Abstract: A coordinate measuring machine includes: a table and a column which are configured to relatively move in a predetermined moving direction; a guide surface formed on the table and having a guide region and a drive region extending in the moving direction in parallel to each other; at least one air pad formed to the column and facing the guide region; and a drive roller formed to the column and rolling on the drive region.

Abstract: A translation movement device includes a guide, a long slider guided by the guide, and a belt driver displacing the slider; and the belt driver includes an open belt arranged parallel to the slider, a drive pulley for the open belt, and a tension bar arranged parallel to the open belt; and the tension bar is connected to the long slider at a middle position between two belt holders that hold respective end portions of the open belt.

Abstract: A Coordinate measuring apparatus (100) includes a probe (102) configured to detect a workpiece and a movement mechanism (110) configured to support the probe (102) and enable the probe (102) to move in mutually-orthogonal X, Y, and Z directions. The movement mechanism (110) includes a Z-axis drive portion (141) and a spindle (162) configured to enable the Z-axis drive portion (141) to move relative to the Z direction. The Z-axis drive portion (141) includes a rotational drive mechanism (142) including a rotational drive source (148) and a drive pulley (150) to which the rotational drive source (148) provides rotation, and an open belt (164) fixed to the spindle 162 at both ends of the open belt (164) in the relative movement direction (Z direction) of the Z-axis drive portion (141) and configured to engage with an output shaft (154) of the drive pulley (150).

Abstract: A translation movement device includes a guide, a long slider guided by the guide, and a belt driver displacing the slider; and the belt driver includes an open belt arranged parallel to the slider, a drive pulley for the open belt, and a tension bar arranged parallel to the open belt; and the tension bar is connected to the long slider at a middle position between two belt holders that hold respective end portions of the open belt.

Abstract: A coordinate measuring machine includes: a table and a column which are configured to relatively move in a predetermined moving direction; a guide surface formed on the table and having a guide region and a drive region extending in the moving direction in parallel to each other; at least one air pad formed to the column and facing the guide region; and a drive roller formed to the column and rolling on the drive region.

Abstract: A coordinate measuring apparatus includes a base on which an object to be measured is mounted, a movable X-axis beam, a Y-axis column with a hollow part that is provided on the base and supports the X-axis beam, a control unit that is provided under the base and controls the movement of the X-axis beam, and a cable that is wired from the X-axis beam to the control unit through the hollow part of the Y-axis column.

Abstract: A Coordinate measuring apparatus (100) includes a probe (102) configured to detect a workpiece and a movement mechanism (110) configured to support the probe (102) and enable the probe (102) to move in mutually-orthogonal X, Y, and Z directions. The movement mechanism (110) includes a Z-axis drive portion (141) and a spindle (162) configured to enable the Z-axis drive portion (141) to move relative to the Z direction. The Z-axis drive portion (141) includes a rotational drive mechanism (142) including a rotational drive source (148) and a drive pulley (150) to which the rotational drive source (148) provides rotation, and an open belt (164) fixed to the spindle 162 at both ends of the open belt (164) in the relative movement direction (Z direction) of the Z-axis drive portion (141) and configured to engage with an output shaft (154) of the drive pulley (150).

Abstract: A coordinate measuring apparatus includes a base on which an object to be measured is mounted, a movable X-axis beam, a Y-axis column with a hollow part that is provided on the base and supports the X-axis beam, a control unit that is provided under the base and controls the movement of the X-axis beam, and a cable that is wired from the X-axis beam to the control unit through the hollow part of the Y-axis column.

Abstract: A slider device includes a base (200), a running head (300) slidably provided on the base (200), a main guide mechanism (410) for guiding in a first direction in which the running head (300) runs, and sub-guide mechanism (450) allowing displacement to a second direction different from the first direction. The main guide mechanism (410) includes two main rails (421, 422) provided on the base (200) substantially parallel to each other along the first direction, and main sliders (431, 433) sliding on the main rails (421, 422). The sub-guide mechanism (450) includes a sub-rail (461) provided on the main slider (431) along the second direction, and a sub-slider (471) sliding on the sub-rail (461).

Abstract: A slider device (200, 800) according to the present invention includes a base (200); a running head (300) slidably provided on said base (200) along the direction guided by a prespecified guide mechanism (400); a rack (510) provided in the fixed state on either said base (200) or said running head (300) along the guide direction by said guide mechanism (400); a pinion (520) engaging with rack teeth of said rack and driven and rotated by a prespecified power source; a swing arm (540) rotatably supporting said pinion (520), having an oscillation shaft (550) parallel to a rotary shaft of said pinion, and coupled to either one of said base (200) and said running head (300) via said oscillation shaft (550) in the oscillation-allowable state with the line extending between said oscillation shaft (550) and the rotary shaft of said pinion substantially parallel to said rack (510) as the reference state; and a biasing mechanism (570) for biasing said pinion (520) toward said rack (510) via said swing arm (540).

Abstract: A slider device (200, 800) according to the present invention includes a base (200); a running head (300) slidably provided on said base (200) along the direction guided by a prespecified guide mechanism (400); a rack (510) provided in the fixed state on either said base (200) or said running head (300) along the guide direction by said guide mechanism (400); a pinion (520) engaging with rack teeth of said rack and driven and rotated by a prespecified power source; a swing arm (540) rotatably supporting said pinion (520), having an oscillation shaft (550) parallel to a rotary shaft of said pinion, and coupled to either one of said base (200) and said running head (300) via said oscillation shaft (550) in the oscillation-allowable state with the line extending between said oscillation shaft (550) and the rotary shaft of said pinion substantially parallel to said rack (510) as the reference state; and a biasing mechanism (570) for biasing said pinion (520) toward said rack (510) via said swing arm (540).

Abstract: A slider device includes a base (200), a running head (300) slidably provided on the base (200), a main guide mechanism (410) for guiding in a first direction in which the running head (300) runs, and sub-guide mechanism (450) allowing displacement to a second direction different from the first direction. The main guide mechanism (410) includes two main rails (421, 422) provided on the base (200) substantially parallel to each other along the first direction, and main sliders (431, 433) sliding on the main rails (421, 422). The sub-guide mechanism (450) includes a sub-rail (461) provided on the main slider (431) along the second direction, and a sub-slider (471) sliding on the sub-rail (461).

Abstract: This invention is intended to provide a damping device capable of conducting highly precise damping control. To attain this object, this invention is a damping device used in a machine which includes a rotating object and a motor rotating the rotating object, wherein the damping device includes: a vibration damper filled with an electroviscous fluid having a viscosity changing according to a value of a voltage applied to the electroviscous fluid, and rotatably supporting at least a part of the rotating object in the electroviscous fluid; a voltage applicator applying the voltage to the electroviscous fluid in the vibration damper; and a controller controlling an operation of the voltage applicator so that an optimum voltage, at which the viscosity of the electroviscous fluid absorbing a vibration of the rotating object most effectively is obtained, can be applied to the electroviscous fluid in the vibration damper in accordance with a rotating speed of the rotating object.

Abstract: After preparatory measurement of a calibration reference with a scanning probe is performed, apart program for measuring the calibration reference is generated and executed so as to perform calibration measurement. After a calibration value of a coordinate transformation function and reference coordinates of the calibration reference are obtained, a new part program for measuring the calibration reference again is generated by use of the calibration value and the reference transformation coordinates and the part program is executed to perform calibration measurement. Accordingly, the calibration value of the coordinate transformation function and the reference coordinates of the calibration reference can be obtained with higher accuracy.

Abstract: After preparatory measurement of a calibration reference with a scanning probe is performed, apart program for measuring the calibration reference is generated and executed so as to perform calibration measurement. After a calibration value of a coordinate transformation function and reference coordinates of the calibration reference are obtained, a new part program for measuring the calibration reference again is generated by use of the calibration value and the reference transformation coordinates and the part program is executed to perform calibration measurement. Accordingly, the calibration value of the coordinate transformation function and the reference coordinates of the calibration reference can be obtained with higher accuracy.

Abstract: This invention is intended to provide a damping device capable of conducting highly precise damping control.