Abstract: A substrate inspection apparatus for detecting a condition of an EBR line at a substrate edge, comprising a turntable for rotating a substrate having a film coated thereon, a light irradiator and a photoelectric converter that receives specularly reflected light from the substrate and outputs a captured image signal. A two-dimensional image is generated by adding detection values of electrical signals corresponding to one radial scan from a center of the substrate for one turn of a rotator, and a changing point is judged using a judgment band set along one direction of the two-dimensional image.

Abstract: A substrate inspection apparatus for detecting a conditionof an EBR line at a substrate edge, comprising a turntable for rotating a substrate having a film coated thereon, a light irradiator, and a photoelectric converter that receives specularly reflected light from the substrate and ouputs a captured image signal. A two-dimensional image is generation by adding detection values of electrical signals corresponding to one radial scan from a center of the substrate for one turn of a rotator, and a changing point is judged using a judgment band set along one direction of the two-dimensional image.

Abstract: In a color filter inspection apparatus (1), an image pickup part (13) for performing an image pickup of a color filter (9) which travels along guide rails (23) from above with a line sensor (130) and a fluorescence lamp (14) for irradiating the color filter (9) with an illumination light from below are provided and an optical filter (131) which transmits a light in a predetermined wavelength band is attached to the image pickup part (13). A transmission wavelength band of the optical filter (131) is a wavelength band in which the transmittance of one color component filter of the color filter (9) is high and transmittances of other color component filters are low. It is thereby possible to inspect unevenness in color of the color filter (9) with respect to one color component filter with high precision.

Abstract: In a color filter inspection apparatus (1), an image pickup part (13) for performing an image pickup of a color filter (9) which travels along guide rails (23) from above with a line sensor (130) and a fluorescence lamp (14) for irradiating the color filter (9) with an illumination light from below are provided and an optical filter (131) which transmits a light in a predetermined wavelength band is attached to the image pickup part (13). A transmission wavelength band of the optical filter (131) is a wavelength band in which the transmittance of one color component filter of the color filter (9) is high and transmittances of other color component filters are low. It is thereby possible to inspect unevenness in color of the color filter (9) with respect to one color component filter with high precision.