Abstract: A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).

Abstract: A stylus has a detection element support part 1E for supporting and fixing piezoelectric elements 21 to 24 and a rod 1D placed on the detection element support part 1E. The detection element support part 1E has a plurality of flange parts 1F each being regular polygonal in cross section orthogonal to the axis of the rod 1D. The displacement detection elements are attached to the sides of the flange parts 1F in a state in which they are inclined at a predetermined angle &agr; relative to the axis of the rod 1D. If a measured force in a torsion direction Q or in a bend direction P occurs on the rod 1D through a contact ball 1A, the measured force is transmitted along substantially the length direction of the piezoelectric elements 21 to 24.

Abstract: A fine feed mechanism (50) and a coarse feed mechanism (60) respectively for minutely and greatly displacing a stylus (12) is provided to a microscopic geometry measuring device (1), so that the respective mechanisms (50, 60) are combinedly actuated for easily controlling the movement of the stylus (12) in a wide range at a short time. Further, a movable balancing portion (53) moving in a direction opposite to a movable driving portion (52) is provided to the fine feed mechanism (50). Since a reaction force caused by the movement of the movable driving portion (52) is cancelled by another reaction force caused by the movement of the movable balancing portion (53) at a fixed portion (51), no mechanical interference is caused between the respective mechanisms (50, 60), thus accurately controlling the movement of the stylus (12).

Abstract: A stylus has a detection element support part 1E for supporting and fixing piezoelectric elements 21 to 24 and a rod 1D placed on the detection element support part 1E. The detection element support part 1E has a plurality of flange parts 1F each being regular polygonal in cross section orthogonal to the axis of the rod 1D. The displacement detection elements are attached to the sides of the flange parts 1F in a state in which they are inclined at a predetermined angle &agr; relative to the axis of the rod 1D. If a measured force in a torsion direction Q or in a bend direction P occurs on the rod 1D through a contact ball 1A, the measured force is transmitted along substantially the length direction of the piezoelectric elements 21 to 24.

Abstract: In a touch signal probe (10) having a stylus holder (11), a vibrator (12) supported by the stylus holder (11) and has a contact portion (12A) to contact to a workpiece at a distal end thereof, a vibrating means (13A) for vibrating the vibrator (12) in an axial direction resonantly, and a detecting means (13B) for detecting the contact by a change in the vibration of the vibrator (12) caused by the contact to the workpiece is provided. The vibrator (12) is supported by the stylus holder (11) at two support points (A) and (B) positioned with a node of vibration of the vibrator (12) therebetween. Since the vibrating means (13A) and the detecting means (13B) are disposed spanning over the two support points, the node of vibration can be formed between the support points A and B and the size of the touch signal probe (10) can be easily reduced.

Abstract: A micro-geometry measuring device capable of reducing measuring force thereof for avoiding damage on micro-geometry of workpiece surface and measuring at a high-speed is provided. The micro-geometry measuring device has a stylus mechanism having a stylus mechanism provided to an arm and having a stylus body, a measuring force adjusting mechanism for adjusting a measuring force working between the stylus body and the workpiece, a displacement sensor for detecting a position of the arm, and a measuring force controller for controlling the measuring force adjusting mechanism. The stylus mechanism includes a vibrator for resonantly vibrating the stylus body, and a detector for detecting vibration status changing when the stylus body touches the workpiece. The change in vibration of the stylus body vibrated by the vibrator is directly detected by the detector and a signal therefrom is fed back to the measuring force controller to keep constant measuring force working between the stylus body and the workpiece.

Abstract: A stylus has a piezoelectric element support part to support and fix piezoelectric elements. The piezoelectric element support part is a regular polygonal body and its cross section orthogonal to the axis of the stylus is made a regular polygon. The piezoelectric elements are mounted on each side surface of the regular polygonal body, respectively. Sums and difference signals outputted from the piezoelectric elements are produced and a touch detection signal is generated based on the produced signals.

Abstract: There is provided a length measuring machine which is not influenced by fluctuations of air or changes in temperature. At a structure, graduations are formed in a longitudinal direction, and further a built-in light wave interferometer is provided. The built-in light wave interferometer measures a length of the structure and supplies the data to a current controller. In order to reconcile a length of the structure with a nominal value, the current controller supplies current to an electrical resistor provided at the structure to cause thermal expansion of the structure, or the structure is cooled.

Abstract: A touch probe which includes a fixed member, a movable member, a stylus, a bias means, and a reseat position system which permits the fixed member and the movable member to make contact with each other at pairs of contact points at positions which are spaced from one another. In the reseat position system, piezoelectric elements are provided which cause the fixed member and the movable member to move relatively in directions constrained by said pairs of contact points after a force applied to the movable member is removed. This realizes a touch probe which can secure high position reproducibility for a long period of time even if frictional forces act between the fixed member and the movable member.