Abstract: An X-ray fluorescence analysis method according to an FP method uses a predefined theoretical intensity formula in a standard sample theoretical intensity calculation step for obtaining a sensitivity constant and in an unknown sample theoretical intensity calculation step during iterative calculation. In the formula, only in an absorption term relating to absorption of X-rays, a mass fraction of each component is normalized so that a sum of the mass fractions of all components becomes 1.

Abstract: An X-ray fluorescence analysis method according to an FP method uses a predefined theoretical intensity formula in a standard sample theoretical intensity calculation step for obtaining a sensitivity constant and in an unknown sample theoretical intensity calculation step during iterative calculation. In the formula, only in an absorption term relating to absorption of X-rays, a mass fraction of each component is normalized so that a sum of the mass fractions of all components becomes 1.

Abstract: Conjointly provided are a first correcting unit (13A, 13B) to estimate, on the basis of the whole sum of counting rates determined by a counting unit (10A, 10B), a peak position in an energy spectrum obtained in the counting unit (10A, 10B) and to output an initial value which is a gain value required to render the estimated peak position to coincide with a reference position, and a second correcting unit (14A, 14B) to detect, in the energy spectrum obtained in the counting unit (10A, 10B), the peak position within a predetermined energy range containing the reference position and to output a dynamic gain correction value which is a gain value required to render the detected peak position to coincide with the reference position.

Abstract: In the wavelength dispersive X-ray fluorescence spectrometer of the present invention, a counting loss correcting unit (11), when correcting a counting rate of pulses determined by a counting unit (10) on the basis of a dead time of a detector (7), stores beforehand a correlation between a predetermined pulse height range, within which pulses are selected by a pulse height analyzer (9), and the dead time and determines the dead time so as to correspond to the predetermined pulse height range during a measurement on the basis of the stored correlation.

Abstract: In the wavelength dispersive X-ray fluorescence spectrometer of the present invention, a counting loss correcting unit (11), when correcting a counting rate of pulses determined by a counting unit (10) on the basis of a dead time of a detector (7), stores beforehand a correlation between a predetermined pulse height range, within which pulses are selected by a pulse height analyzer (9), and the dead time and determines the dead time so as to correspond to the predetermined pulse height range during a measurement on the basis of the stored correlation.