific information of the second device. The device information storage unit stores device information including pairing authentication information. The pairing processing unit performs, by using device-specific information of another second device the pairing process between the first device and the another second device, and stores the pairing authentication information in the device information storage unit. The data control unit transmits the pairing authentication information to the another second device. The data control unit of the another second device stores the received pairing authentication information in the device information storage unit.

Abstract: A display includes: a monitor that includes an input/output region and performs haptic feedback when detecting an input from an operator while an image is displayed, the input/output region being obtained by superimposing a first region for displaying an image, a second region including a plurality of input detection regions each for detecting an input from an operator, and a third region including a plurality of haptic feedback regions each for performing haptic feedback to the operator; and a data processor that determines a haptic output value in each of the plurality of haptic feedback regions on the basis of image data of an image being displayed on the first region and a detection result of an input from an operator in each of the plurality of input detection regions.

Abstract: A content distribution system includes: external display terminals; displays; an integrated monitoring device that generates content to be provided to an external display terminal among the plurality of external display terminals when the external display terminal is connected to a display among the displays; and an AP that transmits the content to the external display terminal through wireless communication. When the external display terminal is brought toward the display to a point at a specific distance from the display, the external display terminal transmits terminal attribute information to the display through wireless communication, the display transmits device attribute information and the terminal attribute information, to the integrated monitoring device, the integrated monitoring device generates the content corresponding to the device attribute information and the terminal attribute information, and the external display terminal displays the content.

Abstract: A display includes a calculation unit to calculate, when first and second events that occur in an external device are transmitted from the external device, operating time from when the first event is ended by operation for the first event to when the second event is ended by operation for the second event; a storage unit to store operating procedures that are histories of the operation for the second event and the associated operating times; and a display unit to display any of the operating procedures in the storage unit, according to instruction from the calculation unit. When the second event is newly transmitted after the calculation of the operating time is completed, the calculation unit selects an operating procedure used for operation guidance from among the operating procedures based on the operating times and causes the display unit to display the selected operating procedure, thereby executing the operation guidance.

Abstract: A display includes a calculation unit to calculate, when first and second events that occur in an external device are transmitted from the external device, operating time from when the first event is ended by operation for the first event to when the second event is ended by operation for the second event; a storage unit to store operating procedures that are histories of the operation for the second event and the associated operating times; and a display unit to display any of the operating procedures in the storage unit, according to instruction from the calculation unit. When the second event is newly transmitted after the calculation of the operating time is completed, the calculation unit selects an operating procedure used for operation guidance from among the operating procedures based on the operating times and causes the display unit to display the selected operating procedure, thereby executing the operation guidance.

Abstract: A vertical plasma processing apparatus for a semiconductor process includes a process container having a process field configured to accommodate a plurality of target substrates at intervals in a vertical direction, and a marginal space out of the process field. In processing the target substrates, a control section simultaneously performs supply of a process gas to the process field from a process gas supply circuit and supply of a blocking gas to the marginal space from a blocking gas supply circuit to inhibit the process gas from flowing into the marginal space.

Abstract: A vertical plasma processing apparatus for a semiconductor process includes a process container having a process field configured to accommodate a plurality of target substrates at intervals in a vertical direction, and a marginal space out of the process field. In processing the target substrates, a control section simultaneously performs supply of a process gas to the process field from a process gas supply circuit and supply of a blocking gas to the marginal space from a blocking gas supply circuit to inhibit the process gas from flowing into the marginal space.

Abstract: A method of manufacturing a silicon nitride film that forms a silicon nitride film on a surface of a substrate comprises sequentially repeating first through third steps. The first step includes feeding a first gas containing silicon and nitrogen to the surface of the substrate. The second step includes feeding a second gas containing nitrogen to the surface of the substrate. The third step includes feeding a third gas containing hydrogen to the surface of the substrate.

Abstract: A vertical plasma processing apparatus for a semiconductor process includes a process container having a process field configured to accommodate a plurality of target substrates at intervals in a vertical direction, and a marginal space out of the process field. In processing the target substrates, a control section simultaneously performs supply of a process gas to the process field from a process gas supply circuit and supply of a blocking gas to the marginal space from a blocking gas supply circuit to inhibit the process gas from flowing into the marginal space.

Abstract: A CVD method is to form a silicon nitride film on a target substrate (W). The method includes heating the substrate (W) accommodated in a process container (8), at a process temperature, and supplying a process gas including hexaethylamino-disilane gas and ammonia gas onto the substrate (W) heated at the process temperature, thereby depositing a silicon nitride film on the substrate (W).

Abstract: A method of manufacturing a silicon nitride film that forms a silicon nitride film on a surface of a substrate comprises sequentially repeating first through third steps. The first step includes feeding a first gas containing silicon and nitrogen to the surface of the substrate. The second step includes feeding a second gas containing nitrogen to the surface of the substrate. The third step includes feeding a third gas containing hydrogen to the surface of the substrate.

Abstract: A CVD method is to form a silicon nitride film on a target substrate (W). The method includes heating the substrate (W) accommodated in a process container (8), at a process temperature, and supplying a process gas including hexaethylamino-disilane gas and ammonia gas onto the substrate (W) heated at the process temperature, thereby depositing a silicon nitride film on the substrate (W).