Abstract: A substrate processing apparatus comprises a substrate support disposed in the chamber, a shutter including a valve body configured to open and close an opening of the chamber, and a baffle plate disposed between an inner peripheral side of the chamber and the substrate support and having a vertically inclined portion at an end portion on a substrate support side, and a contact member disposed on a side surface of the substrate support and formed of a conductive elastic member. In a state where the shutter is closed, contact between the end portion on the substrate support side and the contact member is maintained.

Abstract: A method for recycling in place an asphalt mixture layer of a paved road continuously, while moving a self-propelled vehicle system, which comprises a step of heating and softening the asphalt mixture layer, a step of scraping and breaking said hot and softened asphalt mixture layer and keeping the softened mixture at a temperature sufficient not to form an aggregate, to prepare an asphalt mixture having a single-grained structure, a sieving step of classifying said asphalt mixture having a single-grained structure into a plurality of grain size groups, a step of designing mix proportions for converting said asphalt mixture to a recycled asphalt mixture by the use of said plurality of grain size groups classified, a step of mixing uniformly said recycled asphalt mixtures having designed mix proportions, and a step of spreading and compacting said recycled asphalt mixtures having been mixed uniformly, to thereby form a recycled asphalt mixtures layer.

Abstract: A method for recycling in place an asphalt mixture layer of a paved road continuously, while moving a self-propelled vehicle system, which comprises a step of heating and softening the asphalt mixture layer, a step of scraping and breaking said hot and softened asphalt mixture layer and keeping the softened mixture at a temperature sufficient not to form an aggregate, to prepare an asphalt mixture having a single-grained structure, a sieving step of classifying said asphalt mixture having a single-grained structure into a plurality of grain size groups, a step of designing mix proportions for converting said asphalt mixture to a recycled asphalt mixture by the use of said plurality of grain size groups classified, a step of mixing uniformly said recycled asphalt mixtures having designed mix proportions, and a step of spreading and compacting said recycled asphalt mixtures having been mixed uniformly, to thereby form a recycled asphalt mixtures layer.

Abstract: The array condition of leads (3) is detected by a photoelectric detector (41), the detection signal is subjected to signal processing to determine the timing to oscillate a pulsed laser beam, and a laser beam axis (13C) is relatively moved at a speed (v.sub.0) with a work table (21) while oscillating a pulsed laser beam (13A), thereby cutting a dam bar (5). At this time, the longitudinal size of a spot (13B) of the pulsed laser beam (13A) is adjusted to be twice or more the width of the dam bar (5) by a longitudinal beam transformer (11a), the transverse size of the spot 13B is adjusted to be not less than 1/2 but not more than 4/5 of the length of the dam bar (5) by a transverse beam transformer (11b), and a beam rotator (11c) is appropriately operated to make the longitudinal direction of the spot (13B) substantially aligned with the longitudinal direction of the lead (3) so that the spot (13B) lies across the width (W.sub.1) of the dam bar (5).

Abstract: A controller for a fine positioning device constructed of planar structural units connected symmetrically and equipped individually with planar flexible beams arranged in an opposing relation between two rigid members and actuators for applying forces between the two rigid members includes displacement detection devices, displacement setting devices, sensor devices for determining the degree of each translational displacement and the degree of each angular displacement, and control devices for controlling the voltages to be applied to the respective actuators.

Abstract: A fine positioning device is formed of a rigid support member; a first set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a first axis; a second set of radial flexible-beam displacement mechanisms provided symmetrically to each other on the support member to produce angular displacements about a second axis which is perpendicular to the first axis; a third set of radial flexible-beam displacement mechanisms connected to either one of the sets of radial flexible-beam displacement mechanisms to produce angular diaplacements about a third axis which is perpendicular to both the first and second axes; and a fine motion table fixed on the radial flexible-beam displacement mechanisms which are other than those connected to the radial flexible-beam displacement mechanisms for producing angular displacements about the third axis.

Abstract: A fine positioning device is formed of a central rigid portion, a first set of outwardly-extending portions extending symmetrically along a first axis from the central rigid portion, a second set of outwardly-extending portions extending symmetrically from the central rigid portion along a second axis which is perpendicular to the first axis, a first set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the first set of outwardly-extending portions respectively to produce translational displacements along the second axis, and a second set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the second set of outwardly-extending portions respectively to produce translational displacements along the first axis. A displacement controller for the fine positioning device is also disclosed.

Abstract: A fine positioning device is formed of a central rigid portion, a first set of outwardly-extending portions extending symmetrically along a first axis from the central rigid portion, a second set of outwardly-extending portions extending symmetrically from the central rigid portion along a second axis which is perpendicular to the first axis, a first set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the first set of outwardly-extending portions respectively to produce translational displacements along the second axis, and a second set of parallel flexible-beam displacement mechanisms provided symmetrically to each other with the second set of outwardly-extending portions respectively to produce translational displacements along the first axis. Three set of radial flexible-beam displacement mechanisms are provided to produce angular displacements about three axes.

Abstract: A vibration generating apparatus including a support body having a first center axis, a first spherical joint element provided at a forward end of the support body and having the center of a sphere located on the first center axis, a vibrating body having a second center axis passing through the sphere center, a second spherical joint element provided on the vibrating body and concentric complementary with the first spherical joint element to cooperate therewith to allow the vibrating body to be supported on the support member for universal movement, a rotary shaft coaxially rotatably supported within the vibrating body, a pair of eccentric weights mounted on the rotary shaft with a phase deviation of 180 degrees and in a manner symmetrical with respect to the sphere center, and a drive motor connected to the rotary shaft for driving same for rotation whereby the pair of eccentric weights are rotated about the second center axis to cause the vibrating body to move in conical motion vibration such that the sec

Abstract: A pipe laying apparatus having an excavator for performing excavation in the earth to form a substantially horizontally extending hole, with the excavator having connected to its trailing end a leading end of at least one underground pipe at least partially located in the horizontally extending hole, an injector for injecting a viscosity imparting liquid into the earth in which excavation is being performed by the excavator to produce viscosity imparting liquid containing soil particles. A propelling device positioned against a trailing end of the pipe and is located in a starting pit. The viscosity imparting liquid containing soil particles produced by the excavator and injector are conveyed rearwardly of the excavator past an outer periphery thereof and filled in an annular gap defined between the horizontally extending hole and the pipe while the excavator and pipe are advanced by the propelling device.

Abstract: A pipe laying apparatus including an excavator propulsion unit located in a starting pit. The excavator includes an excavator body having a first axis, an excavating tool having a second axis and located at a forward end portion of the excavator body, and injection ports formed in the excavating tool for injecting a viscosity imparting liquid into soil as excavated.

Abstract: A method of and a system for laying a pipe underground wherein a head attached to the leading end of the pipe to be laid underground is caused to move in vibratory movement while a propelling force is exerted on the rear end of the pipe to obtain penetration of the earth by the pipe. While the head is forced to move ahead by the propelling force exerted on the rear end of the pipe, the vibration of the head is measured. When the vibration drops in magnitude, the propelling force is decreased to reduce the speed at which the head is forced to move ahead; so as to cause restoration of the vibration to the original level, and when the vibration rises, the propelling force is increased to increase the speed at which the head is forced to move ahead.