Abstract: An end effector (20, 20?) for simultaneously transferring a batch of substrates (202). The end effector (20, 20?) includes a set of juxtaposed substrate grippers (22, 22?) having a pitch between pairs of grippers (22, 22?) that does not exceed six (6.00) mm. Each gripper (22, 22?) has a contact surface (54, 54?) against which a substrate (202) becomes clamped upon injecting a gaseous jet into an open groove (56A, 56B, 56?) formed into the contact surface (54, 54?). Due to the close spacing between immediately adjacent pairs of substrate grippers (22, 22?), the open groove (56A, 56B, 56?) must be very shallow. The open groove (56A, 56B, 56?) can be characterized by having a groove depth into the contact surface (54, 54?) that is between two (2 .00) mm and two and four tenths (2.40) mm.

Abstract: A two stage opener (50) for an EUV RSP (32, 34) includes an outer RSP pod opener (42, 44) having: 1. a RSP latch mechanism (42rlm) for latching a sealed outer RSP pod (32, 34) in place on the RSP pod opener (42, 44) and 2. a RSP lock/unlock mechanism (42lulm) for unlocking the RSP pod (32, 34) so the RSP pod opener (42, 44) can separate a RSP pod cover (32c, 343c) from a RSP pod door (32d, 34d). After the RSP lock/unlock mechanism (42lulm) unlocks the RSP pod (32,34), the RSP pod opener (42, 44) separates the RSP pod door (32d, 34d) from the RSP pod cover (32c, 34c) thereby exposing a metal case (20). The pod opener (50) also includes a metal case opener (52) having at least two (2) arms (56) for receiving and supporting the metal case cover (22) while the two stage pod opener (50) separates the metal case base (24) from the metal case cover (22) thereby exposing the hare reticle (26) carried on the metal case base (24).

Abstract: The present invention is a pod opener having an end effector which: a. grips and releases a reticle supported above the base of a pod; and b. while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, reorients the reticle. In one embodiment, the pod opener reorients the reticle by rotating it about a single axis disposed substantially perpendicular to its patterned surface. In another embodiment, the present invention is a pod opener which while transferring the reticle between the base of the pod and an adjacent IC photolithography tool, in addition to effecting rotation substantially perpendicular to a reticle's patterned surface, also turns the reticle over so a patterned surface of the reticle is oriented for proper focus within the IC photolithography tool.

Abstract: A specially adapted SMIF pod (20) receives and holds one particular type of reticle cassette (36) or reticle holder (132) selected from among dozens of different configurations thereof. The SMIF pod (20) may be interrogated to determine the particular type of reticle cassette (36) or reticle holder (132) carried therein. A reticle transfer system (50) receives a pair of such SMIF pods (20), interrogates each of the SMIF pods (20) to ascertain which type of reticle cassette (36) or reticle holder (132) the SMIF pod (20) carries, and automatically moves reticles (42) through a controlled environment from one reticle cassette (36) or reticle holder (32) to another reticle cassette (36) or reticle holder (132). A reticle reorienter (56) includable in the system (50) also permits automatically exchanging reticles (42) between a reticle carrier (144) and a reticle cassette (36) or reticle holder (132).

Abstract: A prealigner for aligning a disk-like work piece such as a silicon wafer, by centering and rotationally orienting the work piece. The prealigner centers and orients the work piece while only touching the periphery of the work piece using a plurality of wafer rollers and an air bearing table to support the weight of the wafer. The prealigner can accept a range of different diameters of work piece without modification because the wafer rollers are radially moveable until they contact and center the work piece. The prealigner includes a plurality of simple optical sensors for detecting a notch in the work piece and the work piece is rotationally oriented based on a notch detection signal from the optical sensors.

Abstract: A front-end module exchanges semiconductor wafers between a pod and a semiconductor processing tool to which the front-end module is secured. The front-end module includes a robot arm for exchanging semiconductor wafers, either individually or in a wafer carrier, between the pod and the semiconductor processing tool. The front-end module also includes at least one load-port-interface frame having a platform which receives and supports a pod opener. The load-port-interface frame is adjustable with respect to the robot arm for aligning thereto a pod opener received on the platform thereof. By adjusting the platform, a pod opener supported on the platform of the load-port-interface frame may be accurately located with respect to the robot arm.

Abstract: An elastically expandable positioning device for positioning a cover of a unified pod is disclosed, which has a central fastener having one end protruded on the interface plate and an axial input hole opened at another end, and at least one radial distributing hole equally opened at its circular surface; a ring-shaped inflatable body made from an expandable elastic material; a supporting ring encircled around the central bolt and positioned above the distributing hole, for supporting the inflatable body, the supporting ring having at least one radial inflating hole equally positioned corresponding to the radial distributing hole of the central bolt; and an input fluid source connected to the axial input hole of the central bolt, for providing an input fluid.

Abstract: A prealigner for aligning a disk-like work piece such as a silicon wafer, by centering and rotationally orienting the work piece. The prealigner centers and orients the work piece while only touching the periphery of the work piece using a plurality of wafer rollers and an air bearing table to support the weight of the wafer. The prealigner can accept a range of different diameters of work piece without modification because the wafer rollers are radially moveable until they contact and center the work piece. The prealigner includes a plurality of simple optical sensors for detecting a notch in the work piece and the work piece is rotationally oriented based on a notch detection signal from the optical sensors.

Abstract: A front-opening unified pod quick-opening apparatus. The apparatus is positioned in a front-opening unified pod loading system. The apparatus has a rail, a slide, a short linking rod having a first end rotatably fixed on the slide to drive the slide to move along the rail, a long rocker arm having a first end rotatably fixed on a second end of the short linking rod, and a second end rotatably fixed on a pin on the backboard; and a power source. When the power source drives the long rocker arm to rotate upwards around the pin on the backboard, the long rocker arm leads the short linking rod, and the short linking rod drives the slide to move upwards along the rail which results in an upward rectilinear motion, and vice versa.

Abstract: An identification system for tracking wafer carriers within a manufacturing facility. The system uses smart card technology in which an identification card is placed on each wafer carrier. The smart cards have memory for storing information about the wafer carrier. Power is transmitted to the card along with data so that the smart card does not require a separate power source. The devices for communicating with the smart cards can be stationary or they can be portable hand-carried devices. A network connects the readers to a central database.

Abstract: An identification system for tracking wafer carriers within a manufacturing facility. The system uses smart card technology in which an identification card is placed on each wafer carrier. The smart cards have memory for storing information about the wafer carrier. Power is transmitted to the card along with data so that the smart card does not require a separate power source. The devices for communicating with the smart cards can be stationary or they can be portable hand-carried devices. A network connects the readers to a central database.

Abstract: An elastically expandable positioning device for positioning a cover of a unified pod is disclosed, which has a central fastener having one end protruded on the interface plate and an axial input hole opened at another end, and at least one radial distributing hole equally opened at its circular surface; a ring-shaped inflatable body made from an expandable elastic material; a supporting ring encircled around the central bolt and positioned above the distributing hole, for supporting the inflatable body, the supporting ring having at least one radial inflating hole equally positioned corresponding to the radial distributing hole of the central bolt; and an input fluid source connected to the axial input hole of the central bolt, for providing an input fluid.

Abstract: The present invention discloses a front-opening unified pod quick-opening apparatus positioned in a front-opening unified pod loading system, the apparatus has a rail, a slide, a short linking rod having a first end rotatably fixed on the slide to drive the slide to move along the rail, a long rocker arm having a first end rotatably fixed on a second end of the short linking rod, and a second end rotatably fixed on a pin on the backboard; and a power source. Wherein when the power source drives the long rocker arm to rotate upward round the pin on the backboard, the long rocker arm leads the short linking rod, and the short linking rod drives the slide to move upward along the rail then results in an upward rectilinear motion, and vice versa.

Abstract: A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over. The arm includes a support column having an open column assembly that projects above a base. Within the assembly, a Z-axis drive energizes extension and retraction of a hollow tube carried by the support column. A shaft, rotatable about the Z-axis and having a distal end furthest from the support column's base, receives an arm assembly. An arm-assembly rotary-drive energizes the shaft's rotation. An arm base-plate, secured to the shaft's distal end, supports the arm assembly therefrom. The arm base-plate carries a wrist joint that is displaced from the Z-axis, and receives the end-effector whose rotation about a wrist-joint axis is energized by an end-effector rotary-drive.

Abstract: A three DOF SCARA arm, adapted for transporting semiconductor wafers, includes an end-effector assembly at a distal joint of the arm. In one configuration, the end-effector turns a workpiece over. The arm includes a support column having an open column assembly that projects above a base. Within the assembly, a Z-axis drive energizes extension and retraction of a hollow tube carried by the support column. A shaft, rotatable about the Z-axis and having a distal end furthest from the support column's base, receives an arm assembly. An arm-assembly rotary-drive energizes the shaft's rotation. An arm base-plate, secured to the shaft's distal end, supports the arm assembly therefrom. The arm base-plate carries a wrist joint that is displaced from the Z-axis, and receives the end-effector whose rotation about a wrist-joint axis is energized by an end-effector rotary-drive.

Abstract: A fuzzy logic controller that is dynamically adaptive to varying operating conditions. The controller remaps the intervals of the membership functions between a normalized universe of discourse and the real axis by use of an input fuzzy gain and an output fuzzy gain. The membership functions are also remapped within the universe of discourse through the use of a sensitivity index. Remapping of the membership functions allows the sensitivity of the controller to be adapted to optimize the controller's performance in changing operating conditions. This allows a robust controller to be implemented at low computational expense.