Patents by Inventor Kris Bhaskar
Kris Bhaskar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10402461Abstract: Methods and systems for detecting defects on a specimen are provided. One system includes a storage medium configured for storing images for a physical version of a specimen generated by an inspection system. At least two dies are formed on the specimen with different values of one or more parameters of a fabrication process performed on the specimen. The system also includes computer subsystem(s) configured for comparing portions of the stored images generated at locations on the specimen at which patterns having the same as-designed characteristics are formed with at least two of the different values. The portions of the stored images that are compared are not constrained by locations of the dies on the specimen, locations of the patterns within the dies, or locations of the patterns on the specimen. The computer subsystem(s) are also configured for detecting defects at the locations based on results of the comparing.Type: GrantFiled: November 20, 2015Date of Patent: September 3, 2019Assignee: KLA-Tencor Corp.Inventors: Laurent Karsenti, Kris Bhaskar, Mark Wagner, Brian Duffy, Vijayakumar Ramachandran
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Patent number: 10395356Abstract: Methods and systems for generating a simulated image from an input image are provided. One system includes one or more computer subsystems and one or more components executed by the one or more computer subsystems. The one or more components include a neural network that includes two or more encoder layers configured for determining features of an image for a specimen. The neural network also includes two or more decoder layers configured for generating one or more simulated images from the determined features. The neural network does not include a fully connected layer thereby eliminating constraints on size of the image input to the two or more encoder layers.Type: GrantFiled: May 23, 2017Date of Patent: August 27, 2019Assignee: KLA-Tencor Corp.Inventors: Jing Zhang, Kris Bhaskar
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Patent number: 10360477Abstract: Methods and systems for performing one or more functions for a specimen using output simulated for the specimen are provided. One system includes one or more computer subsystems configured for acquiring output generated for a specimen by one or more detectors included in a tool configured to perform a process on the specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a learning based model configured for performing one or more first functions using the acquired output as input to thereby generate simulated output for the specimen. The one or more computer subsystems are also configured for performing one or more second functions for the specimen using the simulated output.Type: GrantFiled: January 9, 2017Date of Patent: July 23, 2019Assignee: KLA-Tencor Corp.Inventors: Kris Bhaskar, Scott Young, Mark Roulo, Jing Zhang, Laurent Karsenti, Mohan Mahadevan, Bjorn Brauer
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Patent number: 10346740Abstract: Methods and systems for training a neural network are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a neural network configured for determining inverted features of input images in a training set for a specimen input to the neural network, a forward physical model configured for reconstructing the input images from the inverted features thereby generating a set of output images corresponding to the input images in the training set, and a residue layer configured for determining differences between the input images in the training set and their corresponding output images in the set. The one or more computer subsystems are configured for altering one or more parameters of the neural network based on the determined differences thereby training the neural network.Type: GrantFiled: May 31, 2017Date of Patent: July 9, 2019Assignee: KLA-Tencor Corp.Inventors: Jing Zhang, Kris Bhaskar
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Patent number: 10186026Abstract: Methods and systems for detecting defects on a specimen are provided. One system includes a generative model. The generative model includes a non-linear network configured for mapping blocks of pixels of an input feature map volume into labels. The labels are indicative of one or more defect-related characteristics of the blocks. The system inputs a single test image into the generative model, which determines features of blocks of pixels in the single test image and determines labels for the blocks based on the mapping. The system detects defects on the specimen based on the determined labels.Type: GrantFiled: November 16, 2016Date of Patent: January 22, 2019Assignee: KLA-Tencor Corp.Inventors: Laurent Karsenti, Kris Bhaskar, John Raymond Jordan, III, Sankar Venkataraman, Yair Carmon
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Patent number: 10181185Abstract: Methods and systems for detecting anomalies in images of a specimen are provided. One system includes one or more computer subsystems configured for acquiring images generated of a specimen by an imaging subsystem. The computer subsystem(s) are also configured for determining one or more characteristics of the acquired images. In addition, the computer subsystem(s) are configured for identifying anomalies in the images based on the one or more determined characteristics without applying a defect detection algorithm to the images or the one or more characteristics of the images.Type: GrantFiled: January 9, 2017Date of Patent: January 15, 2019Assignee: KLA-Tencor Corp.Inventors: Allen Park, Lisheng Gao, Ashok Kulkarni, Saibal Banerjee, Ping Gu, Songnian Rong, Kris Bhaskar
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Patent number: 10043261Abstract: Methods and systems for generating simulated output for a specimen are provided. One method includes acquiring information for a specimen with one or more computer systems. The information includes at least one of an actual optical image of the specimen, an actual electron beam image of the specimen, and design data for the specimen. The method also includes inputting the information for the specimen into a learning based model. The learning based model is included in one or more components executed by the one or more computer systems. The learning based model is configured for mapping a triangular relationship between optical images, electron beam images, and design data, and the learning based model applies the triangular relationship to the input to thereby generate simulated images for the specimen.Type: GrantFiled: January 9, 2017Date of Patent: August 7, 2018Assignee: KLA-Tencor Corp.Inventors: Kris Bhaskar, Jing Zhang, Grace Hsiu-Ling Chen, Ashok Kulkarni, Laurent Karsenti
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Patent number: 9965901Abstract: Methods and systems for generating simulated images from design information are provided. One system includes one or more computer subsystems and one or more components executed by the computer subsystem(s), which include a generative model. The generative model includes two or more encoder layers configured for determining features of design information for a specimen. The generative model also includes two or more decoder layers configured for generating one or more simulated images from the determined features. The simulated image(s) illustrate how the design information formed on the specimen appears in one or more actual images of the specimen generated by an imaging system.Type: GrantFiled: June 7, 2016Date of Patent: May 8, 2018Assignee: KLA—Tencor Corp.Inventors: Jing Zhang, Kris Bhaskar
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Publication number: 20180107928Abstract: Methods and systems for performing diagnostic functions for a deep learning model are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a deep learning model configured for determining information from an image generated for a specimen by an imaging tool. The one or more components also include a diagnostic component configured for determining one or more causal portions of the image that resulted in the information being determined and for performing one or more functions based on the determined one or more causal portions of the image.Type: ApplicationFiled: September 1, 2017Publication date: April 19, 2018Inventors: Jing Zhang, Ravi Chandra Donapati, Mark Roulo, Kris Bhaskar
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Patent number: 9916965Abstract: Hybrid inspectors are provided. One system includes computer subsystem(s) configured for receiving optical based output and electron beam based output generated for a specimen. The computer subsystem(s) include one or more virtual systems configured for performing one or more functions using at least some of the optical based output and the electron beam based output generated for the specimen. The system also includes one or more components executed by the computer subsystem(s), which include one or more models configured for performing one or more simulations for the specimen. The computer subsystem(s) are configured for detecting defects on the specimen based on at least two of the optical based output, the electron beam based output, results of the one or more functions, and results of the one or more simulations.Type: GrantFiled: December 29, 2016Date of Patent: March 13, 2018Assignee: KLA-Tencor Corp.Inventors: Kris Bhaskar, Grace Hsiu-Ling Chen, Keith Wells, Wayne McMillan, Jing Zhang, Scott Young, Brian Duffy
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Publication number: 20170351952Abstract: Methods and systems for training a neural network are provided. One system includes one or more components executed by one or more computer subsystems. The one or more components include a neural network configured for determining inverted features of input images in a training set for a specimen input to the neural network, a forward physical model configured for reconstructing the input images from the inverted features thereby generating a set of output images corresponding to the input images in the training set, and a residue layer configured for determining differences between the input images in the training set and their corresponding output images in the set. The one or more computer subsystems are configured for altering one or more parameters of the neural network based on the determined differences thereby training the neural network.Type: ApplicationFiled: May 31, 2017Publication date: December 7, 2017Inventors: Jing Zhang, Kris Bhaskar
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Publication number: 20170345140Abstract: Methods and systems for generating a simulated image from an input image are provided. One system includes one or more computer subsystems and one or more components executed by the one or more computer subsystems. The one or more components include a neural network that includes two or more encoder layers configured for determining features of an image for a specimen. The neural network also includes two or more decoder layers configured for generating one or more simulated images from the determined features. The neural network does not include a fully connected layer thereby eliminating constraints on size of the image input to the two or more encoder layers.Type: ApplicationFiled: May 23, 2017Publication date: November 30, 2017Inventors: Jing Zhang, Kris Bhaskar
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Publication number: 20170200264Abstract: Methods and systems for detecting anomalies in images of a specimen are provided. One system includes one or more computer subsystems configured for acquiring images generated of a specimen by an imaging subsystem. The computer subsystem(s) are also configured for determining one or more characteristics of the acquired images. In addition, the computer subsystem(s) are configured for identifying anomalies in the images based on the one or more determined characteristics without applying a defect detection algorithm to the images or the one or more characteristics of the images.Type: ApplicationFiled: January 9, 2017Publication date: July 13, 2017Inventors: Allen Park, Lisheng Gao, Ashok Kulkarni, Saibal Banerjee, Ping Gu, Songnian Rong, Kris Bhaskar
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Publication number: 20170200260Abstract: Methods and systems for performing one or more functions for a specimen using output simulated for the specimen are provided. One system includes one or more computer subsystems configured for acquiring output generated for a specimen by one or more detectors included in a tool configured to perform a process on the specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a learning based model configured for performing one or more first functions using the acquired output as input to thereby generate simulated output for the specimen. The one or more computer subsystems are also configured for performing one or more second functions for the specimen using the simulated output.Type: ApplicationFiled: January 9, 2017Publication date: July 13, 2017Inventors: Kris Bhaskar, Scott Young, Mark Roulo, Jing Zhang, Laurent Karsenti, Mohan Mahadevan, Bjorn Brauer
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Publication number: 20170200265Abstract: Methods and systems for generating simulated output for a specimen are provided. One method includes acquiring information for a specimen with one or more computer systems. The information includes at least one of an actual optical image of the specimen, an actual electron beam image of the specimen, and design data for the specimen. The method also includes inputting the information for the specimen into a learning based model. The learning based model is included in one or more components executed by the one or more computer systems. The learning based model is configured for mapping a triangular relationship between optical images, electron beam images, and design data, and the learning based model applies the triangular relationship to the input to thereby generate simulated images for the specimen.Type: ApplicationFiled: January 9, 2017Publication date: July 13, 2017Inventors: Kris Bhaskar, Jing Zhang, Grace Hsiu-Ling Chen, Ashok Kulkarni, Laurent Karsenti
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Publication number: 20170193400Abstract: Methods and systems for accelerated training of a machine learning based model for semiconductor applications are provided. One method for training a machine learning based model includes acquiring information for non-nominal instances of specimen(s) on which a process is performed. The machine learning based model is configured for performing simulation(s) for the specimens. The machine learning based model is trained with only information for nominal instances of additional specimen(s). The method also includes re-training the machine learning based model with the information for the non-nominal instances of the specimen(s) thereby performing transfer learning of the information for the non-nominal instances of the specimen(s) to the machine learning based model.Type: ApplicationFiled: December 29, 2016Publication date: July 6, 2017Inventors: Kris Bhaskar, Laurent Karsenti, Scott Young, Mohan Mahadevan, Jing Zhang, Brian Duffy, Li He, Huajun Ying, Hung Nien, Sankar Venkataraman
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Publication number: 20170193680Abstract: Methods and systems for generating a high resolution image for a specimen from one or more low resolution images of the specimen are provided. One system includes one or more computer subsystems configured for acquiring one or more low resolution images of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a model that includes one or more first layers configured for generating a representation of the one or more low resolution images. The model also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the one or more low resolution images.Type: ApplicationFiled: January 2, 2017Publication date: July 6, 2017Inventors: Jing Zhang, Grace Hsiu-Ling Chen, Kris Bhaskar, Keith Wells, Nan Bai, Ping Gu, Lisheng Gao
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Publication number: 20170194126Abstract: Hybrid inspectors are provided. One system includes computer subsystems) configured for receiving optical based output and electron beam based output generated for a specimen. The computer subsystem(s) include one or more virtual systems configured for performing one or more functions using at least some of the optical based output and the electron beam based output generated for the specimen. The system also includes one or more components executed by the computer subsystem(s), which include one or more models configured for performing one or more simulations for the specimen. The computer subsystem(s) are configured for detecting defects on the specimen based on at least two of the optical based output, the electron beam based output, results of the one or more functions, and results of the one or more simulations.Type: ApplicationFiled: December 29, 2016Publication date: July 6, 2017Inventors: Kris Bhaskar, Grace Hsiu-Ling Chen, Keith Wells, Wayne McMillan, Jing Zhang, Scott Young, Brian Duffy
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Publication number: 20170148226Abstract: Methods and systems for generating simulated images from design information are provided. One system includes one or more computer subsystems and one or more components executed by the computer subsystem(s), which include a generative model. The generative model includes two or more encoder layers configured for determining features of design information for a specimen. The generative model also includes two or more decoder layers configured for generating one or more simulated images from the determined features. The simulated image(s) illustrate how the design information formed on the specimen appears in one or more actual images of the specimen generated by an imaging system.Type: ApplicationFiled: June 7, 2016Publication date: May 25, 2017Inventors: Jing Zhang, Kris Bhaskar
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Publication number: 20170140524Abstract: Methods and systems for detecting defects on a specimen are provided. One system includes a generative model. The generative model includes a non-linear network configured for mapping blocks of pixels of an input feature map volume into labels. The labels are indicative of one or more defect-related characteristics of the blocks. The system inputs a single test image into the generative model, which determines features of blocks of pixels in the single test image and determines labels for the blocks based on the mapping. The system detects defects on the specimen based on the determined labels.Type: ApplicationFiled: November 16, 2016Publication date: May 18, 2017Inventors: Laurent Karsenti, Kris Bhaskar, John Raymond Jordan, III, Sankar Venkataraman, Yair Carmon