Abstract: A device for controlling a central shutter, in which a plurality of shutter leaves (3) are mounted on a circularly annular leaf carrier (1) such that they can be pivoted on a pivoting arm (4), and in which, as actuating device for the pivoting movement of the shutter leaves (3), an annular cam plate (5) is mounted on the leaf carrier (1) concentrically with respect to the shutter opening (2), such that it can be rotated continuously in one direction, it being possible for the rotation of the cam plate (5) to be blocked by mechanical engagement into a cam trough (8) in front of an actuating flank (6) of a cam, is distinguished by the fact that, for mechanical blocking purposes, there is a push rod (9, 10) of a solenoid, which push rod (9, 10) can be moved perpendicularly with respect to the plane of the cam plate (5).

Abstract: A device for synchronizing shutter blades, which are each fastened to a swivel arm which is mounted rotatably on a swivel pin on a circular-ring-shaped blade carrier, is distinguished in that a synchronizing ring disc (1) is arranged concentrically with respect to the blade carrier within a circle connecting the swivel pins (5) and is coupled in a form-fitting manner to each of the swivel arms (3).

Abstract: A central shutter for camera objectives, said central shutter having a ring-shaped leaf carrier (1) surrounding the shutter aperture (2), on which leaf carrier at least two studs (13) are disposed arranged in a circularly symmetrical manner in relation to each other, on which studs sickle-shaped shutter leaves (14) are pivotably mounted, and having an electric motor drive pivoting the shutter leaves (14) over the shutter aperture (2), is distinguished in that the drive includes a motorized rotatable winding ring (3) which is realized as a flat ring disk and rests on the leaf carrier (1), a cam ring (7) realized as a flat ring disk is rotatably mounted in the winding ring (3), sawtooth-shaped cams (17) being provided on a ring surface thereof, wherein the winding ring (3) and the cam ring (7) are coupled to each other by means of at least one tension spring (9) that can be tensioned in the direction of rotation of the winding ring (3) and the pivoting movement of the shutter leaves (14) can be controlled by co

Abstract: A device for controlling a central shutter, in which a plurality of shutter leaves (3) are mounted on a circularly annular leaf carrier (1) such that they can be pivoted on a pivoting arm (4), and in which, as actuating device for the pivoting movement of the shutter leaves (3), an annular cam plate (5) is mounted on the leaf carrier (1) concentrically with respect to the shutter opening (2), such that it can be rotated continuously in one direction, it being possible for the rotation of the cam plate (5) to be blocked by mechanical engagement into a cam trough (8) in front of an actuating flank (6) of a cam, is distinguished by the fact that, for mechanical blocking purposes, there is a push rod (9, 10) of a solenoid, which push rod (9, 10) can be moved perpendicularly with respect to the plane of the cam plate (5).

Abstract: A device for synchronizing shutter blades, which are each fastened to a swivel arm which is mounted rotatably on a swivel pin on a circular-ring-shaped blade carrier, is distinguished in that a synchronizing ring disc (1) is arranged concentrically with respect to the blade carrier within a circle connecting the swivel pins (5) and is coupled in a form-fitting manner to each of the swivel arms (3).

Abstract: A central shutter for camera objectives, said central shutter having a ring-shaped leaf carrier (1) surrounding the shutter aperture (2), on which leaf carrier at least two studs (13) are disposed arranged in a circularly symmetrical manner in relation to each other, on which studs sickle-shaped shutter leaves (14) are pivotably mounted, and having an electric motor drive pivoting the shutter leaves (14) over the shutter aperture (2), is distinguished in that the drive includes a motorized rotatable winding ring (3) which is realized as a flat ring disk and rests on the leaf carrier (1), a cam ring (7) realized as a flat ring disk is rotatably mounted in the winding ring (3), sawtooth-shaped cams (17) being provided on a ring surface thereof, wherein the winding ring (3) and the cam ring (7) are coupled to each other by means of at least one tension spring (9) that can be tensioned in the direction of rotation of the winding ring (3) and the pivoting movement of the shutter leaves (14) can be controlled by co

Abstract: Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.

Abstract: A line-narrowed excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber connected to a discharge circuit for energizing the gas mixture, a resonator including a pair of resonator reflecting surfaces disposed on either side of the discharge chamber for generating a laser beam, and a line-narrowing/selection unit within the resonator for narrowing the bandwidth of the laser beam. The resonator further includes a third reflecting surface which is deformable and disposed between the pair of resonator reflecting surfaces. The line-narrowing/selection unit preferably includes a beam expander and a dispersive element, wherein the deformable third reflecting surface is disposed between the beam expander and the dispersive element.

Abstract: The consumption and/or erosion of electrodes in high repetition rate gas discharge lasers, such as excimer or molecular fluorine lasers, can be reduced using any of a number of temperature regulation approaches described herein. A flow of a cooling medium can be used to remove heat from the electrodes during laser operation, in order to reduce the rate of consumption and/or erosion. The rate of erosion can be controlled by adjusting the rate and/or temperature of the cooling medium flowing through the electrodes, or in bodies in good thermal contact with those electrodes. The cooled electrodes also can function to remove heat from the laser gas, and can have finned surfaces to facilitate such heat removal. Regulating the temperature of the electrodes and laser gas also can function to minimize resonance effects in the laser gas due to the presence of temperature gradients.

Abstract: Fast wavelength stabilization can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a fast wavelength correction unit. A fast wavelength correction unit can include a fast, precise motor driver unit, such as a linear or rotary voice coil motor, a piezo-ceramic motor, or a piezo motor driver unit. These motors can be used to rotate a tuning element, for example, in order to provide for precise and fast wavelength stabilization. The wavelength correction unit can be fully contained within an optical module, without the need for seals, bellows, or feedthroughs as in existing drive systems. Various arrangements and embodiments are described which can be appropriate for differing applications and/or systems.

Abstract: An excimer or molecular fluorine laser system includes a laser chamber filled with a gas mixture at least including a halogen-containing species and a buffer gas, multiple electrodes, including a pair of main discharge electrodes and at least one preionization electrode, within the laser chamber and connected to a discharge circuit for energizing the gas mixture, and a resonator including a line-narrowing and/or selection module for generating a laser beam at high spectral purity.

Abstract: Arcing can be minimized in a discharge chamber of an excimer or molecular fluorine laser system by utilizing an improved electrode structure. An electrode structure can include at least one ceramic spoiler positioned near the discharge region of the electrode. An insulating ceramic spoiler can reduce the effective area over which arcing can occur, and can reduce the likelihood of arcing by improving the flow of gas between the electrodes, such as by allowing for design flexibility and reducing the necessary height of a nose portion used to control the discharge area of the electrode. An improved blower design, which can utilize improved bearings and a dry film lubricant, can help to circulate the laser gas between the electrode structures, such as at a speed of at least 30 m/s in order to operate the laser at repetition rates of 4 kHz or higher.

Abstract: An apparatus for adjusting an orientation of an optical component mounted within a laser resonator with suppressed hysteresis includes an electromechanical device, a drive element, and a mechano-optical device coupled to the mounted optical component. The drive element is configured to contact and apply a force to the mechano-optical device in such a way as to adjust the orientation of the mechano-optical device, and thereby that of the optical component, to a known orientation within the laser resonator. The optical component is mounted such that stresses applied by the mount to the optical component are homogeneous and substantially thermally-independent.

Abstract: A line-narrowed excimer or molecular fluorine laser system includes a discharge chamber filled with a gas mixture at least including molecular fluorine and a buffer gas, multiple electrodes within the discharge chamber connected to a discharge circuit for energizing the gas mixture, a resonator including a pair of resonator reflecting surfaces disposed on either side of the discharge chamber for generating a laser beam, and a line-narrowing/selection unit within the resonator for narrowing the bandwidth of the laser beam. The resonator further includes a third reflecting surface which is deformable and disposed between the pair of resonator reflecting surfaces. The line-narrowing/selection unit preferably includes a beam expander and a dispersive element, wherein the deformable third reflecting surface is disposed between the beam expander and the dispersive element.