Patents by Inventor Konstantin Volodarski

Konstantin Volodarski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing
    Patent number: 5871390
    Abstract: The present invention describes an apparatus and method for aligning a pad/belt on a roller for use in chemical mechanical polishing using linear planarization. The present invention comprises an alignment sensor that senses the alignment of the pad/belt. The present invention additionally comprises a tensioner that tensions the pad/belt on the roller. And, a controller that controls the alignment of the pad/belt on the roller by controlling the tensioner.
    Type: Grant
    Filed: February 6, 1997
    Date of Patent: February 16, 1999
    Assignee: Lam Research Corporation
    Inventors: Anil K. Pant, Douglas W. Young, Joseph R. Breivogel, Konstantin Volodarski, Leon Volfovski