Abstract: A cleaning apparatus cleans an object to be cleaned by ejecting a cleaning agent from a nozzle. The cleaning apparatus includes a gas ejecting device for ejecting heated gas to a surface of the object to be cleaned. The gas ejecting device is configured to move to a position above the object to be cleaned when cleaning is performed, and retract from the object to be cleaned when cleaning is not performed. An ejection quantity of the heated gas is controlled when cleaning is performed and when cleaning is not performed.

Abstract: The present invention can remove particles such as dust by flowing solvent gas such as CO2 through a line filter and eject it from a nozzle so as to be converted to solid particles or liquid droplets and eject to a workpiece to be cleaned so as to clean particles or organic materials. It is possible to make the solvent to a solid particle or liquid droplet by adjusting a gap between the nozzle and the workpiece to be cleaned; thus, it is possible to select the most preferable state according to the extent of the adhesion of organic material to the workpiece to be cleaned. Also, it is possible to remove particles such dust in the solvent by a line filter; thus, it is not necessary to use highly pure expensive solvent, and it is possible to reduce the running cost of the apparatus.

Abstract: The present invention can remove particles such as dust by flowing solvent gas such as CO2 through a line filter and eject it from a nozzle so as to be converted to solid particles or liquid droplets and eject to a workpiece to be cleaned so as to clean particles or organic materials. It is possible to make the solvent to a solid particle or liquid droplet by adjusting a gap between the nozzle and the workpiece to be cleaned; thus, it is possible to select the most preferable state according to the extent of the adhesion of organic material to the workpiece to be cleaned. Also, it is possible to remove particles such dust in the solvent by a line filter; thus, it is not necessary to use highly pure expensive solvent, and it is possible to reduce the running cost of the apparatus.

Abstract: A disk holder according to the present invention has a first core 1 and a second core 2. The cores are members having a given length with a generally U-shaped cross section and combined to oppose to each other so that adjustment of expansion and contraction of the cores can be carried out between an expanded diameter position and a contracted diameter position. The surfaces of the cores 1 and 2 are provided with rows of guides 7a and 7b and supports 8a and 8b. The row of the guides 7a and 7b forms flutes for receiving disks D one by one inbetween the guides to hold the disks at predetermined intervals. The supports 8a and 8b are projected rows for supporting the inner periphery of the axle hole of the disk by three-point support, the supports 8b being provided with resiliency. The holder 5 is inserted into the axle hole of the disk D at the contracted diameter position and supports a plurality of disks D, D, D . . . in a row at the expanded diameter position.