Abstract: A microscope system for obtaining an image having a wide view angle by repeatedly capturing an image with an objective lens having a high magnification while moving a stage, and by connecting captured images having a small view angle including a stage, a stage driving unit, a stage position detecting unit, an image capturing unit, a position to be reached determining unit for determining a position to be reached which is the next image capturing position of the stage on the basis of the state of the captured image and the position of the stage at which the image is captured, and a stage move guiding unit for prompting a user to move the stage to the position to be reached on the basis of the detected position of the stage and the determined position to be reached.

Abstract: This is a microscope image pickup apparatus for shooting and forming the observation images of a specimen in order to observe it by a microscope. The microscope image pickup apparatus comprises an image pickup unit for shooting and forming the observation images, a display unit for dynamically displaying the observation images shot and formed by the image pickup unit in succession and an operating state detection unit for detecting an operating state of a microscope operation part in order to operate the microscope on the basis of the change of the observation images dynamically displayed on the display unit. The present invention provides a microscope image pickup apparatus, a microscope image pickup program product, a microscope image pickup program transmission medium and a microscope image pickup method which are capable of displaying an optimum moving image according to the operating state of the microscope.

Abstract: A microscope system for obtaining an image having a wide view angle by repeatedly capturing an image with an objective lens having a high magnification while moving a stage, and by connecting captured images having a small view angle including a stage, a stage driving unit, a stage position detecting unit, an image capturing unit, a position to be reached determining unit for determining a position to be reached which is the next image capturing position of the stage on the basis of the state of the captured image and the position of the stage at which the image is captured, and a stage move guiding unit for prompting a user to move the stage to the position to be reached on the basis of the detected position of the stage and the determined position to be reached.

Abstract: This is a microscope image pickup apparatus for shooting and forming the observation images of a specimen in order to observe it by a microscope. The microscope image pickup apparatus comprises an image pickup unit for shooting and forming the observation images, a display unit for dynamically displaying the observation images shot and formed by the image pickup unit in succession and an operating state detection unit for detecting an operating state of a microscope operation part in order to operate the microscope on the basis of the change of the observation images dynamically displayed on the display unit. The present invention provides a microscope image pickup apparatus, a microscope image pickup program product, a microscope image pickup program transmission medium and a microscope image pickup method which are capable of displaying an optimum moving image according to the operating state of the microscope.

Abstract: An electron beam exposure apparatus for exposing a wafer with an electron beam includes a section for generally controlling a wafer exposing system, a first buffer memory for temporarily storing exposure data, a second buffer memory for temporarily storing the exposure data, a first exposing section for irradiating the wafer with an electron beam based on exposure data output from the first buffer memory, and a first comparing section for comparing exposure data output from the first buffer memory with exposure data output from the second buffer memory and notifying the comparison results to the general control section. The exposure data stored in the first buffer memory and the exposure data stored in the second buffer memory are identical to one another when no error is involved. Further, an exposure apparatus and a pattern error detection method for accurately detecting an error of an exposure pattern formed to a wafer is disclosed.

Abstract: An electron beam exposure apparatus for exposing a wafer with an electron beam includes a section for generally controlling a wafer exposing system, a first buffer memory for temporarily storing exposure data, a second buffer memory for temporarily storing the exposure data, a first exposing section for irradiating the wafer with an electron beam based on exposure data output from the first buffer memory, and a first comparing section for comparing exposure data output from the first buffer memory with exposure data output from the second buffer memory and notifying the comparison results to the general control section. Further, an exposure apparatus and a pattern error detection method for accurately detecting an error of an exposure pattern formed to a wafer is disclosed.