Abstract: A lithography rework analysis method and system. The method is applied to a system having a network server and a user computer having a browser interface. The method transfers initial data of various machines into the network database. The network database contains rework data of machines performing lithography rework operation. Analysis time node is input to the browser interface and the analysis time node is transferred to the network server. According to the analysis time node, the network server retrieves required data from the network database and displays the data on the browser interface. Rework data residing within the network database includes data table production time, product number, production line code, station code, department code, product code, mask rework pieces, measuring station, production machine, worker name, rework reason code, rework reason title, current status, wafer lot note item, rework time and rework region.

Abstract: The present invention discloses an integrated service platform (ISP). Under the real-time mode, the ISP of the present invention comprises the devices of: an engineering data analysis database (EDB); an area controller database (AC Database); a web server; and client computers. Under the mode of accessing data in a certain period of time, the present invention comprises the devices of: an EDB; an AC Database; a loader; a web server; and client computers. The application of the ISP of the present invention allows users on the client sites to access the data they want with browsers. Thus, no disturbance of the maintenance on the client sites would occur, because the browsers are used for accessing the data.

Abstract: The present invention discloses a process basic record inquiry system, and the process basic record inquiry system comprises: a basic record inquiry server (BRI Server) and basic record inquiry clients (BRI Clients). While the process basic record system of the present invention is applied, the scattered and enormous data in a basic record system can be filtered and integrated properly, so that a completed manufacturing process is presented to users, and the database connection expense can be effectively saved.

Abstract: The present invention discloses an integrated service platform (ISP). Under the real-time mode, the ISP of the present invention comprises the devices of: an engineering data analysis database (EDB); an area controller database (AC Database); a web server; and client computers. Under the mode of accessing data in a certain period of time, the present invention comprises the devices of: an EDB; an AC Database; a loader; a web server; and client computers. The application of the ISP of the present invention allows users on the client sites to access the data they want with browsers. Thus, no disturbance of the maintenance on the client sites would occur, because the browsers are used for accessing the data.

Abstract: A lithography rework analysis method and system. The method is applied to a system having a network server and a user computer having a browser interface. The method transfers initial data of various machines into the network database. The network database contains rework data of machines performing lithography rework operation. Analysis time node is input to the browser interface and the analysis time node is transferred to the network server. According to the analysis time node, the network server retrieves required data from the network database and displays the data on the browser interface. Rework data residing within the network database includes data table production time, product number, production line code, station code, department code, product code, mask rework pieces, measuring station, production machine, worker name, rework reason code, rework reason title, current status, wafer lot note item, rework time and rework region.