Patents by Inventor Kristi Bushman

Kristi Bushman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process and method for a decoupled multi-parameter run-to-run controller
    Patent number: 8112168
    Abstract: A manufacturing process including a controller method to generate a tool setting which includes a tool offset and a device offset. The controller method uses a device parameter measurement to update the tool offset and device offset. A tool weight and a device weight is assigned so that only one of the tool offset and device offset is significantly changed during the update. The process may be applied to semiconductor device manufacturing and particularly to integrated circuit fabrication.
    Type: Grant
    Filed: July 29, 2009
    Date of Patent: February 7, 2012
    Assignee: Texas Instruments Incorporated
    Inventors: Madhu Sudan Ramavajjala, Kristi Bushman, Robert Ray Spangler, Stephen Arlon Meinser, Ronald Charles Roth
  • Process and Method for a Decoupled Multi-Parameter Run-to-Run Controller
    Publication number: 20110029119
    Abstract: A manufacturing process including a controller method to generate a tool setting which includes a tool offset and a device offset. The controller method uses a device parameter measurement to update the tool offset and device offset. A tool weight and a device weight is assigned so that only one of the tool offset and device offset is significantly changed during the update. The process may be applied to semiconductor device manufacturing and particularly to integrated circuit fabrication.
    Type: Application
    Filed: July 29, 2009
    Publication date: February 3, 2011
    Applicant: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Madhu Sudan RAMAVAJJALA, Kristi BUSHMAN, Robert Ray SPANGLER, Stephen Arlon MEISNER, Ronald Charles ROTH