Abstract: A method of making a temperature dependent resistor probe for measuring temperature or mass of a flowing medium includes (a) preparation of a support plate of a metallic material; (b) applying a support foil of a temperature resistant plastic material on one side of the support plate; (c) applying a layer of temperature dependent resistive material on the support foil and finishing the resistive layer into a measuring resistor layer; and thereafter, an opening is formed in the support plate in the area below the measuring resistor layer.

Abstract: A thin-film strain gauge and a method for producing it are proposed; the strain gauge is advantageously capable of integration into a thin-film circuit. The strain gauge comprises an elastically deformable spring element in combination with at least one elongation-sensitive resistor. The resistor disposition (R1-R4), the low-impedance connections (L11-L42) between the various resistance regions and the associated connection tracks (L5-L8) are applied in a vacuum process, preferably by cathode sputtering. The low-impedance connections (L11-L42) and the connection tracks (L5-L8) are of material which, although different from the material making up the actual resistance region, still has approximately the same temperature coefficient of resistance, so as to preclude errors caused by temperature.

Abstract: A method of manufacturing a self-supporting measuring probe suitable for application in a highly corrosive environment such as for example in a muffler or suction channel of a motor vehicle, is disclosed. The probe is provided with a protective foil which is applicable on a rigid substrate carrying the measuring layers, by means of a heat sealing process in which heat and pressure are simultaneously applied on the foil. In a preferred embodiment, the edges of the foil are fused to the substrate by a laser beam.

Abstract: A thin-film strain gauge and a method for producing it are proposed; the strain gauge is advantageously capable of integration into a thin-film circuit. The strain gauge comprises an elastically deformable spring element in combination with at least one elongation-sensitive resistor. The resistor disposition (R1-R4), the low-impedance connections (L11-L42) between the various resistance regions and the associated connection tracks (L5-L8) are applied in a vacuum process, preferably by cathode sputtering. The low-impedance connections (L11-L42) and the connection tracks (L5-L8) are of material which, although different from the material making up the actual resistance region, still has approximately the same temperature coefficient of resistance, so as to preclude errors caused by temperature.

Abstract: To form a temperature sensor, for example suitable in an automotive vehicle, to determine ambient temperatures, or to provide a temperature compensated thin-film circuit, for example for incorporation with an oscillator circuit, two stable thin-film layers are applied to a non-conductive substrate, the layers being capable of being etched.