Patents by Inventor Kouichi Iio

Kouichi Iio has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma processing apparatus
    Patent number: 5911852
    Abstract: A plasma processing apparatus includes a conductive thin film provided on a surface of a microwave introducing member which is exposed to a processing chamber, in which an object to be processed is placed. The conductive thin film is provided at the entire portion excluding a transmission portion, through which microwaves pass into the processing chamber. The conductive thin film is grounded to act as an electrode.
    Type: Grant
    Filed: June 14, 1996
    Date of Patent: June 15, 1999
    Assignee: Sumitomo Metal Industries Limited
    Inventors: Katsuo Katayama, Kyouichi Komachi, Kouichi Iio, Takeshi Akimoto
  • Plasma processing apparatus having a protected microwave transmission window
    Patent number: 5804923
    Abstract: A plasma processing apparatus includes a microwave introducing member, which is provided with a microwave transmission opening through which microwaves pass into a processing chamber. The microwave introducing member is also provided at a transmission opening with a dielectric member. Preferably, the dielectric member is formed to have a relative dielectric constant of 4 to 10 and an insulation resistance of 10.sup.8 to 10.sup.12 .OMEGA..
    Type: Grant
    Filed: June 14, 1996
    Date of Patent: September 8, 1998
    Assignee: Sumitomo Metal Industries Limited
    Inventors: Kouichi Iio, Kyouichi Komachi, Katsuo Katayama, Takeshi Akimoto