Patents by Inventor Koichiro Shibayama

Koichiro Shibayama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20120024317
    Abstract: According to one embodiment, a cleaning apparatus includes a removing unit whose tip portion is harder than a constituent material of a surface layer on a back surface side of a semiconductor wafer (wafer) and which is configured to clean a back surface of the wafer held by a holding unit and a moving mechanism that relatively moves the removing unit and the wafer in a direction parallel to the wafer back surface. The removing unit grinds and removes a protrusion that is formed of a material same as the surface layer of the wafer back surface, by the moving mechanism relatively moving the removing unit and the wafer and causing the tip portion of the removing unit to come into contact with the protrusion.
    Type: Application
    Filed: July 27, 2011
    Publication date: February 2, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Yoshinori KITAMURA, Yasuhito Yoshimizu, Koichiro Shibayama
  • Patent number: 7526859
    Abstract: The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.
    Type: Grant
    Filed: October 13, 2006
    Date of Patent: May 5, 2009
    Assignee: Dai Nippon Printing Co., Ltd.
    Inventors: Kenji Sasaoka, Fumitoshi Ikegaya, Takahiro Mori, Tomohisa Motomura, Yoshizumi Sato, Koichiro Shibayama
  • Publication number: 20070044294
    Abstract: The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.
    Type: Application
    Filed: October 13, 2006
    Publication date: March 1, 2007
    Applicant: Dai Nippon Printing Co., Ltd.
    Inventors: Kenji Sasaoka, Fumitoshi Ikegaya, Takahiro Mori, Tomohisa Motomura, Yoshizumi Sato, Koichiro Shibayama
  • Patent number: 7134193
    Abstract: The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.
    Type: Grant
    Filed: December 29, 2004
    Date of Patent: November 14, 2006
    Assignee: Dai Nippon Printing Co., Ltd.
    Inventors: Kenji Sasaoka, Fumitoshi Ikegaya, Takahiro Mori, Tomohisa Motomura, Yoshizumi Sato, Koichiro Shibayama
  • Publication number: 20050115068
    Abstract: The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.
    Type: Application
    Filed: December 29, 2004
    Publication date: June 2, 2005
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Kenji Sasaoka, Fumitoshi Ikegaya, Takahiro Mori, Tomohisa Motomura, Yoshizumi Sato, Koichiro Shibayama
  • Patent number: 6865801
    Abstract: The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.
    Type: Grant
    Filed: July 5, 2001
    Date of Patent: March 15, 2005
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kenji Sasaoka, Fumitoshi Ikegaya, Takahiro Mori, Tomohisa Motomura, Yoshizumi Sato, Koichiro Shibayama
  • Patent number: 6507995
    Abstract: The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.
    Type: Grant
    Filed: June 9, 1998
    Date of Patent: January 21, 2003
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kenji Sasaoka, Fumitoshi Ikegaya, Takahiro Mori, Tomohisa Motomura, Yoshizumi Sato, Koichiro Shibayama
  • Publication number: 20010039720
    Abstract: The apparatus for manufacturing a wiring substitute comprises a transporter having a circuit where a sheet is circulated; a screen printer for printing a conductive paste on the sheet; a counter for counting the number of times to print the conductive paste on the sheet; and a distributor for ejecting the sheet from the circuit when the counted number reaches a preset number. Thus, the conductive pillars having uniform properties can be formed automatically on the conductive foil with high productivity.
    Type: Application
    Filed: July 5, 2001
    Publication date: November 15, 2001
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Kenji Sasaoka, Fumitoshi Ikegaya, Takahiro Mori, Tomohisa Motomura, Yoshizumi Sato, Koichiro Shibayama