Abstract: Provided is a charged particle beam processing apparatus capable of improving yields by suppressing the spread of metal pollution to a semiconductor manufacturing process to a minimum. The charged particle beam processing apparatus includes an ion beam column 1 that is connected to a vacuum vessel 10 and irradiates a sample 35 with an ion beam 11 of nonmetal ion species, a microsampling unit 3 having a probe 16 that extracts a microsample 43 cut out from a sample 35 by the ion beam 11, a gas gun 2 that discharges a gas for bonding the microsample 43 and the probe 16, a pollution measuring beam column 6A that is connected to the same vacuum vessel 10 to which the ion beam column 1 is connected and irradiates an ion beam irradiation traces by the ion beam column 1 with a pollution measuring beam 13, and a detector 7 that detects characteristic X-rays emitted from the ion beam irradiation traces by the ion beam column 1 upon irradiation with the pollution measuring beam 13.

Abstract: An ion beam machining and observation method relevant to a technique of cross sectional observation of an electronic component, through which a sample is machined by using an ion beam and a charged particle beam processor capable of reducing the time it takes to fill up a processed hole with a high degree of flatness at the filled area. The observation device is capable of switching the kind of gas ion beam used for machining a sample with the kind of a gas ion beam used for observing the sample. To implement the switch between the kind of a gas ion beam used for sample machining and the kind of a gas ion beam used for sample observation, at least two gas introduction systems are used, each system having a gas cylinder a gas tube, a gas volume control valve, and a stop valve.

Abstract: The apparatus for ion beam fabrication, which has been able to detect any anomalous condition of ion beams only by means of the current irradiated on the specimen, could not compensate the failure by investigating the cause and could not realize stable processing. To solve the problem described above, the present invention includes the first and second blankers and Faraday cups switches ON and OFF the first and second blankers and monitors beam current at two positions above and below the projection mask. By adopting this configuration, it will be possible to acquire the information on failure in ion beam, sort out the cause of the failure and to compensate the failure while limiting damages to the projection mask. As a result, it will be possible to realize stable processing by means of ion beam, and to use the ion beam fabricating device on a stable basis.

Abstract: In the vehicle lighting control apparatus and method, it is determined that the user's steering wheel is returned from a steering angle existing in a saturated steering angle region toward a neutral steering angle region at a given speed or more. If such a steering condition is found, a swivel angle is calculated based on a swivel-angle control characteristic showing a monotonic decrease in the swivel angle when the steering angle decreases from the steering angle existing in the saturated steering angle range to a third preset angle. The third preset angle is an angle from which the swivel angle decreasing from the steering angle existing in the saturated steering range becomes zero. This calculated swivel angle is used to control the swivel angle of light irradiated from on-vehicle headlights.

Abstract: An apparatus controls a swivel angle of headlight mounted on a vehicle, wherein the swivel angle of the lights is changeable in a lateral direction of the vehicle. In the apparatus, road curvature information is acquired on a curvature of a road in front of a vehicle and a driving mechanism which rotationally changes the swivel angle of the headlights is controlled based on the road curvature information. Further, it is judged whether or not an oncoming vehicle is present. The swivel angle is limited within a predetermined limit angle range which prevents a driver of the oncoming vehicle from being dazzled, in a case where it is judged that the oncoming vehicle is present on a road lane to which the headlights are swiveled.

Abstract: An apparatus controls a swivel angle of on-vehicle headlights, the swivel angle of the lights being changeable in a lateral direction of the vehicle. A target swivel angle of the headlights is determined based on, for example, load map data of the road ahead the vehicle, and a control start point is determined based on the current position information and the road map data. The swivel angle is controlled to the target swivel angle in response to a state where the current position of the vehicle has reached the control start point. Running road shape-related information and a curvature direction of the road ahead are acquired. A control of the swivel angle toward the target swivel angle is prohibited when a direction of the target swivel angle determined is inconsistent with the curvature direction of the road, even in a case where the vehicle has reached the control start point.

Abstract: The present invention provides an ion beam processing technology for improving the precision in processing a section of a sample using an ion beam without making a processing time longer than a conventionally required processing time, and for shortening the time required for separating a micro test piece without breaking the sample or the time required for making preparations for the separation. An ion beam processing apparatus is structured so that an axis along which an ion beam is drawn out of an ion source and an ion beam irradiation axis along which the ion beam is irradiated to a sample mounted on a first sample stage will meet at an angle. Furthermore, the ion beam processing apparatus has a tilting ability to vary an angle of irradiation, at which the ion beam is irradiated to the sample, by rotating a second sample stage, on which a test piece extracted from the sample by performing ion beam processing is mounted, about the tilting axis of the second sample stage.

Abstract: A charged particle beam system, a sample processing method, and a semiconductor inspection system enable an accurate detection of a particle in a film without causing LMIS contamination and allow observation with an electron microscope quickly. A particle 65 causing a defect in a film 66 that has been detected with a separate optical inspection system is detected with an optical microscope 43 based on position information acquired by the separate optical inspection system. A sample 31 is processed with a nonmetal ion beam 22 so as to allow observation of the particle 65 with an electron microscope image or an ion microscope image, or ultimate analysis of the particle 65 with an EDX.

Abstract: Provided is a charged particle beam processing apparatus capable of improving yields by suppressing the spread of metal pollution to a semiconductor manufacturing process to a minimum. The charged particle beam processing apparatus includes an ion beam column 1 that is connected to a vacuum vessel 10 and irradiates a sample 35 with an ion beam 11 of nonmetal ion species, a microsampling unit 3 having a probe 16 that extracts a microsample 43 cut out from a sample 35 by the ion beam 11, a gas gun 2 that discharges a gas for bonding the microsample 43 and the probe 16, a pollution measuring beam column 6A that is connected to the same vacuum vessel 10 to which the ion beam column 1 is connected and irradiates an ion beam irradiation traces by the ion beam column 1 with a pollution measuring beam 13, and a detector 7 that detects characteristic X-rays emitted from the ion beam irradiation traces by the ion beam column 1 upon irradiation with the pollution measuring beam 13.

Abstract: Provided is a technique for accurately taking out a defect detected by an electron beam, and for analyzing the defect. In this technique, a defective portion in a wafer is detected by the irradiation of the electron beam. A mark made of a deposition layer is formed by irradiating the electron beam onto the defective portion while supplying a deposition gas thereto. On the basis of this mark, the defective portion is machined into a sample piece by using a projection ion beam generated from a gas ion source, and thereby the defective portion is taken out.

Abstract: A technique is provided which can precisely form a deposition pile in a hole bored in the surface of a specimen. In ion beam apparatus and analysis method, the specimen surface is bored or a deposition pile is formed in the hole bored in the specimen surface. A measuring instrument is provided for measuring a height of the hole bored in the specimen surface or a height of the deposition pile formed in the hole. During fabrication of boring the hole in the specimen surface or fabrication of filling the hole bored in the specimen surface, an image of an area encompassing the hole and the depth of the hole or the height of the deposition pile are displayed.

Abstract: An apparatus for adjusting a direction of a light axis of a swingable auxiliary headlight of a vehicle includes a steered angle sensor detecting a steered angle of a steering wheel of a vehicle, a vehicle speed sensor detecting a vehicle speed of the vehicle, a turning radius calculating device calculating a turning radius of the vehicle on the basis of the detected steered angle and the detected vehicle speed, and a control unit performing a swivel control by which the directions of the light axes of auxiliary headlights of the vehicle are adjusted to target directions determined depending on the detected steered angle and the detected vehicle speed. The control unit is configured to control the auxiliary headlights to be in an off state while the calculated turning radius shows a value equal to or larger than a predetermined threshold.

Abstract: The apparatus for automatically adjusting a direction of a light axis of a vehicle headlight of the invention has a configuration in which the swivel control unit determines that the vehicle is making a left or right turn and halts the swivel control on the light axis of a vehicle headlight, if the vehicle speed detected by the vehicle speed sensor is equal to or lower than a predetermined threshold speed and at least one of the conditions that the turn indication signal is in the on state, and that the steering angle is outside a predetermined angular range is satisfied. The swivel control unit resumes the swivel control when the turn indication signal is changed into the off state.

Abstract: An optical axis controller for a headlight of a vehicle includes a steering angle detector for detecting a steering angle of a steering wheel, a speed detector for detecting a speed of the vehicle, a navigation information reader for reading navigation information and an optical axis control device for controlling a direction of an optical axis of the headlight based on the steering angle, the speed and the navigation information. The direction of the optical axis of the headlight is determined based either on the speed and the navigation information or on the steering angle and the speed, and the determined direction of the optical axis is adapted with a controlled responsiveness.

Abstract: A steering angle detected by a steering angle sensor is filtered to be used for changing a responsiveness of controlling an axis orientation of headlights of a vehicle. Based on the filtered steering angle, the axis orientations of the headlights are thereby controlled for being laterally swiveled. This leads to relieving a driver from being bothered by a feeling of strangeness irrespective of a state where the vehicle is rectilinearly traveling or turning around a curve, resulting in providing preferable swivel control meeting driver's sensibility.

Abstract: An apparatus for adjusting a direction of a light axis of a swingable auxiliary headlight of a vehicle includes a steered angle sensor detecting a steered angle of a steering wheel of a vehicle, a vehicle speed sensor detecting a vehicle speed of the vehicle, a turning radius calculating device calculating a turning radius of the vehicle on the basis of the detected steered angle and the detected vehicle speed, and a control unit performing a swivel control by which the directions of the light axes of auxiliary headlights of the vehicle are adjusted to target directions determined depending on the detected steered angle and the detected vehicle speed. The control unit is configured to control the auxiliary headlights to be in an off state while the calculated turning radius shows a value equal to or larger than a predetermined threshold.

Abstract: The apparatus for automatically adjusting a direction of a light axis of a vehicle headlight of the invention has a configuration in which the swivel control unit determines that the vehicle is making a left or right turn and halts the swivel control on the light axis of a vehicle headlight, if the vehicle speed detected by the vehicle speed sensor is equal to or lower than a predetermined threshold speed and at least one of the conditions that the turn indication signal is in the on state, and that the steering angle is outside a predetermined angular range is satisfied. The swivel control unit resumes the swivel control when the turn indication signal is changed into the off state.

Abstract: In an automatic optical axis direction adjusting device for a vehicle headlight, a control characteristic is switched according to a road condition, a designation by a user or the like. Therefore, the optical axis direction of the vehicle headlight can be adjusted to suit a vehicle driving condition, a driver's preference or the like without causing a driver to feel uncomfortableness. Furthermore, the adjustment of the optical axis direction can be stopped or restricted according to the switched control characteristic. Therefore, unnecessary operation of a driving system such as an actuator can be avoided to increase durability.

Abstract: A steering angle detected by a steering angle sensor is filtered to be used for changing a responsiveness of controlling an axis orientation of headlights of a vehicle. Based on the filtered steering angle, the axis orientations of the headlights are thereby controlled for being laterally swiveled. This leads to relieving a driver from being bothered by a feeling of strangeness irrespective of a state where the vehicle is rectilinearly traveling or turning around a curve, resulting in providing preferable swivel control meeting driver's sensibility.

Abstract: According to the present invention, a signal transmission system is arranged in a region surrounded by a gas control means and a plurality of blocks whereby a region between elements constituting a gas supply flow path can be utilized for the region of the signal transmission system thereby to make the occupying space small and miniaturize the apparatus.