Patents by Inventor Koji Kawabata

Koji Kawabata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING DEVICE
    Publication number: 20240162075
    Abstract: The present disclosure provides a substrate support. The substrate support comprises: a base; a first dielectric portion, disposed on the base, having a substrate support portion on which a substrate is mounted; and a second dielectric portion, disposed around the first dielectric portion, having an edge ring support portion on which an edge ring is mounted, wherein at least one of the first dielectric portion and the second dielectric portion includes a sprayed layer formed of an insulating material.
    Type: Application
    Filed: January 26, 2024
    Publication date: May 16, 2024
    Applicant: Tokyo Electron Limited
    Inventors: Akira NAGAYAMA, Atsushi KAWABATA, Masato TAKAYAMA, Koji KAWANISHI, Takeshi AKAO
  • Shock isolation system with write inhibit
    Patent number: 5721457
    Abstract: In a computer apparatus including an enclosure and a direct access storage device mounted within the enclosure, a mounting apparatus for the direct access storage device including: a plurality of a relatively rigid shock isolators and at least one stress sensor mounted in series with are of said shock isolators and disposed between the enclosure and the direct access storage device. The enclosure may include a user frame and the mounting apparatus may be disposed between the direct access storage device and the frame. There may be one stress sensor for each of the shock isolators. The shock isolators may be coupled to the direct access storage device. Each stress sensor may include a piezoelectric element. Preferably the shock isolators are rigid enough so that the resonant frequency of said mounting apparatus is at least 800 Hz, but can be 800 Hz or higher.
    Type: Grant
    Filed: April 28, 1995
    Date of Patent: February 24, 1998
    Assignee: International Business Machines Corporation
    Inventors: Muthuthamby Sri-Jayantha, Vijayeshwar Khanna, Arun Sharma, Koji Kawabata, Jagdeep Tahliani
  • 4,4'-bis(phthalimido)diphenyl sulfone compounds, processes for their production and flame retardant polymer compositions containing them
    Patent number: 4940802
    Abstract: A 4,4'-bis(phthalimido)diphenyl sulfone compound having the formula: ##STR1## wherein X is a halogen atom, k=0 to 4, l=0 to 4, m=0 to 4 and n=0 to 4, provided k+l+m+n>1.
    Type: Grant
    Filed: December 8, 1988
    Date of Patent: July 10, 1990
    Assignee: Tosoh Corporation
    Inventors: Takao Matsuba, Masashige Kubo, Takumi Kagawa, Kiyotaka Oyama, Koji Kawabata
  • Process for producing brominated acenaphthylene and its condensates
    Patent number: 4760211
    Abstract: A process for recovering brominated acenaphthylene and its condensate in the form of powder, comprising dropping a solution of brominated acenaphthylene and its condensate produced from acenaphthene by reactions of bromination, condensation and dehydrobromination into hot water containing a carboxylic acid ester of polyoxyalkylene sorbitan, while the solvent is being distilled off, to recover the brominated acenaphthylene and its condensate in the form of powder dispersed in water.
    Type: Grant
    Filed: September 18, 1986
    Date of Patent: July 26, 1988
    Assignee: Toyo Soda Manufacturing Co., Ltd.
    Inventors: Masahige Kubo, Koji Kawabata, Yukihiro Tsutsumi