Abstract: A substrate misalignment detection method includes: acquiring first image information or first position information of a substrate held to a stage by suction at a first height position; delivering the substrate from the stage to a holder in a state in which the suction of the substrate is released and causing the holder to hold the substrate at the first height position; acquiring second image information or second position information of the substrate held at the first height position; and detecting misalignment of the substrate by comparing the first image information with the second image information or by comparing the first position information with the second position information.

Abstract: A substrate misalignment detection method includes: acquiring first image information or first position information of a substrate held to a stage by suction at a first height position; delivering the substrate from the stage to a holder in a state in which the suction of the substrate is released and causing the holder to hold the substrate at the first height position; acquiring second image information or second position information of the substrate held at the first height position; and detecting misalignment of the substrate by comparing the first image information with the second image information or by comparing the first position information with the second position information.

Abstract: There is provided a calculating system that can calculate only a gradation image of only a measurement target in monitoring large-scale facility using a transmission imaging on the basis of a cosmic ray. In addition to a gradation image on the basis of a flight track of the cosmic ray, a gradation image of the density length on the basis of structure information of a structural object which is not a measurement target is made and used to correct the gradation image on the basis of the flight track of the cosmic ray.

Abstract: On the basis of state change information acquired by one of sensor nodes forming a sensor network, an instruction indicative of emitting a signal is issued to another node to acquire a photographed image from a camera. An image processing device identifies the ID and actual position of the node by issuing the signal issuance instruction to the node and detecting a signal obtained from the node from the photographed image. On the basis of personal information stored in a database, the image processing device detects a not-allowed action.

Abstract: On the basis of state change information acquired by one of sensor nodes forming a sensor network, an instruction indicative of emitting a signal is issued to another node to acquire a photographed image from a camera. An image processing device identifies the ID and actual position of the node by issuing the signal issuance instruction to the node and detecting a signal obtained from the node from the photographed image. On the basis of personal information stored in a database, the image processing device detects a not-allowed action.

Abstract: An incoming/outgoing goods management system showing the stock status of goods and the details of the incoming/outgoing goods work without delay. The gross weight of goods, and an unopened goods package and open goods package which store the goods measured by a weight sensor, and an ID tag attached to a package and ID tag carried by a worker read by an ID reader, are combined with various information stored by a storage part 145, so the incoming/outgoing goods work situation or inventory status can be appreciated promptly, a detailed check of compliance between plans and achievement can be performed, and required working command and warnings can be given to workers and managers so as to streamline the work.

Abstract: The present invention provides a solution business for serving high speed and diversified analysis work/result and apparatus maintenance, and provides a function to control the apparatus of a customer and analysis organization with a common command through a network. The analysis organization provides the work involving high level operation and apparatus maintenance, and the interpretation and analysis of the acquired data. The customer participates to the analysis work on line through the video conference. The charge system corresponding to the analysis apparatus and operation content is set in a host computer of the network, the charge is presented to the customer on line as the analysis work proceeds, and the final cost is collected through a bank. Furthermore, the host computer is provided with a library function that stores the past data and literatures for viewing.