Patents by Inventor Kong Lung CHAN

Kong Lung CHAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing chamber
    Patent number: 10741428
    Abstract: A semiconductor processing apparatus is described that has a body with a wall defining two processing chambers within the body; a passage through the wall forming a fluid coupling between the two processing chambers; a lid removably coupled to the body, the lid having a portal in fluid communication with the passage; a gas activator coupled to the lid outside the processing chambers, the gas activator having an outlet in fluid communication with the portal of the lid; a substrate support disposed in each processing chamber, each substrate support having at least two heating zones, each with an embedded heating element; a gas distributor coupled to the lid facing each substrate support; and a thermal control member coupled to the lid at an edge of each gas distributor.
    Type: Grant
    Filed: January 27, 2017
    Date of Patent: August 11, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Aaron Muir Hunter, Mehran Behdjat, Niraj Merchant, Douglas R. McAllister, Dongming Iu, Kong Lung Chan, Lara Hawrylchak
  • SEMICONDUCTOR PROCESSING CHAMBER
    Publication number: 20170294325
    Abstract: A semiconductor processing apparatus is described that has a body with a wall defining two processing chambers within the body; a passage through the wall forming a fluid coupling between the two processing chambers; a lid removably coupled to the body, the lid having a portal in fluid communication with the passage; a gas activator coupled to the lid outside the processing chambers, the gas activator having an outlet in fluid communication with the portal of the lid; a substrate support disposed in each processing chamber, each substrate support having at least two heating zones, each with an embedded heating element; a gas distributor coupled to the lid facing each substrate support; and a thermal control member coupled to the lid at an edge of each gas distributor.
    Type: Application
    Filed: January 27, 2017
    Publication date: October 12, 2017
    Inventors: Aaron Muir HUNTER, Mehran BEHDJAT, Niraj MERCHANT, Douglas R. MCALLISTER, Dongming IU, Kong Lung CHAN, Lara HAWRYLCHAK